JPS6230126B2 - - Google Patents
Info
- Publication number
- JPS6230126B2 JPS6230126B2 JP58216258A JP21625883A JPS6230126B2 JP S6230126 B2 JPS6230126 B2 JP S6230126B2 JP 58216258 A JP58216258 A JP 58216258A JP 21625883 A JP21625883 A JP 21625883A JP S6230126 B2 JPS6230126 B2 JP S6230126B2
- Authority
- JP
- Japan
- Prior art keywords
- powder
- nitriding
- weight
- oxygen
- gas
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B21/00—Nitrogen; Compounds thereof
- C01B21/06—Binary compounds of nitrogen with metals, with silicon, or with boron, or with carbon, i.e. nitrides; Compounds of nitrogen with more than one metal, silicon or boron
- C01B21/068—Binary compounds of nitrogen with metals, with silicon, or with boron, or with carbon, i.e. nitrides; Compounds of nitrogen with more than one metal, silicon or boron with silicon
- C01B21/0682—Preparation by direct nitridation of silicon
Landscapes
- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Inorganic Chemistry (AREA)
- Ceramic Products (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP21625883A JPS60112672A (ja) | 1983-11-18 | 1983-11-18 | 窒化珪素の製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP21625883A JPS60112672A (ja) | 1983-11-18 | 1983-11-18 | 窒化珪素の製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS60112672A JPS60112672A (ja) | 1985-06-19 |
| JPS6230126B2 true JPS6230126B2 (en:Method) | 1987-06-30 |
Family
ID=16685731
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP21625883A Granted JPS60112672A (ja) | 1983-11-18 | 1983-11-18 | 窒化珪素の製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60112672A (en:Method) |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5148799A (ja) * | 1974-10-24 | 1976-04-27 | Toyoda Chuo Kenkyusho Kk | Chitsukakeisofunmatsuno seizohoho |
| JPS5450882A (en) * | 1977-09-29 | 1979-04-21 | Tokyo Shibaura Electric Co | Vacuum circuit breaker |
| JPS584902B2 (ja) * | 1978-10-06 | 1983-01-28 | 株式会社安川電機 | 自動乾のり製造装置の「す」外し装置 |
-
1983
- 1983-11-18 JP JP21625883A patent/JPS60112672A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS60112672A (ja) | 1985-06-19 |
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