JPS6227552B2 - - Google Patents

Info

Publication number
JPS6227552B2
JPS6227552B2 JP52040516A JP4051677A JPS6227552B2 JP S6227552 B2 JPS6227552 B2 JP S6227552B2 JP 52040516 A JP52040516 A JP 52040516A JP 4051677 A JP4051677 A JP 4051677A JP S6227552 B2 JPS6227552 B2 JP S6227552B2
Authority
JP
Japan
Prior art keywords
insulating film
substrate
ion implantation
impurity
hcl
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP52040516A
Other languages
English (en)
Japanese (ja)
Other versions
JPS53125773A (en
Inventor
Yasuaki Hokari
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Electric Co Ltd filed Critical Nippon Electric Co Ltd
Priority to JP4051677A priority Critical patent/JPS53125773A/ja
Publication of JPS53125773A publication Critical patent/JPS53125773A/ja
Publication of JPS6227552B2 publication Critical patent/JPS6227552B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Bipolar Transistors (AREA)
  • Formation Of Insulating Films (AREA)
JP4051677A 1977-04-08 1977-04-08 Manufacture for semiconductor device Granted JPS53125773A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4051677A JPS53125773A (en) 1977-04-08 1977-04-08 Manufacture for semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4051677A JPS53125773A (en) 1977-04-08 1977-04-08 Manufacture for semiconductor device

Publications (2)

Publication Number Publication Date
JPS53125773A JPS53125773A (en) 1978-11-02
JPS6227552B2 true JPS6227552B2 (enrdf_load_stackoverflow) 1987-06-15

Family

ID=12582675

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4051677A Granted JPS53125773A (en) 1977-04-08 1977-04-08 Manufacture for semiconductor device

Country Status (1)

Country Link
JP (1) JPS53125773A (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2757962B2 (ja) * 1989-01-26 1998-05-25 松下電工株式会社 静電誘導半導体装置の製造方法

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS521871A (en) * 1975-06-24 1977-01-08 Sanki Eng Co Ltd Shuttle fork of stcker crane

Also Published As

Publication number Publication date
JPS53125773A (en) 1978-11-02

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