JPS62262472A - Electrostrictive effect element - Google Patents
Electrostrictive effect elementInfo
- Publication number
- JPS62262472A JPS62262472A JP61105914A JP10591486A JPS62262472A JP S62262472 A JPS62262472 A JP S62262472A JP 61105914 A JP61105914 A JP 61105914A JP 10591486 A JP10591486 A JP 10591486A JP S62262472 A JPS62262472 A JP S62262472A
- Authority
- JP
- Japan
- Prior art keywords
- layer
- layers
- electrode layers
- electrode layer
- electrostrictive
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000000694 effects Effects 0.000 title claims abstract description 16
- 239000011810 insulating material Substances 0.000 claims abstract description 14
- 229910052751 metal Inorganic materials 0.000 claims abstract description 10
- 239000002184 metal Substances 0.000 claims abstract description 10
- 239000010410 layer Substances 0.000 claims description 69
- 239000011241 protective layer Substances 0.000 claims description 17
- 239000000463 material Substances 0.000 claims description 8
- 238000004519 manufacturing process Methods 0.000 abstract description 9
- 238000000034 method Methods 0.000 abstract description 6
- 238000003475 lamination Methods 0.000 abstract description 3
- 238000007639 printing Methods 0.000 abstract description 3
- 230000015572 biosynthetic process Effects 0.000 abstract 1
- 239000011230 binding agent Substances 0.000 description 2
- 239000000919 ceramic Substances 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- 238000000151 deposition Methods 0.000 description 2
- SWELZOZIOHGSPA-UHFFFAOYSA-N palladium silver Chemical compound [Pd].[Ag] SWELZOZIOHGSPA-UHFFFAOYSA-N 0.000 description 2
- 229920006267 polyester film Polymers 0.000 description 2
- 238000007650 screen-printing Methods 0.000 description 2
- 239000002002 slurry Substances 0.000 description 2
- 238000005476 soldering Methods 0.000 description 2
- ZNQVEEAIQZEUHB-UHFFFAOYSA-N 2-ethoxyethanol Chemical compound CCOCCO ZNQVEEAIQZEUHB-UHFFFAOYSA-N 0.000 description 1
- 229910001369 Brass Inorganic materials 0.000 description 1
- 206010011224 Cough Diseases 0.000 description 1
- MQIUGAXCHLFZKX-UHFFFAOYSA-N Di-n-octyl phthalate Natural products CCCCCCCCOC(=O)C1=CC=CC=C1C(=O)OCCCCCCCC MQIUGAXCHLFZKX-UHFFFAOYSA-N 0.000 description 1
- 229910001252 Pd alloy Inorganic materials 0.000 description 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- BJQHLKABXJIVAM-UHFFFAOYSA-N bis(2-ethylhexyl) phthalate Chemical compound CCCCC(CC)COC(=O)C1=CC=CC=C1C(=O)OCC(CC)CCCC BJQHLKABXJIVAM-UHFFFAOYSA-N 0.000 description 1
- 239000010951 brass Substances 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 238000000354 decomposition reaction Methods 0.000 description 1
- NKZSPGSOXYXWQA-UHFFFAOYSA-N dioxido(oxo)titanium;lead(2+) Chemical compound [Pb+2].[O-][Ti]([O-])=O NKZSPGSOXYXWQA-UHFFFAOYSA-N 0.000 description 1
- 238000001962 electrophoresis Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- HFGPZNIAWCZYJU-UHFFFAOYSA-N lead zirconate titanate Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ti+4].[Zr+4].[Pb+2] HFGPZNIAWCZYJU-UHFFFAOYSA-N 0.000 description 1
- 229910052451 lead zirconate titanate Inorganic materials 0.000 description 1
- 239000003960 organic solvent Substances 0.000 description 1
- 239000004014 plasticizer Substances 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 230000000630 rising effect Effects 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 238000005245 sintering Methods 0.000 description 1
- 238000007569 slipcasting Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/80—Constructional details
- H10N30/87—Electrodes or interconnections, e.g. leads or terminals
- H10N30/872—Interconnections, e.g. connection electrodes of multilayer piezoelectric or electrostrictive devices
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/80—Constructional details
- H10N30/87—Electrodes or interconnections, e.g. leads or terminals
- H10N30/875—Further connection or lead arrangements, e.g. flexible wiring boards, terminal pins
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/80—Constructional details
- H10N30/88—Mounts; Supports; Enclosures; Casings
- H10N30/883—Additional insulation means preventing electrical, physical or chemical damage, e.g. protective coatings
Landscapes
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
Abstract
Description
【発明の詳細な説明】
１１ユ茎μ月次１
本発明は電歪効果素子に関し、更に詳述するならば、縦
効果を利用した積層型の電歪効果素子の電極構造に関す
る。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to an electrostrictive element, and more specifically, to an electrode structure of a laminated electrostrictive element that utilizes a longitudinal effect.
