JPS6235056B2 - - Google Patents
Info
- Publication number
- JPS6235056B2 JPS6235056B2 JP53037886A JP3788678A JPS6235056B2 JP S6235056 B2 JPS6235056 B2 JP S6235056B2 JP 53037886 A JP53037886 A JP 53037886A JP 3788678 A JP3788678 A JP 3788678A JP S6235056 B2 JPS6235056 B2 JP S6235056B2
- Authority
- JP
- Japan
- Prior art keywords
- signal
- scanning
- switching
- circuit
- sample
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000000523 sample Substances 0.000 claims description 15
- 238000010894 electron beam technology Methods 0.000 claims description 9
- 238000010586 diagram Methods 0.000 description 3
- 230000004907 flux Effects 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000001514 detection method Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
- G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
- G01N23/225—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material using electron or ion
Landscapes
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3788678A JPS54130188A (en) | 1978-03-31 | 1978-03-31 | Electronic probe device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3788678A JPS54130188A (en) | 1978-03-31 | 1978-03-31 | Electronic probe device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS54130188A JPS54130188A (en) | 1979-10-09 |
| JPS6235056B2 true JPS6235056B2 (enExample) | 1987-07-30 |
Family
ID=12510012
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3788678A Granted JPS54130188A (en) | 1978-03-31 | 1978-03-31 | Electronic probe device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS54130188A (enExample) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE10028586C2 (de) * | 2000-06-14 | 2002-04-11 | Weforma Gmbh | Stoßdämpfer |
-
1978
- 1978-03-31 JP JP3788678A patent/JPS54130188A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS54130188A (en) | 1979-10-09 |
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