JPS62282210A - タッチプロ−ブ - Google Patents
タッチプロ−ブInfo
- Publication number
- JPS62282210A JPS62282210A JP12487186A JP12487186A JPS62282210A JP S62282210 A JPS62282210 A JP S62282210A JP 12487186 A JP12487186 A JP 12487186A JP 12487186 A JP12487186 A JP 12487186A JP S62282210 A JPS62282210 A JP S62282210A
- Authority
- JP
- Japan
- Prior art keywords
- probe
- movable member
- separation
- contact
- stylus
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000523 sample Substances 0.000 title claims description 61
- 238000000926 separation method Methods 0.000 claims abstract description 13
- 238000001514 detection method Methods 0.000 claims description 7
- 239000000758 substrate Substances 0.000 abstract 4
- 241001422033 Thestylus Species 0.000 abstract 2
- 230000006835 compression Effects 0.000 abstract 1
- 238000007906 compression Methods 0.000 abstract 1
- 239000004020 conductor Substances 0.000 abstract 1
- 230000000284 resting effect Effects 0.000 abstract 1
- 238000010586 diagram Methods 0.000 description 3
- 241001122767 Theaceae Species 0.000 description 1
- 210000001217 buttock Anatomy 0.000 description 1
- 239000002305 electric material Substances 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
Landscapes
- A Measuring Device Byusing Mechanical Method (AREA)
- Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
- Length Measuring Devices With Unspecified Measuring Means (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12487186A JPS62282210A (ja) | 1986-05-30 | 1986-05-30 | タッチプロ−ブ |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12487186A JPS62282210A (ja) | 1986-05-30 | 1986-05-30 | タッチプロ−ブ |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62282210A true JPS62282210A (ja) | 1987-12-08 |
| JPH0455244B2 JPH0455244B2 (enExample) | 1992-09-02 |
Family
ID=14896159
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12487186A Granted JPS62282210A (ja) | 1986-05-30 | 1986-05-30 | タッチプロ−ブ |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62282210A (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2023122914A (ja) * | 2022-02-24 | 2023-09-05 | Ube三菱セメント株式会社 | 貯留装置 |
-
1986
- 1986-05-30 JP JP12487186A patent/JPS62282210A/ja active Granted
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2023122914A (ja) * | 2022-02-24 | 2023-09-05 | Ube三菱セメント株式会社 | 貯留装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0455244B2 (enExample) | 1992-09-02 |
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