JPS6235126B2 - - Google Patents
Info
- Publication number
- JPS6235126B2 JPS6235126B2 JP54003976A JP397679A JPS6235126B2 JP S6235126 B2 JPS6235126 B2 JP S6235126B2 JP 54003976 A JP54003976 A JP 54003976A JP 397679 A JP397679 A JP 397679A JP S6235126 B2 JPS6235126 B2 JP S6235126B2
- Authority
- JP
- Japan
- Prior art keywords
- distance
- deceleration
- output
- preset
- positioning
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Control Of Position Or Direction (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP397679A JPS55102009A (en) | 1979-01-19 | 1979-01-19 | Deceleration instructing method in positioning control |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP397679A JPS55102009A (en) | 1979-01-19 | 1979-01-19 | Deceleration instructing method in positioning control |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS55102009A JPS55102009A (en) | 1980-08-04 |
| JPS6235126B2 true JPS6235126B2 (enExample) | 1987-07-30 |
Family
ID=11572079
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP397679A Granted JPS55102009A (en) | 1979-01-19 | 1979-01-19 | Deceleration instructing method in positioning control |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS55102009A (enExample) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57170525A (en) * | 1981-04-14 | 1982-10-20 | Nippon Telegr & Teleph Corp <Ntt> | Positioning control system for alignment stage |
| JPS57206926A (en) * | 1981-06-16 | 1982-12-18 | Nippon Telegr & Teleph Corp <Ntt> | Positioning method for stage |
| JPH087627B2 (ja) * | 1986-05-21 | 1996-01-29 | 日本電信電話株式会社 | フイ−ドフオワ−ド駆動信号発生方法 |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5632664B2 (enExample) * | 1973-03-22 | 1981-07-29 |
-
1979
- 1979-01-19 JP JP397679A patent/JPS55102009A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS55102009A (en) | 1980-08-04 |
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