従来の技術
振動や外力を電気的な信号に変換する電歪効果素子は、
現在、音響製品あるいは圧電スイッチなど我々の身近な
様々な分野で使用されている。Conventional technology: Electrostrictive elements convert vibrations and external forces into electrical signals.
Currently, they are used in various fields familiar to us, such as audio products and piezoelectric switches.
このような電歪効果素子は、第２図（ａ）の斜視図、及
び（ｂ）の断面図に示すように複数の電歪材層１と内部
電極層２とが上下端に位置する内部電極層２ａ及び２ｂ
の間で交互に積層され、積層体を形成している。該電歪
材層１は、複合ペロブスカイト構造を有するチタン酸ジ
ルコニウム酸鉛等のセラミックから成り、内部電極層２
は銀−パラジウム合金等から成る。As shown in the perspective view of FIG. 2(a) and the cross-sectional view of FIG. Electrode layers 2a and 2b
They are alternately stacked to form a laminate. The electrostrictive material layer 1 is made of ceramic such as lead zirconate titanate having a composite perovskite structure, and the internal electrode layer 2
is made of a silver-palladium alloy or the like.
更に、上下端の内部電極層２ａ及び２ｂには、電歪材よ
り成る保護層３ａ及び３ｂが接し配設されている。Further, protective layers 3a and 3b made of electrostrictive material are provided in contact with the internal electrode layers 2a and 2b at the upper and lower ends.
また、図示の電歪効果素子の側壁面において、前記内部
電極層２の端面は、１層おきに絶縁性物質４ａ及び４ｂ
により被覆し絶縁され、第２図（ｂ）に示すように、該
被覆は、咳電歪効果素子の両側壁で１層ごとに互い違い
になるように設けられている。前記絶縁性物質４ａ及び
４ｂによる被覆の上には、該電歪効果素子の各内部電極
層２をそれぞれ１層おきに電気的に接続するための外部
°電極層５ａ及び５ｂが被着し配設されている。更に、
前記各外部電極層５ａ及び５ｂと、前記電歪材料による
保護層３ａ及び３ｂの上下表面に配設される端面電極１
ｉｄ６ａ及び６ｂとが、それぞれ前記保護層３ａ及び３
ｂの角部で導電材を被着することにより電気的に接続さ
れている。In addition, on the side wall surface of the illustrated electrostrictive element, the end surfaces of the internal electrode layers 2 are covered with insulating materials 4a and 4b every other layer.
As shown in FIG. 2(b), the coatings are provided alternately layer by layer on both side walls of the cough electrostrictive effect element. External electrode layers 5a and 5b for electrically connecting every other internal electrode layer 2 of the electrostrictive element are deposited on the coating with the insulating substances 4a and 4b. It is set up. Furthermore,
End surface electrodes 1 disposed on the upper and lower surfaces of each of the external electrode layers 5a and 5b and the protective layers 3a and 3b made of electrostrictive material.
id6a and 6b are the protective layers 3a and 3, respectively.
They are electrically connected by applying a conductive material to the corners of b.
従って、電歪効果素子の各内部電極層２には、１層ごと
に電荷が印加されるようになされている。Therefore, charges are applied to each internal electrode layer 2 of the electrostrictive element layer by layer.
通常、かかる電歪効果素子は端面電極５ａ、６ｂに該電
歪み効果素子の取付は部材７．８を半田付けで接続して
取り付け、取付は部材７．８間に所定の電圧を印加する
と端面の外部電極層５ａ、５ｂを通してすべての内部電
極層２に電圧が印加された素子全体が縦効果で図中矢印
で示したＸ、Ｙ方向に歪む。Usually, such an electrostrictive effect element is attached to the end face electrodes 5a and 6b by connecting a member 7.8 by soldering, and when a predetermined voltage is applied between the members 7.8, the end face The entire device, to which a voltage is applied to all internal electrode layers 2 through external electrode layers 5a and 5b, is distorted in the X and Y directions indicated by arrows in the figure due to the longitudinal effect.
