JPS623385Y2 - - Google Patents

Info

Publication number
JPS623385Y2
JPS623385Y2 JP1982030930U JP3093082U JPS623385Y2 JP S623385 Y2 JPS623385 Y2 JP S623385Y2 JP 1982030930 U JP1982030930 U JP 1982030930U JP 3093082 U JP3093082 U JP 3093082U JP S623385 Y2 JPS623385 Y2 JP S623385Y2
Authority
JP
Japan
Prior art keywords
ion
temperature
gas
furnace
processed
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1982030930U
Other languages
English (en)
Japanese (ja)
Other versions
JPS5872157U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP3093082U priority Critical patent/JPS5872157U/ja
Publication of JPS5872157U publication Critical patent/JPS5872157U/ja
Application granted granted Critical
Publication of JPS623385Y2 publication Critical patent/JPS623385Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Chemical Vapour Deposition (AREA)
  • Furnace Details (AREA)
  • Discharge Heating (AREA)
  • Solid-Phase Diffusion Into Metallic Material Surfaces (AREA)
JP3093082U 1982-03-04 1982-03-04 イオン応用熱処理炉 Granted JPS5872157U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3093082U JPS5872157U (ja) 1982-03-04 1982-03-04 イオン応用熱処理炉

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3093082U JPS5872157U (ja) 1982-03-04 1982-03-04 イオン応用熱処理炉

Publications (2)

Publication Number Publication Date
JPS5872157U JPS5872157U (ja) 1983-05-16
JPS623385Y2 true JPS623385Y2 (cg-RX-API-DMAC7.html) 1987-01-26

Family

ID=29828396

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3093082U Granted JPS5872157U (ja) 1982-03-04 1982-03-04 イオン応用熱処理炉

Country Status (1)

Country Link
JP (1) JPS5872157U (cg-RX-API-DMAC7.html)

Also Published As

Publication number Publication date
JPS5872157U (ja) 1983-05-16

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