JPS6236381B2 - - Google Patents

Info

Publication number
JPS6236381B2
JPS6236381B2 JP57047354A JP4735482A JPS6236381B2 JP S6236381 B2 JPS6236381 B2 JP S6236381B2 JP 57047354 A JP57047354 A JP 57047354A JP 4735482 A JP4735482 A JP 4735482A JP S6236381 B2 JPS6236381 B2 JP S6236381B2
Authority
JP
Japan
Prior art keywords
semiconductor layer
thin film
semiconductor
white light
crystal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP57047354A
Other languages
English (en)
Japanese (ja)
Other versions
JPS58165314A (ja
Inventor
Masayoshi Koba
Katsuteru Awane
Atsushi Kudo
Tatsuo Morita
Toshiaki Myajima
Katsuji Iguchi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Institute of Advanced Industrial Science and Technology AIST
Original Assignee
Agency of Industrial Science and Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agency of Industrial Science and Technology filed Critical Agency of Industrial Science and Technology
Priority to JP57047354A priority Critical patent/JPS58165314A/ja
Publication of JPS58165314A publication Critical patent/JPS58165314A/ja
Publication of JPS6236381B2 publication Critical patent/JPS6236381B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H10P14/3802—
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104—Forming layers
    • H01L21/02365—Forming inorganic semiconducting materials on a substrate
    • H01L21/02656—Special treatments
    • H01L21/02664—Aftertreatments
    • H01L21/02667—Crystallisation or recrystallisation of non-monocrystalline semiconductor materials, e.g. regrowth
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104—Forming layers
    • H01L21/02365—Forming inorganic semiconducting materials on a substrate
    • H01L21/02518—Deposited layers
    • H01L21/02521—Materials
    • H01L21/02524—Group 14 semiconducting materials
    • H01L21/02532—Silicon, silicon germanium, germanium
    • H10P14/2921—
    • H10P14/3211—
    • H10P14/3238—
    • H10P14/3244—
    • H10P14/3248—
    • H10P14/3411—
    • H10P14/3458—

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Recrystallisation Techniques (AREA)
JP57047354A 1982-03-26 1982-03-26 半導体装置の製造方法 Granted JPS58165314A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57047354A JPS58165314A (ja) 1982-03-26 1982-03-26 半導体装置の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57047354A JPS58165314A (ja) 1982-03-26 1982-03-26 半導体装置の製造方法

Publications (2)

Publication Number Publication Date
JPS58165314A JPS58165314A (ja) 1983-09-30
JPS6236381B2 true JPS6236381B2 (Direct) 1987-08-06

Family

ID=12772799

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57047354A Granted JPS58165314A (ja) 1982-03-26 1982-03-26 半導体装置の製造方法

Country Status (1)

Country Link
JP (1) JPS58165314A (Direct)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02101767A (ja) * 1988-10-11 1990-04-13 Agency Of Ind Science & Technol 半導体装置

Also Published As

Publication number Publication date
JPS58165314A (ja) 1983-09-30

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