発明が解決しようとする問題点
しかし、上述のような従来の電歪効果素子は、外部電極
層５ａ及び５ｂの被着工程以外に端面電極層６ａ及び６
ｂを被着する工程が必要であることから、製造コスト高
となる欠点がある。Problems to be Solved by the Invention However, in the conventional electrostrictive effect element as described above, in addition to the step of depositing the external electrode layers 5a and 5b, the end electrode layers 6a and 6
Since the step of applying b is necessary, there is a drawback that the manufacturing cost is high.
また、前記外部電極層５ａ及び５ｂと端面電極層６ａ及
び６ｂを保護層３ａ及び３ｂの角部で印刷により電極層
を重ね合せて電気的に接続しているが、多量に付着する
と端面電極層の平面状態が悪くなり、第２図ら）に参照
符号Ａで示すにように取り付は部材が傾き、所望の歪効
果が１昇られなくなるという問題もある。In addition, although the external electrode layers 5a and 5b and the end electrode layers 6a and 6b are electrically connected by overlapping the electrode layers by printing at the corners of the protective layers 3a and 3b, if a large amount adheres, the end electrode layers 6a and 6b There is also the problem that the planar state of the structure deteriorates, and as shown by reference numeral A in FIG.
また、印刷による電極層の付着量が少ないと、接続部の
強度的な信頼性が低下する。Furthermore, if the amount of the electrode layer deposited by printing is small, the reliability of the strength of the connection portion will decrease.
そこで、本発明は、上記のような問題を解決して、電歪
効果素子の製造コストの低減を図ると共に、良好な効果
の得られる安定構造の電歪効果素子を提供せんとするも
のである。Therefore, the present invention aims to solve the above-mentioned problems, reduce the manufacturing cost of an electrostrictive effect element, and provide an electrostrictive effect element with a stable structure that provides good effects. .
問題点を解決するための手段
即ち、本発明によれば、上下端がそれぞれ内部電極層と
なるように、複数の電歪材層と内部電極層とを交互に積
層し、前記上下端に位置する内部電極層と接するように
配設された保護層とにより形成される積層体と、前記積
層体の１側面の内部電極層の露出部分に１層おきに絶縁
性物質を塗布した上から一方の保護層壁面上まで延長配
設した第１の外部電極層と、前記積層体の他の側面の前
記絶縁性物質が塗布されていない内部電極層の露出部分
に絶縁性物質を塗布した上から他方の保護層壁面上まで
延長配設した第２の外部電極層とを具備する電歪効果素
子において、前記第１及び第２の外部電極層に前記保護
層の側壁面上で接続するように、それぞれ積層体の上部
および下部に冠着した導電性の金属キャップが更に設け
られる。According to the present invention, a plurality of electrostrictive material layers and internal electrode layers are alternately laminated so that the upper and lower ends serve as internal electrode layers, and the layers are located at the upper and lower ends. a laminate formed of a protective layer disposed in contact with an internal electrode layer to be formed; and an insulating material coated on every other layer on the exposed portion of the internal electrode layer on one side of the laminate; The first external electrode layer is extended to the wall surface of the protective layer, and the exposed portion of the internal electrode layer on the other side of the laminate is coated with an insulating material. In an electrostrictive effect element comprising a second external electrode layer extended onto the wall surface of the other protective layer, the electrostrictive element is connected to the first and second external electrode layers on the side wall surface of the protective layer. , conductive metal caps are further provided, respectively capping the top and bottom of the stack.
芸」
以上のように電歪効果素子の側壁に配設される外部電極
層が、積層体の上下端に冠着した導電性の金属キャップ
と保護層の側壁面上でそれぞれ接続されていることで、
該電歪効果素子の製造時において、端面電極層を配設す
るための製造工程が不必要となり、製造コストの低減化
が図れるばかりでなく、該電歪効果素子の取り付は部材
を上下端面に安定に良好な状態で配設することができる
。As described above, the external electrode layers disposed on the side walls of the electrostrictive element are connected to the conductive metal caps attached to the upper and lower ends of the laminate on the side wall surfaces of the protective layer. in,
When manufacturing the electrostrictive element, there is no need for a manufacturing process for arranging end electrode layers, which not only reduces manufacturing costs, but also allows the electrostrictive element to be attached to the upper and lower end surfaces of the member. It can be installed stably and in good condition.
