JPS62295495A - Multilayer printed interconnection board - Google Patents

Multilayer printed interconnection board

Info

Publication number
JPS62295495A
JPS62295495A JP13898886A JP13898886A JPS62295495A JP S62295495 A JPS62295495 A JP S62295495A JP 13898886 A JP13898886 A JP 13898886A JP 13898886 A JP13898886 A JP 13898886A JP S62295495 A JPS62295495 A JP S62295495A
Authority
JP
Japan
Prior art keywords
fluororesin
laminate
resin
printed wiring
insulating substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP13898886A
Other languages
Japanese (ja)
Other versions
JPH0815235B2 (en
Inventor
英人 三澤
藤川 彰司
勝利 平川
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Electric Works Co Ltd
Original Assignee
Matsushita Electric Works Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Works Ltd filed Critical Matsushita Electric Works Ltd
Priority to JP61138988A priority Critical patent/JPH0815235B2/en
Publication of JPS62295495A publication Critical patent/JPS62295495A/en
Publication of JPH0815235B2 publication Critical patent/JPH0815235B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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  • Laminated Bodies (AREA)
  • Production Of Multi-Layered Print Wiring Board (AREA)

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。
(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【発明の詳細な説明】 3、発明の詳細な説明 [技術分野1 本発明は多層プリント配線板に関する。[Detailed description of the invention] 3. Detailed description of the invention [Technical field 1 The present invention relates to multilayer printed wiring boards.

[背景技術1 従来上り、〃ラス布基材にエポキシ樹脂あるいはポリイ
ミド樹脂を含浸させ乾燥させて形成した樹脂含浸基材を
積層成形してプリント配線板用の積層板が製造されてい
るが、この積層板の誘電率は〃ラス/エポキシ系の樹脂
含浸基材を採用した場合には4.5で、〃ラス/ポリイ
ミド系で4.0と比較的大きく、従って、高周波に対す
る特性が不充分で、高周波クロックを用いた高周波演算
回路の実装とか、通信機器回路の実装には制約を受けて
いた。 このため本発明者らは、既に、絶縁層をフッ素
樹脂又はフッ素樹脂含浸紙(不織布)基材で形成し誘電
率が小さく、高周波特性が良好な積層板を開発している
[Background technology 1] Conventionally, laminates for printed wiring boards have been manufactured by laminating and molding resin-impregnated base materials formed by impregnating and drying a lath cloth base material with epoxy resin or polyimide resin. The dielectric constant of the laminated board is 4.5 when a lath/epoxy resin-impregnated base material is used, and 4.0 when a lath/polyimide base material is used, which is relatively high. Therefore, the characteristics against high frequencies are insufficient. However, there were restrictions on the implementation of high-frequency arithmetic circuits using high-frequency clocks and the implementation of communication equipment circuits. For this reason, the present inventors have already developed a laminate having an insulating layer formed of a fluororesin or a fluororesin-impregnated paper (nonwoven fabric) base material, which has a low dielectric constant and good high frequency characteristics.

しかしながら、高密度実装化にともなって、多層化、即
ち、第3図に示すようにフッ素樹脂含浸基材で形成した
内層材1に両面にフッ素樹脂層2を介して金属箔5を貼
着して絶縁基板6′を形成し、この絶縁基板6′1に導
体パターンを形成して多層プリント配線板A′を形成し
た場合には、誘電率は小さい(2,7)いものの、寸法
変化率が10〜15%と、寸法安定性が悪くなるという
問題が新たに発生している。
However, with the trend toward high-density packaging, metal foils 5 are attached to both sides of an inner layer material 1 formed of a fluororesin-impregnated base material through fluororesin layers 2, as shown in Fig. 3. If a multilayer printed wiring board A' is formed by forming an insulating substrate 6' on this insulating substrate 6'1 and forming a conductive pattern on this insulating substrate 6'1, the dielectric constant is small (2,7), but the dimensional change rate is low. is 10 to 15%, and a new problem has arisen that dimensional stability deteriorates.

[発明の目的1 本発明は上記事情に鑑みて為されたものであり、その目
的とするところは、誘電率が小さく、高周波特性が良好
となり、高周波演剪回路、通信機回路の実装が可能な絶
縁特性に優れ、しかも多層であり高密度実装が可能であ
って寸法安定性にも優れた多層プリント配線板を提供す
ることにある。
[Objective of the Invention 1 The present invention was made in view of the above circumstances, and its purpose is to have a low dielectric constant, good high frequency characteristics, and enable implementation of high frequency shearing circuits and communication device circuits. An object of the present invention is to provide a multilayer printed wiring board that has excellent insulation properties, is multilayered, can be mounted at high density, and has excellent dimensional stability.

[発明の開示1 本発明の多層プリント配線板は、7ツ索樹脂で形成した
内層材1の片面又は両面に順次フッ素樹脂[2,7ツ索
樹脂含浸〃ラス基材の積層体3、接着剤層4及び金属箔
5を積層して絶縁基板6を形成し、この絶縁基板6の両
面に導体パターン7を形成して成るものであり、この構
成により上記目的を達成できたものである。
[Disclosure of the Invention 1] The multilayer printed wiring board of the present invention has an inner layer material 1 formed of a 7-strand resin, which is sequentially impregnated with a fluororesin [2,7-strand resin], a laminated body 3 of a lath base material, and bonded. The insulating substrate 6 is formed by laminating the agent layer 4 and the metal foil 5, and the conductor pattern 7 is formed on both surfaces of the insulating substrate 6. With this structure, the above object can be achieved.

