JPS6235809B2 - - Google Patents

Info

Publication number
JPS6235809B2
JPS6235809B2 JP18471280A JP18471280A JPS6235809B2 JP S6235809 B2 JPS6235809 B2 JP S6235809B2 JP 18471280 A JP18471280 A JP 18471280A JP 18471280 A JP18471280 A JP 18471280A JP S6235809 B2 JPS6235809 B2 JP S6235809B2
Authority
JP
Japan
Prior art keywords
chamber
boat
main reaction
vapor phase
reaction chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP18471280A
Other languages
English (en)
Japanese (ja)
Other versions
JPS57107235A (en
Inventor
Tatsuo Hatanaka
Fuki Takemata
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP18471280A priority Critical patent/JPS57107235A/ja
Publication of JPS57107235A publication Critical patent/JPS57107235A/ja
Publication of JPS6235809B2 publication Critical patent/JPS6235809B2/ja
Granted legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J3/00—Processes of utilising sub-atmospheric or super-atmospheric pressure to effect chemical or physical change of matter; Apparatus therefor
    • B01J3/006—Processes utilising sub-atmospheric pressure; Apparatus therefor

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Chemical Vapour Deposition (AREA)
  • Physical Vapour Deposition (AREA)
JP18471280A 1980-12-25 1980-12-25 Vacuum vapor growth device Granted JPS57107235A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18471280A JPS57107235A (en) 1980-12-25 1980-12-25 Vacuum vapor growth device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18471280A JPS57107235A (en) 1980-12-25 1980-12-25 Vacuum vapor growth device

Publications (2)

Publication Number Publication Date
JPS57107235A JPS57107235A (en) 1982-07-03
JPS6235809B2 true JPS6235809B2 (enrdf_load_stackoverflow) 1987-08-04

Family

ID=16158039

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18471280A Granted JPS57107235A (en) 1980-12-25 1980-12-25 Vacuum vapor growth device

Country Status (1)

Country Link
JP (1) JPS57107235A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0652093A1 (en) 1993-11-08 1995-05-10 Mitsubishi Chemical Corporation Method and apparatus for peeling coating from coated plastics and method for recycling plastics

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0650756B2 (ja) * 1982-08-27 1994-06-29 東京応化工業株式会社 薄板状被処理物の加熱処理装置
JPS6389668A (ja) * 1986-10-03 1988-04-20 Hitachi Electronics Eng Co Ltd 気相反応装置および該装置の制御方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0652093A1 (en) 1993-11-08 1995-05-10 Mitsubishi Chemical Corporation Method and apparatus for peeling coating from coated plastics and method for recycling plastics

Also Published As

Publication number Publication date
JPS57107235A (en) 1982-07-03

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