実施例
次に本発明による電歪効果素子の実施例を図面を参照し
て説明する。Embodiments Next, embodiments of the electrostrictive element according to the present invention will be described with reference to the drawings.
第１図（ａ）は、本発明の電歪効果素子の一実施例の斜
視図であり、第１図ら）は第１図（ａ）の断面図である
。FIG. 1(a) is a perspective view of an embodiment of the electrostrictive effect element of the present invention, and FIG. 1(a) is a sectional view of FIG. 1(a).
本発明による電歪効果素子の実施例は、電歪効果の積層
体の上部および下部に冠着させた導電性の金属キャップ
９ａ及び９ｂに外部電極層５ａ及び５ｂの１端をそれぞ
れ接続しいてる点を除くその他の構造は、第２図に示す
従来の電歪効果素子の構造と同一であるので、同一部分
については同一の参照番号を付して、その説明を省略す
る。In the embodiment of the electrostrictive element according to the present invention, one end of the external electrode layers 5a and 5b is connected to conductive metal caps 9a and 9b respectively attached to the upper and lower parts of the electrostrictive stack. The structure other than the point is the same as the structure of the conventional electrostrictive element shown in FIG. 2, so the same reference numerals are given to the same parts and the explanation thereof will be omitted.
かかる電歪効果素子の製作方法としては、まず、チタン
酸鉛などからなるセラミックの仮焼粉末を準備し、少量
のポリブチラール樹脂などの有機バインダー及びフタル
酸ジオクチルなどの可塑剤と共にエチルセロソルブなど
の有機溶媒中に分散させ、泥漿をつくる。この泥漿をド
クターブレー゛ドを用いたスリップキャスティング法に
より厚さ１００μｍのポリエステルフィルム上に流動塗
布し厚さ７０μｍのグリーンシートの形に被着して電歪
材料層１を形成する。次に該グリーンシート上に銀−パ
ラジウムペーストなどの導体ペーストをスクリーン印刷
により被着し、内部電極層２を形成する。その後、内部
電極層２を印刷した部分のグリーンシートを所定の大き
さに切断しポリエステルフィルムから剥離する。このグ
リーンシートの所望の枚数だけ積み重ね、熱プレスで上
下から圧着して電歪材料層１と内部電極層２とが交互に
配設されたＧａＪｉｆｆ１体を形成する。また、このグ
リーンシートの積層工程時において、上下端の内部電極
層２の上下面にそれぞれ２０〜３０枚の内部電極層の形
成されていないグリーンシートを積み重ねてダミ一層と
しての絶縁性の保護層９ａ、９ｂを形成する。The method for manufacturing such an electrostrictive element is to first prepare a calcined ceramic powder made of lead titanate or the like, and then add ethyl cellosolve or the like with a small amount of an organic binder such as polybutyral resin and a plasticizer such as dioctyl phthalate. Disperse in an organic solvent to create a slurry. This slurry was flow-coated onto a 100 μm thick polyester film by slip casting using a doctor blade and adhered in the form of a 70 μm thick green sheet to form an electrostrictive material layer 1. Next, a conductive paste such as silver-palladium paste is applied onto the green sheet by screen printing to form the internal electrode layer 2. Thereafter, the green sheet on which the internal electrode layer 2 is printed is cut into a predetermined size and peeled off from the polyester film. A desired number of green sheets are stacked and pressed together from above and below using a hot press to form a GaJiff body in which electrostrictive material layers 1 and internal electrode layers 2 are alternately arranged. In addition, during the green sheet lamination process, 20 to 30 green sheets on which no internal electrode layer is formed are stacked on the upper and lower surfaces of the internal electrode layer 2 at the upper and lower ends to form an insulating protective layer as a dummy layer. 9a and 9b are formed.