以下本発明を添付の図面を参照して詳細に説明する。本
発明で用いるフッ素樹脂としては、三7ツ化塩化エチレ
ン樹脂(融点210〜212℃)、四7ツ化エチレン樹
ffI?(融点327℃)、四7ツ化エチレンー六7ツ
化プロピレン共重合体樹脂(融点270℃)、四7ツ化
エチレンーパーフルオロビニルエーテル共重合体樹脂(
融点302〜310’C)などのような融点が200℃
以上のものが好ましい。内層材1はフッ素樹脂フィルム
又は複数枚のフッ素at脂含浸基材の積層体の片面又は
両面に常法により導体パターン8を形成したものである
。この内層材1の両面にフッ素樹脂N2を介してフッ素
樹脂含浸ガラス基材の積層体3が積層されている。この
積層体3に接着剤層4を介して金属箔5が貼着されて絶
縁基板6が形成されている。フッ素樹脂N2はフッ素樹
脂フィルム又はフッ素樹脂含浸基材(紙、不織布、ガラ
ス布)により形成され、接着剤層2はフッ素樹脂フィル
ム、フッ素樹脂含浸紙(又は不織布)基材、他の樹脂フ
ィルム又は他の樹脂含浸基材(紙、不織布、ガラス布)
により形成されでいる。成形」二、積層体3のフッ素樹
脂はその融点が内層材1のフッ素樹脂の融点と略等しい
ものを使用するのが好ましく、又、フッ素樹脂層2のフ
ッ素樹脂及び接着剤N4のフッ素樹脂又は他の樹脂はそ
の融点が積層体3のフッ素樹脂の融点より低いものを採
用するのが好ましい。又、フッ素樹脂含浸ガラス基材の
積層体3の表面を表面処理剤で粗化させてフッ素樹脂層
2との接着性を向上させておけばよい。表面処理剤とし
ては金属ナトリウム・アンモニアとか金属ナトリウム混
合・テトラヒドロフランとか、あるいはテトラエッチ(
商品名、潤工社株式会社製)などを挙げることがで終る
。テトラエッチによる処理を説明すると、まず積層体3
の表面の汚れをアセトンなどでおとし、乾燥させる。こ
の後積層体3をテトラエッチに浸すか、金属又はポリエ
チレンのへらで塗布する。
The present invention will now be described in detail with reference to the accompanying drawings. Examples of the fluororesin used in the present invention include tri7tethylene chloride resin (melting point 210 to 212°C), tetra7tethylene chloride resin ffI? (melting point 327°C), tetra7tethylene-perfluorovinyl ether copolymer resin (melting point 270°C), tetra7tethylene-perfluorovinyl ether copolymer resin (
The melting point is 200℃, such as 302~310'C)
The above are preferred. The inner layer material 1 is made by forming a conductor pattern 8 on one or both sides of a fluororesin film or a laminate of a plurality of fluorine and atom fat-impregnated base materials by a conventional method. A laminate 3 of fluororesin-impregnated glass substrates is laminated on both surfaces of this inner layer material 1 via a fluororesin N2. A metal foil 5 is adhered to this laminate 3 via an adhesive layer 4 to form an insulating substrate 6. The fluororesin N2 is formed of a fluororesin film or a fluororesin-impregnated base material (paper, non-woven fabric, glass cloth), and the adhesive layer 2 is formed of a fluororesin film, a fluororesin-impregnated paper (or non-woven fabric) base material, another resin film or Other resin-impregnated substrates (paper, non-woven fabric, glass cloth)
It is formed by 2. It is preferable to use a fluororesin for the laminate 3 whose melting point is approximately equal to that of the fluororesin for the inner layer material 1. It is preferable to use a resin whose melting point is lower than the melting point of the fluororesin of the laminate 3 as the other resin. Further, the surface of the laminate 3 of the fluororesin-impregnated glass substrate may be roughened with a surface treatment agent to improve adhesion to the fluororesin layer 2. Surface treatment agents include metallic sodium/ammonia, metallic sodium mixture/tetrahydrofuran, or tetra-etch (
I will end by listing the product name (manufactured by Junkosha Co., Ltd.), etc. To explain the treatment by Tetra Etch, first, the laminate 3
Remove dirt from the surface with acetone etc. and dry. The laminate 3 is then dipped in Tetraetch or applied with a metal or polyethylene spatula.

処理時間はフッ素樹脂の種類により異なるが5〜10秒
程度程度る。又、金属箔を貼着した積層体3の金属箔エ
ツチングにより表面を粗化してもよい。
The processing time varies depending on the type of fluororesin, but is approximately 5 to 10 seconds. Alternatively, the surface of the laminate 3 to which the metal foil is attached may be roughened by etching the metal foil.

金属fi5としては銅箔、アルミニウム箔、真ちゅう箔
、鉄箔、ステンレス鋼箔、ニッケル箔、ケイ素鋼箔など
いずれをも採用できる。本発明の絶縁基板6は内層材1
の両面に77素樹脂フイルム又は7ツ素樹脂含浸基材、
複数枚のフッ素樹脂含浸ガラス基材3及び金属箔5を順
次積み重ね、このものを−組みとして成形プレートを介
して複数組み熱盤間に配置し、200℃以上、20−1
50kg/c+++2.40〜100分で加熱加圧して
積層一体化させて製造される。この絶縁基板6を順次、
孔明け、無電解めっき、パターン形成、パターンめっき
、レジストめっミ、レジスト除去、エツチング、外形仕
上げ、シンボルマーク印刷といった工程でスルーホール
めっき多層プリント配線板Aが製造される。
Any of copper foil, aluminum foil, brass foil, iron foil, stainless steel foil, nickel foil, silicon steel foil, etc. can be used as the metal fi5. The insulating substrate 6 of the present invention is an inner layer material 1
77 base resin film or 7 base resin impregnated base material on both sides of
A plurality of fluororesin-impregnated glass substrates 3 and metal foils 5 are stacked one after another, and this set is placed between heating plates via a molding plate, and heated at 200° C. or higher at 20-1.
50kg/c+++2. Manufactured by heating and pressurizing for 40 to 100 minutes to integrate the layers. This insulating substrate 6 is sequentially
A through-hole plated multilayer printed wiring board A is manufactured through the steps of hole drilling, electroless plating, pattern formation, pattern plating, resist plating, resist removal, etching, external finishing, and symbol mark printing.

