JPS6230692A - 液相エピタキシヤル成長装置 - Google Patents

液相エピタキシヤル成長装置

Info

Publication number
JPS6230692A
JPS6230692A JP60166812A JP16681285A JPS6230692A JP S6230692 A JPS6230692 A JP S6230692A JP 60166812 A JP60166812 A JP 60166812A JP 16681285 A JP16681285 A JP 16681285A JP S6230692 A JPS6230692 A JP S6230692A
Authority
JP
Japan
Prior art keywords
melt
holding device
substrate holding
partition plate
reservoir
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP60166812A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0310594B2 (enExample
Inventor
Toshio Sagawa
佐川　敏男
Tsunehiro Unno
恒弘 海野
Mineo Wajima
峰生 和島
Shoji Kuma
隈　彰二
Kazuhiro Kurata
倉田　一宏
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Cable Ltd
Original Assignee
Hitachi Cable Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Cable Ltd filed Critical Hitachi Cable Ltd
Priority to JP60166812A priority Critical patent/JPS6230692A/ja
Publication of JPS6230692A publication Critical patent/JPS6230692A/ja
Publication of JPH0310594B2 publication Critical patent/JPH0310594B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
JP60166812A 1985-07-30 1985-07-30 液相エピタキシヤル成長装置 Granted JPS6230692A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60166812A JPS6230692A (ja) 1985-07-30 1985-07-30 液相エピタキシヤル成長装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60166812A JPS6230692A (ja) 1985-07-30 1985-07-30 液相エピタキシヤル成長装置

Publications (2)

Publication Number Publication Date
JPS6230692A true JPS6230692A (ja) 1987-02-09
JPH0310594B2 JPH0310594B2 (enExample) 1991-02-14

Family

ID=15838121

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60166812A Granted JPS6230692A (ja) 1985-07-30 1985-07-30 液相エピタキシヤル成長装置

Country Status (1)

Country Link
JP (1) JPS6230692A (enExample)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5518996U (enExample) * 1978-07-26 1980-02-06

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5518996U (enExample) * 1978-07-26 1980-02-06

Also Published As

Publication number Publication date
JPH0310594B2 (enExample) 1991-02-14

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term