JPS6231493B2 - - Google Patents

Info

Publication number
JPS6231493B2
JPS6231493B2 JP53119212A JP11921278A JPS6231493B2 JP S6231493 B2 JPS6231493 B2 JP S6231493B2 JP 53119212 A JP53119212 A JP 53119212A JP 11921278 A JP11921278 A JP 11921278A JP S6231493 B2 JPS6231493 B2 JP S6231493B2
Authority
JP
Japan
Prior art keywords
layer
poly
film
substrate
sio
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP53119212A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5546521A (en
Inventor
Sunao Shibata
Hisakazu Iizuka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Shibaura Electric Co Ltd filed Critical Tokyo Shibaura Electric Co Ltd
Priority to JP11921278A priority Critical patent/JPS5546521A/ja
Priority to US06/077,272 priority patent/US4267011A/en
Publication of JPS5546521A publication Critical patent/JPS5546521A/ja
Publication of JPS6231493B2 publication Critical patent/JPS6231493B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
JP11921278A 1978-09-29 1978-09-29 Method of manufacturing semiconductor device Granted JPS5546521A (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP11921278A JPS5546521A (en) 1978-09-29 1978-09-29 Method of manufacturing semiconductor device
US06/077,272 US4267011A (en) 1978-09-29 1979-09-20 Method for manufacturing a semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11921278A JPS5546521A (en) 1978-09-29 1978-09-29 Method of manufacturing semiconductor device

Publications (2)

Publication Number Publication Date
JPS5546521A JPS5546521A (en) 1980-04-01
JPS6231493B2 true JPS6231493B2 (enrdf_load_html_response) 1987-07-08

Family

ID=14755706

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11921278A Granted JPS5546521A (en) 1978-09-29 1978-09-29 Method of manufacturing semiconductor device

Country Status (1)

Country Link
JP (1) JPS5546521A (enrdf_load_html_response)

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5643613B2 (enrdf_load_html_response) * 1973-12-03 1981-10-14
JPS6022502B2 (ja) * 1976-08-27 1985-06-03 富士通株式会社 半導体装置の製造方法

Also Published As

Publication number Publication date
JPS5546521A (en) 1980-04-01

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