尚、本発明は第1図に示すような4層だけでなく、3層
あるいは第2図に示すような6層以上のものも含むもの
である。
Note that the present invention includes not only four layers as shown in FIG. 1, but also three layers or six or more layers as shown in FIG.

次に本発明の実施例を具体的に説明する。Next, embodiments of the present invention will be specifically described.

(実施例1) 融点が330℃のフッ素樹脂含浸ガラス基材から形成し
た内層材の両面に、順次融点が330℃のフッ素樹脂フ
ィルム、融点が330℃の7ツ素樹脂含浸〃ラス基材の
積層体、融点が330℃の7ツ索樹脂フイルム、銅箔を
積み重ねて、このものを−組として熱盤間に複数組み配
置して加熱加圧成形して銅箔張り絶縁基板を形成した(
11図参照)。加熱加圧条件は、280’C、10kg
/c+o2.120分であった。
(Example 1) Both sides of an inner layer material formed from a glass substrate impregnated with a fluororesin having a melting point of 330°C are sequentially coated with a fluororesin film having a melting point of 330°C and a glass base material impregnated with a 7-carbon resin having a melting point of 330°C. A laminate, a 7-wire resin film with a melting point of 330°C, and a copper foil were stacked together, and multiple sets of these were placed between heating plates and molded under heat and pressure to form a copper foil-clad insulating substrate (
(See Figure 11). Heating and pressurizing conditions are 280'C, 10kg
/c+o2.120 minutes.

この絶縁基板から常法により4Nプリント配線板を製造
した。誘電率を測定した(JIS C8481による)
。誘電率は2.6であった。又、寸法変化率は9%であ
った。
A 4N printed wiring board was manufactured from this insulating substrate by a conventional method. Dielectric constant was measured (according to JIS C8481)
. The dielectric constant was 2.6. Further, the dimensional change rate was 9%.

(実施例2) 接着剤層としてフッ素樹脂フィルム以外の他の1[tフ
ィルム(ボンディングフィルム、No−6700住友3
M(株)製)を使用し、204℃、7kg/cre2.
120分かけて加熱加圧した以外は実施例1と同様にし
て4層プリント配線板を製造した(第2図参照)。
(Example 2) A 1[t film (bonding film, No. 6700 Sumitomo 3] other than the fluororesin film) was used as the adhesive layer.
M Co., Ltd.) at 204°C, 7kg/cre2.
A four-layer printed wiring board was manufactured in the same manner as in Example 1, except that heating and pressing was performed for 120 minutes (see FIG. 2).

誘電率は2.7であった。寸法変化率は5%であった。The dielectric constant was 2.7. The dimensional change rate was 5%.

(実施例3) 一方の積層体としてその両面に銅箔を貼着し、エツチン
グに上り銅箔を除去したアンクラツド板を使用した以外
は実施例1と同様にして4層プリント配線板を製造した
。誘電率は2.5であった。
(Example 3) A 4-layer printed wiring board was manufactured in the same manner as in Example 1, except that one of the laminates was an unclad board with copper foil pasted on both sides and the copper foil removed by etching. . The dielectric constant was 2.5.

寸法変化率は2%であった。又シこの実施例ではスルホ
ール信頼性はオイルディップ27回であった。
The dimensional change rate was 2%. Also, in this example, the through-hole reliability was 27 oil dips.

(実施例4) 実施例1と同様の内層材の片面に、順次実施例1と同様
のフッ素樹脂フィルム、積層体として実施例3と同様な
アンクラツド板、接着剤層として実施例1と同様のフッ
素樹脂フィルム、銅箔を積み重ね、この内層材の他面に
実施例1と同様のフッ素樹脂フィルム、積層体、他の内
層材、接着剤層として実施例2と同様な樹脂フィルム、
銅箔を積み重ねてこのものを一組として熱盤間に複数組
み配置して加熱加圧成形して銅箔張り絶縁基板を形成し
た(第2図参照)。加熱加圧条件は、204℃、7kg
/C1112,60分であった。この絶縁基板から常法
により6層プリント配線板を製造した。誘電率は2゜6
であった。又、寸法変化率は2%であった。スルホール
信頼性はオイルディップ25回であった。
(Example 4) On one side of the same inner layer material as in Example 1, the same fluororesin film as in Example 1, the same unclad plate as in Example 3 as a laminate, and the same as in Example 1 as an adhesive layer were applied. A fluororesin film and a copper foil are stacked, and on the other side of this inner layer material, a fluororesin film similar to that of Example 1, a laminate, another inner layer material, a resin film similar to that of Example 2 as an adhesive layer,
Copper foils were stacked and a plurality of sets were arranged between hot platens and molded under heat and pressure to form a copper foil-clad insulating substrate (see Fig. 2). The heating and pressurizing conditions are 204℃, 7kg
/C1112, 60 minutes. A six-layer printed wiring board was manufactured from this insulating substrate by a conventional method. The dielectric constant is 2°6
Met. Further, the dimensional change rate was 2%. Through hole reliability was 25 oil dips.

(実施例5) 積層体として実施例3と同様なアンクラツド板に更にテ
トラエッチにより表面処理を施した以外は実施例4と同
様にして6層プリント配線板を製造した。誘電率は2.
5であった。寸法変化率は2=7− %であった。スルホール信頼性はオイルディップ28回
であった。
(Example 5) A 6-layer printed wiring board was manufactured in the same manner as in Example 4, except that the same unclad board as in Example 3 was used as a laminate and was further subjected to surface treatment by tetra-etch. The dielectric constant is 2.
It was 5. The dimensional change rate was 2=7-%. Through-hole reliability was 28 oil dips.

