JPS62284080A - 光堆積方法 - Google Patents

光堆積方法

Info

Publication number
JPS62284080A
JPS62284080A JP12845586A JP12845586A JPS62284080A JP S62284080 A JPS62284080 A JP S62284080A JP 12845586 A JP12845586 A JP 12845586A JP 12845586 A JP12845586 A JP 12845586A JP S62284080 A JPS62284080 A JP S62284080A
Authority
JP
Japan
Prior art keywords
window
light
cvd
gas
deposit
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP12845586A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0572473B2 (enrdf_load_stackoverflow
Inventor
Yuko Hiura
樋浦　祐子
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp filed Critical NEC Corp
Priority to JP12845586A priority Critical patent/JPS62284080A/ja
Publication of JPS62284080A publication Critical patent/JPS62284080A/ja
Publication of JPH0572473B2 publication Critical patent/JPH0572473B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Chemical Vapour Deposition (AREA)
JP12845586A 1986-06-02 1986-06-02 光堆積方法 Granted JPS62284080A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12845586A JPS62284080A (ja) 1986-06-02 1986-06-02 光堆積方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12845586A JPS62284080A (ja) 1986-06-02 1986-06-02 光堆積方法

Publications (2)

Publication Number Publication Date
JPS62284080A true JPS62284080A (ja) 1987-12-09
JPH0572473B2 JPH0572473B2 (enrdf_load_stackoverflow) 1993-10-12

Family

ID=14985130

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12845586A Granted JPS62284080A (ja) 1986-06-02 1986-06-02 光堆積方法

Country Status (1)

Country Link
JP (1) JPS62284080A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008075179A (ja) * 2006-09-19 2008-04-03 Asm Japan Kk Ｕｖ照射チャンバーをクリーニングする方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008075179A (ja) * 2006-09-19 2008-04-03 Asm Japan Kk Ｕｖ照射チャンバーをクリーニングする方法

Also Published As

Publication number Publication date
JPH0572473B2 (enrdf_load_stackoverflow) 1993-10-12

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