JPS6235597Y2 - - Google Patents

Info

Publication number
JPS6235597Y2
JPS6235597Y2 JP1982115001U JP11500182U JPS6235597Y2 JP S6235597 Y2 JPS6235597 Y2 JP S6235597Y2 JP 1982115001 U JP1982115001 U JP 1982115001U JP 11500182 U JP11500182 U JP 11500182U JP S6235597 Y2 JPS6235597 Y2 JP S6235597Y2
Authority
JP
Japan
Prior art keywords
laser beam
optical system
laser
generator
shg device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1982115001U
Other languages
English (en)
Japanese (ja)
Other versions
JPS5920985U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1982115001U priority Critical patent/JPS5920985U/ja
Publication of JPS5920985U publication Critical patent/JPS5920985U/ja
Application granted granted Critical
Publication of JPS6235597Y2 publication Critical patent/JPS6235597Y2/ja
Granted legal-status Critical Current

Links

JP1982115001U 1982-07-29 1982-07-29 レ−ザ加工装置 Granted JPS5920985U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1982115001U JPS5920985U (ja) 1982-07-29 1982-07-29 レ−ザ加工装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1982115001U JPS5920985U (ja) 1982-07-29 1982-07-29 レ−ザ加工装置

Publications (2)

Publication Number Publication Date
JPS5920985U JPS5920985U (ja) 1984-02-08
JPS6235597Y2 true JPS6235597Y2 (nl) 1987-09-10

Family

ID=30265619

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1982115001U Granted JPS5920985U (ja) 1982-07-29 1982-07-29 レ−ザ加工装置

Country Status (1)

Country Link
JP (1) JPS5920985U (nl)

Also Published As

Publication number Publication date
JPS5920985U (ja) 1984-02-08

Similar Documents

Publication Publication Date Title
JP5580826B2 (ja) レーザ加工装置及びレーザ加工方法
JP4640029B2 (ja) 波長変換光学系、レーザ光源、露光装置、被検物検査装置、及び高分子結晶の加工装置
US5293389A (en) Multi-pulse laser beam generation method and device and laser beam machining method and apparatus using multi-pulse laser beam
US4749840A (en) Intense laser irradiation using reflective optics
WO2005084874A1 (ja) レーザ加工装置
JP2001096386A (ja) レーザーの焦点位置を決定するための方法および装置
JP7023629B2 (ja) レーザー加工装置
JP2000299197A (ja) Ｘ線発生装置
JPH05192779A (ja) レーザ加工装置
US20130115756A1 (en) Processing method for semiconductor wafer having passivation film on the front side thereof
JPS6235597Y2 (nl)
JP2683241B2 (ja) エネルギー・ビームを用いたアニール装置
JP2003347236A (ja) レーザ照射装置
WO2022190661A1 (ja) レーザ加工装置
JP3509226B2 (ja) レーザ加工装置及び方法
JP2604395B2 (ja) レーザー加工方法
JPH1190659A (ja) レーザリペア装置
JP2003167354A (ja) 光パターニングにより無機透明材料を加工する光加工装置及び光加工方法
JPS6297791A (ja) レ−ザマ−キング装置
JP3944615B2 (ja) レーザアシストによる加工装置
JPH06134588A (ja) レーザ加工装置
JP2006013227A (ja) 照射装置および照射方法
JPS58190918A (ja) レ−ザ走査装置
JPH11121351A (ja) 焦点位置検出装置のビーム調整法
JPH09323184A (ja) レーザ加工装置