JPS6229890B2 - - Google Patents

Info

Publication number
JPS6229890B2
JPS6229890B2 JP57200958A JP20095882A JPS6229890B2 JP S6229890 B2 JPS6229890 B2 JP S6229890B2 JP 57200958 A JP57200958 A JP 57200958A JP 20095882 A JP20095882 A JP 20095882A JP S6229890 B2 JPS6229890 B2 JP S6229890B2
Authority
JP
Japan
Prior art keywords
region
film
silicon
forming
semiconductor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP57200958A
Other languages
English (en)
Japanese (ja)
Other versions
JPS58100423A (ja
Inventor
Kunio Aomura
Fujiki Tokuyoshi
Masahiko Nakamae
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Electric Co Ltd filed Critical Nippon Electric Co Ltd
Priority to JP57200958A priority Critical patent/JPS58100423A/ja
Publication of JPS58100423A publication Critical patent/JPS58100423A/ja
Publication of JPS6229890B2 publication Critical patent/JPS6229890B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H10P76/40—

Landscapes

  • Element Separation (AREA)
  • Bipolar Transistors (AREA)
JP57200958A 1982-11-15 1982-11-15 半導体装置の製造方法 Granted JPS58100423A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57200958A JPS58100423A (ja) 1982-11-15 1982-11-15 半導体装置の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57200958A JPS58100423A (ja) 1982-11-15 1982-11-15 半導体装置の製造方法

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP51114052A Division JPS6035818B2 (ja) 1976-09-22 1976-09-22 半導体装置の製造方法

Publications (2)

Publication Number Publication Date
JPS58100423A JPS58100423A (ja) 1983-06-15
JPS6229890B2 true JPS6229890B2 (member.php) 1987-06-29

Family

ID=16433132

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57200958A Granted JPS58100423A (ja) 1982-11-15 1982-11-15 半導体装置の製造方法

Country Status (1)

Country Link
JP (1) JPS58100423A (member.php)

Also Published As

Publication number Publication date
JPS58100423A (ja) 1983-06-15

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