JPS6235644A - Semiconductor device - Google Patents

Semiconductor device

Info

Publication number
JPS6235644A
JPS6235644A JP17520385A JP17520385A JPS6235644A JP S6235644 A JPS6235644 A JP S6235644A JP 17520385 A JP17520385 A JP 17520385A JP 17520385 A JP17520385 A JP 17520385A JP S6235644 A JPS6235644 A JP S6235644A
Authority
JP
Japan
Prior art keywords
chip
chips
test
test circuit
circuit
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP17520385A
Other languages
Japanese (ja)
Inventor
Takashi Senba
仙波 隆司
Takehiro Hokimoto
武宏 保木本
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp filed Critical NEC Corp
Priority to JP17520385A priority Critical patent/JPS6235644A/en
Publication of JPS6235644A publication Critical patent/JPS6235644A/en
Pending legal-status Critical Current

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  • Semiconductor Integrated Circuits (AREA)
  • Design And Manufacture Of Integrated Circuits (AREA)

Abstract

PURPOSE:To facilitate the analysis of improper functioning by a method wherein a chip containing a main function as well as a testing circuit is installed in one and the same wafer in addition to chips accommodating main functions only. CONSTITUTION:Chips 1 are without a testing circuit 4 and each of chips 2 is provided with one or more signal terminal pads 5 exclusively for testing. A chip 2 is arranged adjacent to a plurality of chips 1. Connection is established, by wiring patterns 6 located on the wafer, between the circuits to be tested that are contained in a given quantity 'n' of the chips 1 and the testing circuits that are in the chips 2 that are respectively in contact with said quantity 'n' of the chips 1. This facilitates the analysis of improper functioning.

Description

【発明の詳細な説明】 〔産業上の利用分野〕 本発明は試験用回路を独立したチップとして、ウェハー
上に搭載する半導体集積装置に関する。
DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a semiconductor integrated device in which test circuits are mounted as independent chips on a wafer.

〔従来の技術〕[Conventional technology]

従来、この種の半導体集積装置第2図に示すようには、
試験用回路を個々のチップ上に具備し、ウェハー上のチ
ップは全て同一条件としている。
Conventionally, this type of semiconductor integrated device, as shown in FIG.
Test circuits are provided on each chip, and all chips on the wafer are under the same conditions.

この試験回路の機能は、第1にチップに搭載された機能
の不具合を発見することと第2に外部の自動テスター等
の試験機からのテスト信号によシ容易に機能確認が可能
であることである。
The functions of this test circuit are, firstly, to discover defects in the functions installed on the chip, and secondly, to easily check the function using test signals from an external tester such as an automatic tester. It is.

従って、チップ上には本来搭載される機能を実現する回
路及び外部への信号引出し用のパッドの他に、上記の試
験機能を実現する回路及び外部の自動テスター等の試験
機との信号のやシとりをするだめのパッドが混在する。
Therefore, in addition to the circuits that realize the functions originally installed on the chip and pads for extracting signals to the outside, there are also circuits that realize the above test functions and signal exchangers with external test equipment such as automatic testers. There is a mixture of pads used to remove dirt.

〔発明が解決しようとする問題点〕[Problem that the invention seeks to solve]

この種の半導体集積装置においては、2つの目的、即ち
第1にチップに搭載された機能の不具合を発見すること
と第2に外部の自動テスター等の試験機からのテスト信
号によシ容易に機能確認が可能なことを兼ね供える試験
回路とを搭載するため、回路上大規模になりチップレイ
アウトの一定の領域を試験用として専有するものとなる
。又、試験回路専用の信号端子用パッド及びピンを設け
ることにもなる。かかる試験回路は製品段階では前述の
第1の目的を有するものは不要となシ、従って製品とな
るチップ上に試験回路を実現し専用のパッドを設けるこ
とがチップサイズの増大、信号端子の増大につながシチ
ップコストを上げる欠点を有し、又、試験回路自体も上
記制約を受けることから必要充分な機能を全て盛シ込む
ことが難かしく、そのために不具合解析を困難にすると
いう欠点を有していた。
This type of semiconductor integrated device has two purposes: first, to discover defects in the functions installed on the chip, and second, to easily detect problems with test signals from an external tester such as an automatic tester. Since it is equipped with a test circuit that also allows for functional confirmation, the circuit becomes large-scale and a certain area of the chip layout is exclusively used for testing. Further, signal terminal pads and pins dedicated to the test circuit are also provided. Such a test circuit that has the above-mentioned first purpose is not necessary at the product stage.Therefore, realizing the test circuit on the chip that becomes the product and providing dedicated pads increases the chip size and increases the number of signal terminals. In addition, the test circuit itself is subject to the above constraints, making it difficult to incorporate all necessary and sufficient functions, which makes failure analysis difficult. Was.

〔問題点を解決するだめの手段〕[Failure to solve the problem]

本発明は、1枚のウェハー上に複数個のチップを搭載し
、各チップ上に回路の動作解析を目的とする同一の試験
回路を有する半導体集積装置において、試験回路をチッ
プ上から削除したチップの集ま)を第1のチップ群とし
、試験回路に専用の信号端子用パッドを設け、1個又は
複数個を1チツプ上に搭載したチップを第2のチップと
し、第2のチップを複数個第1のチップ群に対して任意
に配置し、かつ第1のチップ群の任意のn個のチップ内
に存在する被試験回路と任意のn個にそれぞれ隣接する
第2のチップ内に存在する試験回路とをウェハー上の配
線パターンにて接続する構成を有する。
The present invention relates to a semiconductor integrated device in which a plurality of chips are mounted on a single wafer, and each chip has the same test circuit for the purpose of analyzing the operation of the circuit, in which the test circuit is removed from the chip. A collection of chips) is defined as a first chip group, a dedicated signal terminal pad is provided on the test circuit, a chip with one or more chips mounted on one chip is defined as a second chip, and a plurality of second chips are defined as a second chip group. The circuit under test is arbitrarily arranged with respect to the first chip group, and exists in any n chips of the first chip group, and the circuit under test exists in a second chip adjacent to any n chips. The test circuit is connected to the test circuit using a wiring pattern on the wafer.

