JPS6233546B2 - - Google Patents
Info
- Publication number
- JPS6233546B2 JPS6233546B2 JP53161759A JP16175978A JPS6233546B2 JP S6233546 B2 JPS6233546 B2 JP S6233546B2 JP 53161759 A JP53161759 A JP 53161759A JP 16175978 A JP16175978 A JP 16175978A JP S6233546 B2 JPS6233546 B2 JP S6233546B2
- Authority
- JP
- Japan
- Prior art keywords
- electrons
- sample
- auger
- detector
- irradiated
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000001228 spectrum Methods 0.000 claims description 14
- 238000004458 analytical method Methods 0.000 claims description 4
- 238000001514 detection method Methods 0.000 claims description 2
- 238000010894 electron beam technology Methods 0.000 description 9
- 238000000034 method Methods 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 230000007274 generation of a signal involved in cell-cell signaling Effects 0.000 description 3
- 230000007423 decrease Effects 0.000 description 2
- 230000001678 irradiating effect Effects 0.000 description 2
- 239000007787 solid Substances 0.000 description 2
- 230000003595 spectral effect Effects 0.000 description 2
- 239000000463 material Substances 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 238000000682 scanning probe acoustic microscopy Methods 0.000 description 1
- 238000004611 spectroscopical analysis Methods 0.000 description 1
- 238000010183 spectrum analysis Methods 0.000 description 1
- 238000005211 surface analysis Methods 0.000 description 1
- 230000007704 transition Effects 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
- G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
- G01N23/227—Measuring photoelectric effect, e.g. photoelectron emission microscopy [PEEM]
Landscapes
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16175978A JPS5589738A (en) | 1978-12-28 | 1978-12-28 | Auger electron photometry unit |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16175978A JPS5589738A (en) | 1978-12-28 | 1978-12-28 | Auger electron photometry unit |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5589738A JPS5589738A (en) | 1980-07-07 |
| JPS6233546B2 true JPS6233546B2 (US08124630-20120228-C00152.png) | 1987-07-21 |
Family
ID=15741345
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16175978A Granted JPS5589738A (en) | 1978-12-28 | 1978-12-28 | Auger electron photometry unit |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5589738A (US08124630-20120228-C00152.png) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2598821B2 (ja) * | 1989-03-31 | 1997-04-09 | 日本電子株式会社 | スペクトル情報に基づく自動定性分析方法 |
| JPH07183343A (ja) * | 1993-12-24 | 1995-07-21 | Nec Corp | Ｘ線光電子分光分析装置 |
| US8283631B2 (en) * | 2008-05-08 | 2012-10-09 | Kla-Tencor Corporation | In-situ differential spectroscopy |
-
1978
- 1978-12-28 JP JP16175978A patent/JPS5589738A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5589738A (en) | 1980-07-07 |