(比較例) 積層体及び接着剤層を介装させなかった以外は実施例1
と同様にして4層プリント配線板を製造した。誘電率は
2.7であり、寸法変化率は13%で、スルホール信頼
性はオイルディップ20回と本発明の実施例と比較して
低いものであった。
(Comparative example) Example 1 except that the laminate and adhesive layer were not interposed.
A four-layer printed wiring board was manufactured in the same manner as above. The dielectric constant was 2.7, the dimensional change rate was 13%, and the through-hole reliability was 20 oil dips, which was low compared to the examples of the present invention.

[発明の効果1 本発明にあっては、フッ素樹脂で形成した内層材の片面
又は両面に順次7−)素樹脂層、フッ素樹脂含浸ガラス
基材の積層体、接着剤層及び金属箔を積層して絶縁基板
を形成し、この絶縁基板の両面に導体パターンを形成し
ているので、誘電率が小さく、高周波特性が良好となり
、高周波クロックを使用する高周波演算回路、通信機回
路の実装が可能な絶縁特性に優れ、しがも多層であり高
密度実装が可能で、更に、フッ素樹脂含浸ガラス基材の
積層体を介装さセているので、寸法安定性にも優れるも
のである。
[Effect of the invention 1] In the present invention, 7-) a base resin layer, a laminate of a fluororesin-impregnated glass substrate, an adhesive layer, and a metal foil are sequentially laminated on one or both sides of an inner layer material formed of a fluororesin. Since an insulating substrate is formed using the insulating substrate, and conductive patterns are formed on both sides of this insulating substrate, the dielectric constant is small and the high frequency characteristics are good, making it possible to implement high frequency arithmetic circuits and communication circuits that use high frequency clocks. It has excellent insulation properties, is multi-layered, allows high-density packaging, and has excellent dimensional stability because it is interposed with a laminate of fluororesin-impregnated glass substrates.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は本発明の一実施例を示す概略分解断面図、第2
図は同上の他の実施例を示す概略分解断面図、第3図は
本発明者らが開発した多層プリント配線板の他側を示す
概略分解断面図であって、Aはプリント配線板、1は内
層材、2はフッ素樹脂層、3は積層体、4は接着剤層、
5は金属箔、6は絶縁基板、7は導体パターンである。 代理人 弁理士 石 1)艮 七 第1図 第2図       第3′A 手続補正書(自発) 昭和61年11月29日 特許庁長官殿               −11、
事件の表示 昭和61年特許順第138988号 2、発明の名称 多層プリント配線板 3、補正をする者 事件との関係  特許出願人 住 所 大阪府門真市大字門真1048番地名称(58
3)松下電工株式会社 代表者  藤  井  I  夫 4、代理人 郵便番号 530 住 所 大阪市北区梅田1丁目12番17号5、補正命
令の日付 自  発 6、補正により増加する発明の数 なしく1)明細書を
別紙全文補正明細書の通り補正致します。 (2)添付図面を全図削除して、別紙第1図、第2図及
び第3図を挿入致します。 代理人 弁理士 石 1)長 七 全文補正明細書 1、発明の名称 多層プリント配線板 2、特許請求の範囲 (1)フッ素樹脂で形成した内層材の片面又は両面に順
次111.7ツ素樹脂含浸〃ラス基材友び  は7ツ 
  フィルムの積層体、接着層及び金属箔を積層して絶
縁基板を形成し、この絶縁基板に導体パターンを形成し
て成ることを特徴とする多層プリント配線板。 <2)79案樹脂含浸ガラス基材の積層体の表面を表面
処理剤で粗化して成ることを特徴とする特許請求の範囲
第1項記載の多層プリント配線板。 3、発明の詳細な説明 [技術分野1 本発明は多層プリント配線板に関する。 1背景技術1 従来より、ガラス布基材にエポキシ樹脂あるいはポリイ
ミド樹脂を含浸させ乾燥させて形成した樹脂含浸基材を
積層成形してプリント配線板用の積層板が製造されでい
るが、この積層板の誘電率はガラス/エポキシ系の樹脂
含浸基材を採用した場合には4.5で、〃ラス/ポリイ
ミド系で4.0と比較的大外く、従って、高周波に対す
る特性が不充分で、高周波クロックを用いた高周波演算
回路の実装とか、通信機器回路の実装には制約を受けて
いた。 このため本発明者らは、既に、絶縁層をフッ素樹脂又は
フッ素樹脂含浸布(不織布)基材で形成し誘電率が小さ
く、高周波特性が良好な積層板を開発している。 しかしながら、高密度実装化にともなって、多層化、即
ち、第3図に示すようにフッ素樹脂含浸基材で形成した
内層材1に両面に接着N2を介して金属箔4を貼着して
絶縁基板5′を形成し、この絶縁基板5′に導体パター
ン6を形成して多層プリント配線板A′を形成した場合
には、誘電率は小さい(2,7)いものの、寸法変化率
が10〜15%と、寸法安定性が悪くなるという問題が
新たに発生している。 [発明の目的1 本発明は上記事情に鑑みて為されたものであり、その目
的とするところは、誘電率が小さく、高周波特性が良好
となり、高周波演算回路、通信機回路の実装が可能で絶
縁特性に優れ、しかも多層であり高密度実装が可能であ
って寸法安定性にも優れた多層プリント配線板を提供す
ることにある。 [発明の開示1 本発明の多層プリント配線板は、77索樹脂で形成した
内層材1の片面又は両面に順次接着層2、フッ素樹脂含
浸ガラス基材及び/又は7ツ素樹脂フイルムの積層体3
、接着剤層2及び金属箔4を積層して絶縁基板5を形成
し、この絶縁基板5の両面に導体パターン6を形成して
成るものであり、この構成により上記目的を達成できた
ものである。 以下本発明を添付の図面を参照して詳細に説明する。本
発明で用いるフッ素樹脂としては、三7)化塩化エチレ
ン樹脂(融点210〜212℃)、I!!117フ化エ
チレン樹脂(融点327℃)、四7ツ化エチレン−六7
フ化プロピレン共重合体樹脂(融点270℃)、四7ツ
化エチレンーパーフルオロビニルエーテル共重合体樹脂
(融点302〜310℃)などのような融点が200℃
以上のものが好ましい。内層材1は複数枚のフッ素樹脂
フィルム及び/又は7ツ素樹脂含浸基材の積層体の片面
又は両面に常法により内層導体パターン7を形成したも
のである。この内層材1の両面に接着N2を介して積層
体3が積層されている。積層体3は7ツ索樹脂フイルム
又は/及びフッ素樹脂含浸ガラス基材からなるものであ
る。この積層体3に接着層2を介して金属箔4が貼着さ
れて絶縁基板5が形成されている。接着層2は7ツ素樹
脂フイルム又はフッ素樹脂含浸基材(紙、不織布、ガラ
ス布)、あるいは他の樹脂フィルム又は他の樹脂含浸基
材(紙、不織布、ガラス布)により形成されている。成
形上、積層体3のフッ素樹脂はその融点が内層材1のフ
ッ素樹脂の融点と略等しいものを使用するのが好ましく
、又、接着層2のフッ素樹脂又は他の樹脂はその融点が
内層材1及び積層体3のフッ素樹脂の融点より低いもの
を採用するのが好ましい。又、7ツ索樹脂含浸〃ラス基
材の積層体3の表面を表面処理剤で粗化させて接着層2
との接着性を向」ニさせておけばよい。表面処理剤とし
ては金属ナトリウム・アンモニアとか金属ナトリウム混
合・テトラヒドロ7ランとか、あるいはテトラエッチ(
商品名、潤工社株式会社製)などを挙げることができる
。テトラエッチによる処理を説明すると、まず積層体3
の表面の汚れをアセトンなどで落とし、乾燥させる。こ
の後積層体3をテトラエッチに浸すか、金属又はポリエ
チレンのへらで塗布する。処理時間はフッ素樹脂の種類
により異なるが5〜10秒程度程度る。又、金属箔を貼
着した積層体3の釡属箔エツチングにより表面を粗化し
てもよい。金属箔5としては銅箔、アルミニウム箔、真
ちゅう箔、鉄箔、ステンレス鋼箔、ニッケル箔、ケイ素
鋼箔などいずれをも採用できる。本発明の絶縁基板6は
内層材1の両面にフッ素樹脂フィルム又はフッ素樹脂含
浸基材、複数枚のフッ素樹脂含浸ガラス基材3及び金属
箔5を順次積み重ね、このものを−組みとして成形プレ
ートを介して複数組み熱盤間に配置し、200℃以上、
20〜150kg/Cll12.40〜100分で加熱
加圧して積層一体化させて製造される。 加熱温度は接着層2の融点よりも高く、また望ましくは
内層材1の融点よりも低い方が寸法安定性を向上させる
ためにも好ましい。この絶縁基板5を順次、孔明け、無
電解めっき、パターン形成、パターンめっト、レジスト
めっき、レジスト除去、エツチング、外形仕上げ、シン
ボルマーク印刷といった工程でスルーホールめっき多層
プリント配線板Aが製造される。尚、本発明は第1図に
示すような4層だけでなく、3層あるいは第2図に示す
ような6層以上のものも含むものである。 次に本発明の実施例を具体的に説明する。 (実施例1) 融点が330℃の7ツ索樹脂含浸ガラス基材及び四7ツ
化エチレン樹脂フィルムから形成した内層材の両面に、
順次融点が270℃の77索樹脂フイルム、融点が33
0℃のフッ素樹脂含浸ガラス基材及び四7ツ化エチレン
フィルムの積層体、融点が270℃のフッ素樹脂フィル
ム、銅箔を積み重ねて、このものを−組として熱盤間に
複数組み配置〔て加熱加圧成形して銅箔張り絶縁基板を
形成した(第1図参照)。加熱加圧条件は、300’C
s 10kg/ca+2.120分であった。この絶縁
基板から常法によI)4層プリント配線板を製造した。 誘電率(JIS C6481による)を測定したところ
