JPS6227154B2 - - Google Patents

Info

Publication number

JPS6227154B2

JPS6227154B2 JP9047778A JP9047778A JPS6227154B2 JP S6227154 B2 JPS6227154 B2 JP S6227154B2 JP 9047778 A JP9047778 A JP 9047778A JP 9047778 A JP9047778 A JP 9047778A JP S6227154 B2 JPS6227154 B2 JP S6227154B2

Authority

JP

Japan

Prior art keywords

printing

weight

selective etching

parts

mask

Prior art date

1978-07-26

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Expired

Links

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• 238000005530 etching Methods 0.000 claims description 16
• 239000000463 material Substances 0.000 claims description 8
• 239000000203 mixture Substances 0.000 claims description 4
• FMZUHGYZWYNSOA-VVBFYGJXSA-N (1r)-1-[(4r,4ar,8as)-2,6-diphenyl-4,4a,8,8a-tetrahydro-[1,3]dioxino[5,4-d][1,3]dioxin-4-yl]ethane-1,2-diol Chemical compound C([C@@H]1OC(O[C@@H]([C@@H]1O1)[C@H](O)CO)C=2C=CC=CC=2)OC1C1=CC=CC=C1 FMZUHGYZWYNSOA-VVBFYGJXSA-N 0.000 claims description 3
• -1 polyethylene Polymers 0.000 claims description 3
• 239000004698 Polyethylene Substances 0.000 claims description 2
• 239000004793 Polystyrene Substances 0.000 claims description 2
• 239000001913 cellulose Substances 0.000 claims description 2
• 229920002678 cellulose Polymers 0.000 claims description 2
• 229920000058 polyacrylate Polymers 0.000 claims description 2
• 229920000573 polyethylene Polymers 0.000 claims description 2
• 229920000193 polymethacrylate Polymers 0.000 claims description 2
• 229920002223 polystyrene Polymers 0.000 claims description 2
• 229920002689 polyvinyl acetate Polymers 0.000 claims description 2
• 239000011118 polyvinyl acetate Substances 0.000 claims description 2
• 239000002904 solvent Substances 0.000 claims description 2
• 239000000758 substrate Substances 0.000 description 13
• 238000000034 method Methods 0.000 description 9
• 239000011521 glass Substances 0.000 description 8
• 229920002120 photoresistant polymer Polymers 0.000 description 7
• 230000001681 protective effect Effects 0.000 description 7
• 239000004973 liquid crystal related substance Substances 0.000 description 6
• 238000010438 heat treatment Methods 0.000 description 5
• 239000003513 alkali Substances 0.000 description 3
• 238000004519 manufacturing process Methods 0.000 description 3
• 238000001020 plasma etching Methods 0.000 description 3
• VXQBJTKSVGFQOL-UHFFFAOYSA-N 2-(2-butoxyethoxy)ethyl acetate Chemical compound CCCCOCCOCCOC(C)=O VXQBJTKSVGFQOL-UHFFFAOYSA-N 0.000 description 2
• RUMACXVDVNRZJZ-UHFFFAOYSA-N 2-methylpropyl 2-methylprop-2-enoate Chemical compound CC(C)COC(=O)C(C)=C RUMACXVDVNRZJZ-UHFFFAOYSA-N 0.000 description 2
• VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 description 2
• 239000012298 atmosphere Substances 0.000 description 2
• 229910003437 indium oxide Inorganic materials 0.000 description 2
• PJXISJQVUVHSOJ-UHFFFAOYSA-N indium(iii) oxide Chemical compound [O-2].[O-2].[O-2].[In+3].[In+3] PJXISJQVUVHSOJ-UHFFFAOYSA-N 0.000 description 2
• 230000001590 oxidative effect Effects 0.000 description 2
• 125000006850 spacer group Chemical group 0.000 description 2
• XOLBLPGZBRYERU-UHFFFAOYSA-N tin dioxide Chemical compound O=[Sn]=O XOLBLPGZBRYERU-UHFFFAOYSA-N 0.000 description 2
• 229910001887 tin oxide Inorganic materials 0.000 description 2
• OAYXUHPQHDHDDZ-UHFFFAOYSA-N 2-(2-butoxyethoxy)ethanol Chemical compound CCCCOCCOCCO OAYXUHPQHDHDDZ-UHFFFAOYSA-N 0.000 description 1
• POAOYUHQDCAZBD-UHFFFAOYSA-N 2-butoxyethanol Chemical compound CCCCOCCO POAOYUHQDCAZBD-UHFFFAOYSA-N 0.000 description 1
• 229910021578 Iron(III) chloride Inorganic materials 0.000 description 1
• GRYLNZFGIOXLOG-UHFFFAOYSA-N Nitric acid Chemical compound O[N+]([O-])=O GRYLNZFGIOXLOG-UHFFFAOYSA-N 0.000 description 1
• 229910004298 SiO 2 Inorganic materials 0.000 description 1
• 239000002253 acid Substances 0.000 description 1
• 239000002518 antifoaming agent Substances 0.000 description 1
• 239000011248 coating agent Substances 0.000 description 1
• 238000000576 coating method Methods 0.000 description 1
• 239000003086 colorant Substances 0.000 description 1
• 238000000151 deposition Methods 0.000 description 1
• 238000010586 diagram Methods 0.000 description 1
• XXJWXESWEXIICW-UHFFFAOYSA-N diethylene glycol monoethyl ether Chemical compound CCOCCOCCO XXJWXESWEXIICW-UHFFFAOYSA-N 0.000 description 1
• 238000001035 drying Methods 0.000 description 1
• 230000000694 effects Effects 0.000 description 1
• 239000000839 emulsion Substances 0.000 description 1
• 238000002474 experimental method Methods 0.000 description 1
• 238000005187 foaming Methods 0.000 description 1
• 239000003349 gelling agent Substances 0.000 description 1
• 239000011256 inorganic filler Substances 0.000 description 1
• 229910003475 inorganic filler Inorganic materials 0.000 description 1
• RBTARNINKXHZNM-UHFFFAOYSA-K iron trichloride Chemical compound Cl[Fe](Cl)Cl RBTARNINKXHZNM-UHFFFAOYSA-K 0.000 description 1
• 239000007788 liquid Substances 0.000 description 1
• 238000002844 melting Methods 0.000 description 1
• 230000008018 melting Effects 0.000 description 1
• 229910052751 metal Inorganic materials 0.000 description 1
• 239000002184 metal Substances 0.000 description 1
• 229910017604 nitric acid Inorganic materials 0.000 description 1
• 229920002545 silicone oil Polymers 0.000 description 1
• 239000005361 soda-lime glass Substances 0.000 description 1