〔実施例〕〔Example〕

次に本発明について図面を参照して説明する。 Next, the present invention will be explained with reference to the drawings.

第1図は本発明の一実施例である。FIG. 1 shows an embodiment of the present invention.

】は主機能を実施するチップ、3はチップ上に搭載した
主機能を実現する回路部、2は主機能と試験回路を混載
したチップ、4は試験回路部、5は試験回路に付随する
信号端子用パッド、6は配線を示す。
] is a chip that performs the main function, 3 is a circuit section mounted on the chip that implements the main function, 2 is a chip with a mixed main function and test circuit, 4 is a test circuit section, and 5 is a signal accompanying the test circuit. Terminal pads 6 indicate wiring.

製品チップとして1のチップを用いることで対応するが
、製品チップの不具合解析のために4.5の試験機能を
搭載し3の主機能と混載させたチップ2を用いて実行す
る。
This is handled by using chip 1 as the product chip, but in order to analyze defects in the product chip, chip 2 is used, which is equipped with the test function of 4.5 and mixed with the main function of 3.

〔発明の効果〕〔Effect of the invention〕

以上説明したように本発明は、主機能を搭載したチップ
とは別に同一ウェハー上に主機能に試験回路を加えたチ
ップを混載することにょシ、試験回路に盛り込む試験機
能の規模は、製品チップへの影響がないことから必要充
分とすることが可能となり、機能不具合解析の容易性を
増す効果がある。
As explained above, the present invention involves mounting a chip with a test circuit in addition to the main function on the same wafer, in addition to a chip with the main function, and the scale of the test function incorporated in the test circuit depends on the size of the product chip. Since there is no effect on

一方製品チツブは1本来の製品機能からみると不要機能
である不具合解析のための試験回路を削除することによ
り、チップサイズの小型化及び信号端子数の削減が可能
となる効果がある。
On the other hand, the product chip has the effect of reducing the chip size and the number of signal terminals by eliminating the test circuit for failure analysis, which is an unnecessary function from the viewpoint of the original product function.

【図面の簡単な説明】[Brief explanation of drawings]

第1図は本発明のチップのレイアウト図を示す。 】・・・・・・製品チップ、2・・・・・・試験機能搭
載チップ。 3・・・・・・主機能部、4・・・・・・試験回路部、
訃・・・・・試験信号端子用パッド、6・・・・・・配
線パターン。 第2図は従来例のチップレイアウト図を示す。 1・・・・・・主機能及び試験機能を混載したチップ、
2・・・・・・主機能部、3・・・・・・試験回路部、
4・・・・・・信号端子部、訃・・・・・配線パターン
FIG. 1 shows a layout diagram of a chip of the present invention. ]... Product chip, 2... Chip with test function. 3...Main function section, 4...Test circuit section,
Death: Pad for test signal terminal, 6: Wiring pattern. FIG. 2 shows a chip layout diagram of a conventional example. 1...Chip with mixed main function and test function,
2...Main function section, 3...Test circuit section,
4...Signal terminal section, butt...Wiring pattern.

Claims (1)

【特許請求の範囲】[Claims] 試験回路を有しない第1のチップ群とし、試験回路を専
用の信号端子用パッドとともに有する第2のチップとを
同一ウェハー上に有し、該第2のチップを複数個第1の
チップ群に対して任意に配置しかつ第1のチップ群の任
意のn個のチップ内に存在する被試験回路と、任意のn
個にそれぞれ隣接する第2のチップ内に存在する試験回
路とをウェハー上配線パターンにて接続したことを特徴
とする半導体装置。
A first chip group that does not have a test circuit, and a second chip that has a test circuit along with a dedicated signal terminal pad on the same wafer, and a plurality of the second chips are included in the first chip group. A circuit under test that is arbitrarily arranged for the circuit and exists in any n chips of the first chip group;
1. A semiconductor device characterized in that each semiconductor device is connected to a test circuit existing in a second chip adjacent to each other by a wiring pattern on a wafer.
JP17520385A 1985-08-09 1985-08-09 Semiconductor device Pending JPS6235644A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17520385A JPS6235644A (en) 1985-08-09 1985-08-09 Semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17520385A JPS6235644A (en) 1985-08-09 1985-08-09 Semiconductor device

Publications (1)

Publication Number Publication Date
JPS6235644A true JPS6235644A (en) 1987-02-16

Family

ID=15992094

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17520385A Pending JPS6235644A (en) 1985-08-09 1985-08-09 Semiconductor device

Country Status (1)

Country Link
JP (1) JPS6235644A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63281450A (en) * 1987-05-13 1988-11-17 Fujitsu Ltd Semiconductor integrated circuit
US6094736A (en) * 1997-11-20 2000-07-25 Mitsubishi Denki Kabushiki Kaisha Semiconductor integrated circuit device
JP2006095401A (en) * 2004-09-29 2006-04-13 Sanki Eng Co Ltd Screen residue treatment device

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63281450A (en) * 1987-05-13 1988-11-17 Fujitsu Ltd Semiconductor integrated circuit
US6094736A (en) * 1997-11-20 2000-07-25 Mitsubishi Denki Kabushiki Kaisha Semiconductor integrated circuit device
JP2006095401A (en) * 2004-09-29 2006-04-13 Sanki Eng Co Ltd Screen residue treatment device

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