2.6であった。又、寸法変化率は9%であった。 (実施例2) 接着層として実施例1よりも融点の低い7ツ索111]
Wフイルム(ボンディングフィルム、No−6700住
友3M(株)製)を使用し、204℃、7kg/c11
12.120分かけて加熱加圧した以外は実施例1と同
様にして4層プリント配線板を製造した(第1図参照)
。 誘電率は2.7であった。寸法変化率は5%であった。 (実施例3) 一方の積層体としてその両面に銅箔を貼着し、エツチン
グにより銅箔を除去したアンクラツド板を使用した以外
は実施例1と同様にして4層プリ、   −6− ント配線板を製造した(第1図参照)。誘電率は2゜5
であった。寸法変化率は2%であった。又、この実施例
ではスルホール信頼性はオイルディップ27回であった
。 (実施例4) 実施例1と同様な二枚の内層材、積層体として実施例3
と同様な三枚のアンクラツド板、実施例1と同様な接着
層、そして銅箔を積み重ねてこのものを一組として熱盤
間に複数組み配置して加熱加圧成形して銅箔張り絶縁基
板を形成した(第2図参照)。加熱加圧条件は、204
℃、7kg/ca+2.60分であった。この絶縁基板
から常法により6層プリント配線板を製造した。誘電率
は2.6であった。 又、寸法変化率は2%であった。スルホール信頼性はオ
イルディップ25回であった。 (実施例5) 積層体として実施例3と同様なアンクラツド板に更にテ
トラエッチにより表面処理を施した以外は実施例4と同
様にして6層プリント配線板を製造した。誘電率は2.
5であった。寸法変化率は2%であった。スルホール信
頼性はオイルディップ28回であった。 (比較例) 実施例1と同様な内層材の両面に融点が330℃のフッ
素樹脂フィルム及びフッ素樹脂含浸ガラス基材、次いで
銅箔を積み重ね、加熱温度が370℃とした以外は実施
例1と同様にして479プリント配線板を製造した(第
2図参照)。誘電率は2.7であり、寸法変化率は13
%で、スルホール信頼性はオイルディップ20回と本発
明の実施例と比較して低いものであった。 [発明の効果1 本発明にあっては、フッ素樹脂で形成した内層材の片面
又は両面に順次接着層、フッ素樹脂含浸ガラス基材及び
/又はフッ素樹脂フィルムの積層体、接着剤層及び金J
K箔を積層して絶縁基板を形成し、この絶縁基板の両面
に導体パターンを形成しているので、誘電率が小さく、
高周波特性が良好となり、高周波り、四ツクを使用する
高周波演算回路、通信機回路の実装が可能で絶縁特性に
優れ、しかも多層であり高密度実装が可能であり、又、
内層材のフッ素樹脂の融点よりも低い温度で成形すると
いった成形条件の設定により、内層材の再溶融を少なく
することにより、フッ素樹脂含浸ガラス基材及び又は7
ツ素樹脂フイルムの積層体を介装させていることと相ま
って、寸法安定性にも優れるものである。 4、図面の簡単な説明 #S1図は本発明の一実施例を示す概略分解断面図、第
2図は同上の他の実施例を示す概略分解断面図、第3図
は本発明者らが開発した多層プリント配線板の他側を示
す概略分解断面図であって、Aはプリント配線板、1は
内層材、2は接着層、3は積層体、4は金属箔、5は絶
縁基板、6は導体パターンである。 代理人 弁理士 石 1)長 七 ?A2図
FIG. 1 is a schematic exploded cross-sectional view showing one embodiment of the present invention, and FIG.
The figure is a schematic exploded cross-sectional view showing another embodiment of the same as above, and FIG. is an inner layer material, 2 is a fluororesin layer, 3 is a laminate, 4 is an adhesive layer,
5 is a metal foil, 6 is an insulating substrate, and 7 is a conductor pattern. Agent Patent Attorney Ishi 1) Ai Figure 7 Figure 1 Figure 2 Figure 3'A Procedural Amendment (Voluntary) November 29, 1985 To the Commissioner of the Japan Patent Office -11.
Indication of the case 1986 Patent Order No. 138988 2, Name of the invention Multilayer printed wiring board 3, Person making the amendment Relationship to the case Patent applicant address 1048 Kadoma, Kadoma City, Osaka Prefecture Name (58
3) Matsushita Electric Works Co., Ltd. Representative Io Fujii 4, Agent postal code 530 Address 1-12-17-5 Umeda, Kita-ku, Osaka City Date of amendment order 6 Number of inventions increased by amendment None 1) The specification will be amended as per the attached full text amended specification. (2) All attached drawings will be deleted and attached sheets Figures 1, 2 and 3 will be inserted. Agent Patent Attorney Ishi 1) Long Seventh Full Text Amended Specification 1, Name of Invention Multilayer Printed Wiring Board 2, Claims (1) 111.7 tungsten resin sequentially on one or both sides of the inner layer material formed of fluororesin Impregnation: 7 lath base material friends
1. A multilayer printed wiring board characterized in that an insulating substrate is formed by laminating a film laminate, an adhesive layer, and a metal foil, and a conductor pattern is formed on this insulating substrate. <2) The multilayer printed wiring board according to claim 1, characterized in that the surface of a laminate of 79 resin-impregnated glass substrates is roughened with a surface treatment agent. 3. Detailed Description of the Invention [Technical Field 1 The present invention relates to a multilayer printed wiring board. 1 Background Art 1 Conventionally, laminates for printed wiring boards have been manufactured by laminating and molding resin-impregnated base materials formed by impregnating and drying a glass cloth base material with epoxy resin or polyimide resin. The dielectric constant of the plate is 4.5 when a glass/epoxy resin-impregnated base material is used, and 4.0 when a lath/polyimide base material is used, which is a relatively large difference.Therefore, the properties against high frequencies are insufficient. However, there were restrictions on the implementation of high-frequency arithmetic circuits using high-frequency clocks and the implementation of communication equipment circuits. For this reason, the present inventors have already developed a laminate having an insulating layer formed of a fluororesin or a fluororesin-impregnated cloth (nonwoven fabric) base material, which has a low dielectric constant and good high frequency characteristics. However, with the trend toward high-density packaging, multi-layering is required. In other words, as shown in FIG. When a multilayer printed wiring board A' is formed by forming a substrate 5' and forming a conductive pattern 6 on this insulating substrate 5', the dielectric constant is small (2,7), but the dimensional change rate is 10. ~15%, which is a new problem of poor dimensional stability. [Objective of the Invention 1 