JPH0354842B2 - - Google Patents

Info

Publication number
JPH0354842B2
JPH0354842B2 JP61134619A JP13461986A JPH0354842B2 JP H0354842 B2 JPH0354842 B2 JP H0354842B2 JP 61134619 A JP61134619 A JP 61134619A JP 13461986 A JP13461986 A JP 13461986A JP H0354842 B2 JPH0354842 B2 JP H0354842B2
Authority
JP
Japan
Prior art keywords
thermistor
thin film
composite oxide
manufacturing
temperature
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP61134619A
Other languages
English (en)
Japanese (ja)
Other versions
JPS62291002A (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP13461986A priority Critical patent/JPS62291002A/ja
Publication of JPS62291002A publication Critical patent/JPS62291002A/ja
Publication of JPH0354842B2 publication Critical patent/JPH0354842B2/ja
Granted legal-status Critical Current

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  • Thermistors And Varistors (AREA)
JP13461986A 1986-06-10 1986-06-10 薄膜サ−ミスタの製造方法 Granted JPS62291002A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13461986A JPS62291002A (ja) 1986-06-10 1986-06-10 薄膜サ−ミスタの製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13461986A JPS62291002A (ja) 1986-06-10 1986-06-10 薄膜サ−ミスタの製造方法

Publications (2)

Publication Number Publication Date
JPS62291002A JPS62291002A (ja) 1987-12-17
JPH0354842B2 true JPH0354842B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1991-08-21

Family

ID=15132620

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13461986A Granted JPS62291002A (ja) 1986-06-10 1986-06-10 薄膜サ−ミスタの製造方法

Country Status (1)

Country Link
JP (1) JPS62291002A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1115937A (en) * 1965-02-25 1968-06-06 Victory Engineering Corp Method and apparatus for sputtering thin film resistance elements

Also Published As

Publication number Publication date
JPS62291002A (ja) 1987-12-17

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