JPS62291002A - 薄膜サ−ミスタの製造方法 - Google Patents

薄膜サ−ミスタの製造方法

Info

Publication number
JPS62291002A
JPS62291002A JP13461986A JP13461986A JPS62291002A JP S62291002 A JPS62291002 A JP S62291002A JP 13461986 A JP13461986 A JP 13461986A JP 13461986 A JP13461986 A JP 13461986A JP S62291002 A JPS62291002 A JP S62291002A
Authority
JP
Japan
Prior art keywords
thermistor
thin film
manufacturing
composite oxide
temperature
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP13461986A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0354842B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Inventor
道井　敏
信善 竹内
直樹 原田
英一 真壁
健夫 山田
大高　晋一郎
鈴木　友信
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
JFE Engineering Corp
Unizon KK
Original Assignee
Unizon KK
NKK Corp
Nippon Kokan Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Unizon KK, NKK Corp, Nippon Kokan Ltd filed Critical Unizon KK
Priority to JP13461986A priority Critical patent/JPS62291002A/ja
Publication of JPS62291002A publication Critical patent/JPS62291002A/ja
Publication of JPH0354842B2 publication Critical patent/JPH0354842B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Thermistors And Varistors (AREA)
JP13461986A 1986-06-10 1986-06-10 薄膜サ−ミスタの製造方法 Granted JPS62291002A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13461986A JPS62291002A (ja) 1986-06-10 1986-06-10 薄膜サ−ミスタの製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13461986A JPS62291002A (ja) 1986-06-10 1986-06-10 薄膜サ−ミスタの製造方法

Publications (2)

Publication Number Publication Date
JPS62291002A true JPS62291002A (ja) 1987-12-17
JPH0354842B2 JPH0354842B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1991-08-21

Family

ID=15132620

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13461986A Granted JPS62291002A (ja) 1986-06-10 1986-06-10 薄膜サ−ミスタの製造方法

Country Status (1)

Country Link
JP (1) JPS62291002A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1115937A (en) * 1965-02-25 1968-06-06 Victory Engineering Corp Method and apparatus for sputtering thin film resistance elements

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1115937A (en) * 1965-02-25 1968-06-06 Victory Engineering Corp Method and apparatus for sputtering thin film resistance elements

Also Published As

Publication number Publication date
JPH0354842B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1991-08-21

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