JPH0519516B2 - - Google Patents

Info

Publication number
JPH0519516B2
JPH0519516B2 JP62218053A JP21805387A JPH0519516B2 JP H0519516 B2 JPH0519516 B2 JP H0519516B2 JP 62218053 A JP62218053 A JP 62218053A JP 21805387 A JP21805387 A JP 21805387A JP H0519516 B2 JPH0519516 B2 JP H0519516B2
Authority
JP
Japan
Prior art keywords
growth
solution
substrate
growth solution
solution reservoir
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP62218053A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6461385A (en
Inventor
Tsunehiro Unno
Mineo Wajima
Hisafumi Tate
Taiichiro Konno
Hiroshi Sugimoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Cable Ltd
Original Assignee
Hitachi Cable Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Cable Ltd filed Critical Hitachi Cable Ltd
Priority to JP62218053A priority Critical patent/JPS6461385A/ja
Publication of JPS6461385A publication Critical patent/JPS6461385A/ja
Publication of JPH0519516B2 publication Critical patent/JPH0519516B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
JP62218053A 1987-09-02 1987-09-02 Liquid epitaxial growth process Granted JPS6461385A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62218053A JPS6461385A (en) 1987-09-02 1987-09-02 Liquid epitaxial growth process

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62218053A JPS6461385A (en) 1987-09-02 1987-09-02 Liquid epitaxial growth process

Publications (2)

Publication Number Publication Date
JPS6461385A JPS6461385A (en) 1989-03-08
JPH0519516B2 true JPH0519516B2 (enExample) 1993-03-16

Family

ID=16713915

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62218053A Granted JPS6461385A (en) 1987-09-02 1987-09-02 Liquid epitaxial growth process

Country Status (1)

Country Link
JP (1) JPS6461385A (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW344100B (en) * 1996-05-31 1998-11-01 Toshiba Co Ltd Semiconductor liquid phase epitaxial growth method and apparatus

Also Published As

Publication number Publication date
JPS6461385A (en) 1989-03-08

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