The present invention has been made in view of the above circumstances, and its purpose is to have a low dielectric constant, good high frequency characteristics, and to enable the implementation of high frequency arithmetic circuits and communication device circuits. It is an object of the present invention to provide a multilayer printed wiring board that has excellent insulation properties, is multilayered, can be mounted at high density, and has excellent dimensional stability. [Disclosure 1 of the Invention] The multilayer printed wiring board of the present invention includes an inner layer material 1 made of a 77 resin, an adhesive layer 2 on one or both sides of the inner layer 1, a laminate of a fluororesin-impregnated glass substrate and/or a 7 resin film. 3
, an insulating substrate 5 is formed by laminating an adhesive layer 2 and a metal foil 4, and a conductive pattern 6 is formed on both sides of this insulating substrate 5. With this structure, the above object can be achieved. be. The present invention will now be described in detail with reference to the accompanying drawings. Examples of the fluororesin used in the present invention include 37) chlorinated ethylene resin (melting point 210 to 212°C), I! ! 117-fluorinated ethylene resin (melting point 327°C), 47-fluorinated ethylene-67
Polypropylene fluoride copolymer resin (melting point 270°C), ethylene tetrafluoride-perfluorovinyl ether copolymer resin (melting point 302-310°C), etc. have a melting point of 200°C.
The above are preferred. The inner layer material 1 has an inner layer conductor pattern 7 formed on one or both sides of a laminate of a plurality of fluororesin films and/or a base material impregnated with a seven-layer resin by a conventional method. A laminate 3 is laminated on both surfaces of this inner layer material 1 via adhesive N2. The laminate 3 is made of a 7-strand resin film and/or a fluororesin-impregnated glass substrate. A metal foil 4 is adhered to this laminate 3 via an adhesive layer 2 to form an insulating substrate 5. The adhesive layer 2 is formed of a 7-carbon resin film or a fluororesin-impregnated base material (paper, non-woven fabric, glass cloth), or another resin film or other resin-impregnated base material (paper, non-woven fabric, glass cloth). For molding, it is preferable to use a fluororesin for the laminate 3 whose melting point is approximately equal to that of the fluororesin for the inner layer material 1, and for the fluororesin or other resin for the adhesive layer 2 to have a melting point equal to that of the inner layer material. It is preferable to use a material having a melting point lower than that of the fluororesins of 1 and 3. In addition, the surface of the laminated body 3 of the lath base material impregnated with 7-strand resin is roughened with a surface treatment agent to form the adhesive layer 2.
It is only necessary to improve the adhesion with the material. Surface treatment agents include metallic sodium/ammonia, metallic sodium mixture/tetrahydro7ran, or tetra-etch (
Examples include the product name (manufactured by Junkosha Co., Ltd.). To explain the treatment by Tetra Etch, first, the laminate 3
Remove dirt from the surface with acetone etc. and dry. The laminate 3 is then dipped in Tetraetch or applied with a metal or polyethylene spatula. The processing time varies depending on the type of fluororesin, but is approximately 5 to 10 seconds. Alternatively, the surface of the laminate 3 to which the metal foil is attached may be roughened by etching the metal foil. As the metal foil 5, copper foil, aluminum foil, brass foil, iron foil, stainless steel foil, nickel foil, silicon steel foil, etc. can be used. The insulating substrate 6 of the present invention consists of sequentially stacking a fluororesin film or a fluororesin-impregnated base material, a plurality of fluororesin-impregnated glass base materials 3, and a metal foil 5 on both sides of an inner layer material 1, and then assembling this material into a molded plate. Placed between multiple sets of heating plates through the
20 to 150 kg/Cll12. Manufactured by heating and pressing for 40 to 100 minutes and laminating and integrating. The heating temperature is preferably higher than the melting point of the adhesive layer 2 and preferably lower than the melting point of the inner layer material 1 in order to improve dimensional stability. A through-hole plated multilayer printed wiring board A is manufactured from this insulating substrate 5 through the following steps: hole-drilling, electroless plating, pattern formation, pattern plating, resist plating, resist removal, etching, external finishing, and symbol mark printing. Ru. Note that the present invention includes not only four layers as shown in FIG. 1, but also three layers or six or more layers as shown in FIG. Next, embodiments of the present invention will be specifically described. (Example 1) On both sides of an inner layer material formed from a glass base material impregnated with a 7-stranded resin having a melting point of 330°C and a 47-stranded ethylene resin film,
