JPS62297476A - 塩化銅エツチング廃液の再生方法及び再生装置 - Google Patents

塩化銅エツチング廃液の再生方法及び再生装置

Info

Publication number
JPS62297476A
JPS62297476A JP14173186A JP14173186A JPS62297476A JP S62297476 A JPS62297476 A JP S62297476A JP 14173186 A JP14173186 A JP 14173186A JP 14173186 A JP14173186 A JP 14173186A JP S62297476 A JPS62297476 A JP S62297476A
Authority
JP
Japan
Prior art keywords
copper
etching waste
waste liquid
soln
copper chloride
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP14173186A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6353267B2 (enrdf_load_stackoverflow
Inventor
Chiharu Ishisaki
石先 千春
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp filed Critical NEC Corp
Priority to JP14173186A priority Critical patent/JPS62297476A/ja
Publication of JPS62297476A publication Critical patent/JPS62297476A/ja
Publication of JPS6353267B2 publication Critical patent/JPS6353267B2/ja
Granted legal-status Critical Current

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23FNON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
    • C23F1/00Etching metallic material by chemical means
    • C23F1/46Regeneration of etching compositions

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • ing And Chemical Polishing (AREA)
  • Electrolytic Production Of Metals (AREA)
JP14173186A 1986-06-17 1986-06-17 塩化銅エツチング廃液の再生方法及び再生装置 Granted JPS62297476A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14173186A JPS62297476A (ja) 1986-06-17 1986-06-17 塩化銅エツチング廃液の再生方法及び再生装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14173186A JPS62297476A (ja) 1986-06-17 1986-06-17 塩化銅エツチング廃液の再生方法及び再生装置

Publications (2)

Publication Number Publication Date
JPS62297476A true JPS62297476A (ja) 1987-12-24
JPS6353267B2 JPS6353267B2 (enrdf_load_stackoverflow) 1988-10-21

Family

ID=15298898

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14173186A Granted JPS62297476A (ja) 1986-06-17 1986-06-17 塩化銅エツチング廃液の再生方法及び再生装置

Country Status (1)

Country Link
JP (1) JPS62297476A (enrdf_load_stackoverflow)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04285182A (ja) * 1990-11-16 1992-10-09 Macdermid Inc アンモニア性塩化物エッチング剤の改良再生法
JPH04314899A (ja) * 1990-11-16 1992-11-06 Macdermid Inc 廃物浴から重金属を電解採取する方法及び装置
WO2012163238A1 (zh) * 2011-05-31 2012-12-06 无锡尚德太阳能电力有限公司 处理已使用蚀刻液的再循环系统及方法
CN103422154A (zh) * 2012-05-24 2013-12-04 叶福祥 电路板酸性废蚀刻液氯化亚铜(Cu+,CuCL)离子隔膜电积再生
CN103757635A (zh) * 2013-12-13 2014-04-30 陶克(苏州)机械设备有限公司 电解槽及使用该电解槽的再生酸性蚀刻液设备及再生方法
CN105177584A (zh) * 2015-09-09 2015-12-23 成都虹华环保科技股份有限公司 一种具有再生液处理功能的酸性蚀刻废液循环再生系统

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04285182A (ja) * 1990-11-16 1992-10-09 Macdermid Inc アンモニア性塩化物エッチング剤の改良再生法
JPH04314899A (ja) * 1990-11-16 1992-11-06 Macdermid Inc 廃物浴から重金属を電解採取する方法及び装置
WO2012163238A1 (zh) * 2011-05-31 2012-12-06 无锡尚德太阳能电力有限公司 处理已使用蚀刻液的再循环系统及方法
CN103422154A (zh) * 2012-05-24 2013-12-04 叶福祥 电路板酸性废蚀刻液氯化亚铜(Cu+,CuCL)离子隔膜电积再生
CN103757635A (zh) * 2013-12-13 2014-04-30 陶克(苏州)机械设备有限公司 电解槽及使用该电解槽的再生酸性蚀刻液设备及再生方法
CN103757635B (zh) * 2013-12-13 2016-11-23 陶克(苏州)机械设备有限公司 电解槽及使用该电解槽的再生酸性蚀刻液设备及再生方法
CN105177584A (zh) * 2015-09-09 2015-12-23 成都虹华环保科技股份有限公司 一种具有再生液处理功能的酸性蚀刻废液循环再生系统

Also Published As

Publication number Publication date
JPS6353267B2 (enrdf_load_stackoverflow) 1988-10-21

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