JPS57206926A - Positioning method for stage - Google Patents

Positioning method for stage

Info

Publication number
JPS57206926A
JPS57206926A JP56091528A JP9152881A JPS57206926A JP S57206926 A JPS57206926 A JP S57206926A JP 56091528 A JP56091528 A JP 56091528A JP 9152881 A JP9152881 A JP 9152881A JP S57206926 A JPS57206926 A JP S57206926A
Authority
JP
Japan
Prior art keywords
stage
driving
coils
counters
integrator
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP56091528A
Other languages
Japanese (ja)
Inventor
Kazuo Minowa
Kimikichi Deguchi
Hiroo Kinoshita
Munenori Kanai
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Telegraph and Telephone Corp
Original Assignee
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Telegraph and Telephone Corp filed Critical Nippon Telegraph and Telephone Corp
Priority to JP56091528A priority Critical patent/JPS57206926A/en
Publication of JPS57206926A publication Critical patent/JPS57206926A/en
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70691—Handling of masks or workpieces
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D3/00—Control of position or direction
    • G05D3/12—Control of position or direction using feedback

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Automation & Control Theory (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Control Of Position Or Direction (AREA)

Abstract

PURPOSE:To obtain highly accurate positioning reproducibility by correcting the intersecting degree of an air bearing supporting linear motor driving stage and removing the stage rotational shaft error of a positioning point at the time of quick intermittent driving. CONSTITUTION:When a start signal phi2 is inputted, the 2 deg. side of a binary counter is turned on through an OR gate circuit 13 and an integrator 16 is actuated by the output of a differential amplifier 15, generates a speed reference signal waveform and excites driving coils 6, 6', so that a stage starts to move while being accelerated. Accompanied with the movement of the stage, stage present position information XR, X'R are changed and the values of counters 10, 10' are reduced momentarily. The driving coils 6, 6' are independently driven respectively by the outputs of the counters 10, 10' to control the coils 6, 6' to desired points.
JP56091528A 1981-06-16 1981-06-16 Positioning method for stage Pending JPS57206926A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56091528A JPS57206926A (en) 1981-06-16 1981-06-16 Positioning method for stage

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56091528A JPS57206926A (en) 1981-06-16 1981-06-16 Positioning method for stage

Publications (1)

Publication Number Publication Date
JPS57206926A true JPS57206926A (en) 1982-12-18

Family

ID=14028928

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56091528A Pending JPS57206926A (en) 1981-06-16 1981-06-16 Positioning method for stage

Country Status (1)

Country Link
JP (1) JPS57206926A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60223119A (en) * 1984-04-20 1985-11-07 Hitachi Ltd Noncontacting driving type precise moving base

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4893883A (en) * 1972-02-18 1973-12-04
JPS5271779A (en) * 1975-12-12 1977-06-15 Fanuc Ltd Feeding mechanism
JPS5489171A (en) * 1977-12-26 1979-07-14 Minolta Camera Kk Deceleration system for motor of numerical control apparatus
JPS54153464A (en) * 1978-05-23 1979-12-03 Mitsubishi Electric Corp Controller for positioning crane
JPS55102009A (en) * 1979-01-19 1980-08-04 Yaskawa Electric Mfg Co Ltd Deceleration instructing method in positioning control

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4893883A (en) * 1972-02-18 1973-12-04
JPS5271779A (en) * 1975-12-12 1977-06-15 Fanuc Ltd Feeding mechanism
JPS5489171A (en) * 1977-12-26 1979-07-14 Minolta Camera Kk Deceleration system for motor of numerical control apparatus
JPS54153464A (en) * 1978-05-23 1979-12-03 Mitsubishi Electric Corp Controller for positioning crane
JPS55102009A (en) * 1979-01-19 1980-08-04 Yaskawa Electric Mfg Co Ltd Deceleration instructing method in positioning control

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60223119A (en) * 1984-04-20 1985-11-07 Hitachi Ltd Noncontacting driving type precise moving base
JPH0516167B2 (en) * 1984-04-20 1993-03-03 Hitachi Ltd

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