77 resin film with sequential melting point of 270℃, melting point of 33
A laminate of a fluororesin-impregnated glass substrate at 0°C and a tetroxyethylene film, a fluororesin film with a melting point of 270°C, and copper foil were stacked together, and multiple sets were placed between heating plates. A copper foil-clad insulating substrate was formed by heating and pressure molding (see FIG. 1). The heating and pressurizing conditions are 300'C.
s 10 kg/ca+2.120 minutes. I) A four-layer printed wiring board was manufactured from this insulating substrate by a conventional method. The dielectric constant (according to JIS C6481) was measured and found to be 2.6. Further, the dimensional change rate was 9%. (Example 2) 7-wire 111 with a lower melting point than Example 1 as an adhesive layer]
Using W film (bonding film, No. 6700 manufactured by Sumitomo 3M Co., Ltd.), 204°C, 7kg/c11
12. A 4-layer printed wiring board was manufactured in the same manner as in Example 1, except that heating and pressing was performed for 120 minutes (see Figure 1).
. The dielectric constant was 2.7. The dimensional change rate was 5%. (Example 3) A four-layer pre-printed, -6-int wiring was made in the same manner as in Example 1, except that an unclad board with copper foil pasted on both sides and the copper foil removed by etching was used as one of the laminates. A plate was manufactured (see Figure 1). The dielectric constant is 2°5
Met. The dimensional change rate was 2%. Further, in this example, the through-hole reliability was 27 oil dips. (Example 4) Two inner layer materials similar to Example 1, Example 3 as a laminate
A set of three unclad plates similar to , an adhesive layer similar to Example 1, and copper foil are stacked together, and multiple sets are placed between hot platens and molded under heat and pressure to form a copper foil-covered insulating board. was formed (see Figure 2). The heating and pressurizing conditions are 204
℃, 7 kg/ca + 2.60 minutes. A six-layer printed wiring board was manufactured from this insulating substrate by a conventional method. The dielectric constant was 2.6. Further, the dimensional change rate was 2%. Through-hole reliability was 25 oil dips. (Example 5) A 6-layer printed wiring board was manufactured in the same manner as in Example 4, except that the same unclad board as in Example 3 was used as a laminate and was further subjected to surface treatment by tetra-etch. The dielectric constant is 2.
It was 5. The dimensional change rate was 2%. Through-hole reliability was 28 oil dips. (Comparative example) Example 1 except that a fluororesin film with a melting point of 330°C and a fluororesin-impregnated glass substrate were stacked on both sides of the same inner layer material as in Example 1, and then copper foil was stacked at a heating temperature of 370°C. A 479 printed wiring board was manufactured in the same manner (see FIG. 2). The dielectric constant is 2.7 and the dimensional change rate is 13
%, the through-hole reliability was 20 oil dips, which was lower than that of the example of the present invention. [Effect of the invention 1] In the present invention, an adhesive layer, a laminate of a fluororesin-impregnated glass substrate and/or a fluororesin film, an adhesive layer, and gold J are sequentially formed on one or both sides of an inner layer material formed of a fluororesin.
K foil is laminated to form an insulating substrate, and conductive patterns are formed on both sides of this insulating substrate, so the dielectric constant is small.
It has good high frequency characteristics, enables the mounting of high frequency arithmetic circuits and communication circuits using high frequency circuits, has excellent insulation characteristics, and is multi-layered, allowing high density mounting.
The fluororesin-impregnated glass base material and/or 7
Coupled with the fact that it is interposed with a laminate of resin film, it also has excellent dimensional stability. 4. Brief description of the drawings #S1 is a schematic exploded sectional view showing one embodiment of the present invention, FIG. 2 is a schematic exploded sectional view showing another embodiment of the same, and FIG. It is a schematic exploded sectional view showing the other side of the developed multilayer printed wiring board, where A is the printed wiring board, 1 is the inner layer material, 2 is the adhesive layer, 3 is the laminate, 4 is the metal foil, 5 is the insulating substrate, 6 is a conductor pattern. Agent Patent Attorney Ishi 1) Cho Shichi? A2 diagram

