JPH0318737B2 - - Google Patents
Info
- Publication number
- JPH0318737B2 JPH0318737B2 JP59269084A JP26908484A JPH0318737B2 JP H0318737 B2 JPH0318737 B2 JP H0318737B2 JP 59269084 A JP59269084 A JP 59269084A JP 26908484 A JP26908484 A JP 26908484A JP H0318737 B2 JPH0318737 B2 JP H0318737B2
- Authority
- JP
- Japan
- Prior art keywords
- transparent conductive
- conductive film
- etching
- temperature
- acid
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Landscapes
- Liquid Crystal (AREA)
- Weting (AREA)
- Light Receiving Elements (AREA)
- Manufacturing Of Electric Cables (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP59269084A JPS61145529A (ja) | 1984-12-19 | 1984-12-19 | 透明電極パタ−ンの形成方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP59269084A JPS61145529A (ja) | 1984-12-19 | 1984-12-19 | 透明電極パタ−ンの形成方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS61145529A JPS61145529A (ja) | 1986-07-03 |
JPH0318737B2 true JPH0318737B2 (enrdf_load_stackoverflow) | 1991-03-13 |
Family
ID=17467444
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP59269084A Granted JPS61145529A (ja) | 1984-12-19 | 1984-12-19 | 透明電極パタ−ンの形成方法 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS61145529A (enrdf_load_stackoverflow) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2644743B2 (ja) * | 1987-01-28 | 1997-08-25 | 株式会社日立製作所 | 液晶表示装置の製造方法 |
JP2808480B2 (ja) * | 1990-07-18 | 1998-10-08 | キヤノン株式会社 | 液晶カラー表示素子用基板の製造方法 |
JP4897148B2 (ja) * | 2001-03-29 | 2012-03-14 | 富士技研工業株式会社 | 透明導電膜のエッチング液 |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5789480A (en) * | 1980-11-26 | 1982-06-03 | Seiko Epson Corp | Etchant for transparent electric conductive film |
-
1984
- 1984-12-19 JP JP59269084A patent/JPS61145529A/ja active Granted
Also Published As
Publication number | Publication date |
---|---|
JPS61145529A (ja) | 1986-07-03 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US5163220A (en) | Method of enhancing the electrical conductivity of indium-tin-oxide electrode stripes | |
US4252841A (en) | Process for producing transparent conductive film | |
US4238276A (en) | Process for producing liquid crystal display element | |
KR20040028698A (ko) | 도전성 산화 주석 막의 패터닝 방법 | |
JP3611618B2 (ja) | 非晶質導電膜のパターニング方法 | |
US4093504A (en) | Method for producing electrically conductive indium oxide patterns on an insulating support by etching with hydrochloric acid and ferric chloride | |
JPH0859297A (ja) | 微細パターンを有するネサ膜の製造方法 | |
JPH0318737B2 (enrdf_load_stackoverflow) | ||
CA1104699A (en) | Method of forming matt display electrode | |
JPS5826121B2 (ja) | 透明導電膜精密パタ−ン形成法 | |
JPH05274917A (ja) | 酸化錫透明導電膜 | |
KR101151952B1 (ko) | 인듐산화막의 식각용액 및 그 식각방법 | |
JPH05270865A (ja) | 透明導電膜を有するガラス基板 | |
JP3332409B2 (ja) | 透明導電膜を有するガラス基板 | |
JPS5872922A (ja) | 液晶表示装置の製造方法 | |
KR830001799B1 (ko) | 액정표시소자의 제조 방법 | |
JPS6227154B2 (enrdf_load_stackoverflow) | ||
JPS5810722A (ja) | エレクトロクロミツク表示装置の製造方法 | |
JPS61243613A (ja) | 透明導電層の形成方法 | |
JPH0658476B2 (ja) | 液晶表示素子用基板の製造方法 | |
JPH11231335A (ja) | 埋設電極付き基板の製造方法 | |
JPS6058795B2 (ja) | Ni薄膜エツチング方法 | |
JP2002150857A (ja) | 透明導電膜の処理方法および透明導電膜を備える基体 | |
JPH0342829A (ja) | 透明導電膜のエッチャント | |
JPS58194083A (ja) | 表示パネルの製造方法 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
EXPY | Cancellation because of completion of term |