Claims (2)

【特許請求の範囲】[Claims] (1)フッ素樹脂で形成した内層材の片面又は両面に順
次フッ素樹脂層、フッ素樹脂含浸ガラス基材の積層体、
接着剤層及び金属箔を積層して絶縁基板を形成し、この
絶縁基板に導体パターンを形成して成ることを特徴とす
る多層プリント配線板。
(1) A laminate of a fluororesin layer on one or both sides of an inner layer material formed of a fluororesin, and a fluororesin-impregnated glass substrate;
A multilayer printed wiring board characterized in that an adhesive layer and a metal foil are laminated to form an insulating substrate, and a conductor pattern is formed on the insulating substrate.
(2)フッ素樹脂含浸ガラス基材の積層体の表面を表面
処理剤で粗化して成ることを特徴とする特許請求の範囲
第1項記載の多層プリント配線板。
(2) The multilayer printed wiring board according to claim 1, characterized in that the surface of a laminate of fluororesin-impregnated glass substrates is roughened with a surface treatment agent.
JP61138988A 1986-06-14 1986-06-14 Multilayer printed wiring board Expired - Fee Related JPH0815235B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP61138988A JPH0815235B2 (en) 1986-06-14 1986-06-14 Multilayer printed wiring board

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP61138988A JPH0815235B2 (en) 1986-06-14 1986-06-14 Multilayer printed wiring board

Publications (2)

Publication Number Publication Date
JPS62295495A true JPS62295495A (en) 1987-12-22
JPH0815235B2 JPH0815235B2 (en) 1996-02-14

Family

ID=15234858

Family Applications (1)

Application Number Title Priority Date Filing Date
JP61138988A Expired - Fee Related JPH0815235B2 (en) 1986-06-14 1986-06-14 Multilayer printed wiring board

Country Status (1)

Country Link
JP (1) JPH0815235B2 (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6413766U (en) * 1987-07-17 1989-01-24
JPH03283492A (en) * 1990-03-30 1991-12-13 Hitachi Ltd Multilayered printed circuit board and manufacture thereof
CN111492723A (en) * 2017-12-19 2020-08-04 Agc株式会社 Processed circuit board, multilayer circuit board, method for producing circuit board with cover film, and film with adhesive layer

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60257592A (en) * 1984-06-04 1985-12-19 松下電工株式会社 Multilayer printed circuit board

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60257592A (en) * 1984-06-04 1985-12-19 松下電工株式会社 Multilayer printed circuit board

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6413766U (en) * 1987-07-17 1989-01-24
JPH0316299Y2 (en) * 1987-07-17 1991-04-08
JPH03283492A (en) * 1990-03-30 1991-12-13 Hitachi Ltd Multilayered printed circuit board and manufacture thereof
CN111492723A (en) * 2017-12-19 2020-08-04 Agc株式会社 Processed circuit board, multilayer circuit board, method for producing circuit board with cover film, and film with adhesive layer
KR20200100592A (en) * 2017-12-19 2020-08-26 에이지씨 가부시키가이샤 Processed circuit board, multi-layer circuit board and circuit board manufacturing method with coverlay film, and film with adhesive layer
CN111492723B (en) * 2017-12-19 2023-04-14 Agc株式会社 Processed circuit board, multilayer circuit board, method for manufacturing circuit board with cover film, and film with adhesive layer

Also Published As

Publication number Publication date
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