次にこの積層体に含有する有機バインダーを高温分解す
ることにより蒸発させ除去してから、例えば上昇スピー
ド５℃／分で温度１１２０℃まで上昇させ、温度１１２
０℃の状態を２時間保持して焼結を行なう。次に焼結後
の積層物を格子状に切断することにより、内部電極層２
の端面が露出した積層体が得られる。該積層体の一方の
側面には内部電極層２の端面に一層おきに電気泳動法よ
りガラス等の絶縁性物質４ａを被着し、他方の端面には
、絶縁性物質４ａを被着しなかった内部電極層２の逆側
になる端面に絶縁性物質４ｂを被着する。絶縁性物質４
ａ、４ｂの各上面からは、絶縁性物質を被着しなかった
内部電極層２を電気的に接続するために、銀ペーストな
どの導電ペーストをスクリーン印刷により、それぞれ一
方の保護層９ａまたは９ｂの壁面上に延長して印刷し、
第１の外部電極層５ａと第２の外部電極層５ｂを形成す
る。Next, the organic binder contained in this laminate is evaporated and removed by high-temperature decomposition, and then the temperature is raised to 1120°C at a rising speed of 5°C/min, for example, to 1120°C.
Sintering is carried out by maintaining the temperature at 0° C. for 2 hours. Next, the internal electrode layer 2 is cut by cutting the sintered laminate into a grid shape.
A laminate with exposed end faces is obtained. On one side of the laminate, an insulating material 4a such as glass is deposited on every other end surface of the internal electrode layer 2 by electrophoresis, and on the other end surface, no insulating material 4a is deposited. An insulating material 4b is deposited on the opposite end surface of the internal electrode layer 2. Insulating material 4
In order to electrically connect the internal electrode layer 2 which is not coated with an insulating material, a conductive paste such as silver paste is applied from the upper surface of each of the protective layers 9a and 4b by screen printing. Extend and print on the wall of
A first external electrode layer 5a and a second external electrode layer 5b are formed.
次に該積層体の上部および下部に保護層３ａｓ３ｂの高
さの約半分の深さを有する黄銅などの導電性の金属キャ
ップ９ａ、９ｂを圧太し、該金属キャップ９ａおよび９
ｂの端部と、前記外部電極層５ａ、５ｂとを保護層３ａ
よひ３ｂの壁面上で半田付は等により電気的に接続する
ことにより完成できる。Next, conductive metal caps 9a, 9b made of brass or the like having a depth of about half the height of the protective layer 3as3b are pressed on the upper and lower parts of the laminate.
b and the external electrode layers 5a, 5b are covered with a protective layer 3a.
Soldering on the wall surface of the roof 3b can be completed by electrically connecting with a method or the like.
１１文】
以上説明したように本発明によれば、端面電極層を被着
する工程が不要となり製造コストの低減化が図れる。ま
た、電歪効果素子を取付は部材に垂直にかつ安定に取り
付けることができ所望の縦効果歪が得られる。更には、
導電性金属キャップと外部電極層との接続の信頼性が確
保され電歪効果素子の品質が大幅に向上する。Sentence 11 As explained above, according to the present invention, the process of depositing the end face electrode layer is unnecessary, and manufacturing costs can be reduced. Further, the electrostrictive element can be mounted vertically and stably to the member, and a desired longitudinal effect strain can be obtained. Furthermore,
The reliability of the connection between the conductive metal cap and the external electrode layer is ensured, and the quality of the electrostrictive element is greatly improved.
本発明による電歪効果素子の電極構造は積層方向の断面
が方形状のもののみに限らず円または多角形の断面でも
使用できる。The electrode structure of the electrostrictive element according to the present invention is not limited to one having a rectangular cross section in the stacking direction, but can also be used with a circular or polygonal cross section.
第１図（ａ）、ら）は、本発明の電歪み効果素子の斜視
図およびその縦方向の断面図、
第２図（ａ）、ら）は、従来の電歪効果素子の斜視図お
よびその縦方向の断面図である。
（主な参照番号）
１・・電歪材料層、
２・・内部電極層、
３ａ、３ｂ・・保護層、
４ａ、４ｂ・・絶縁性物質、
５ａ、５ｂ・・外部電極層、
６ａ、６ｂ・・端面電極層、
７．８・・取り付は部材、
９ａ、９ｂ・・金属キャップFIG. 1(a), et al.) is a perspective view and a longitudinal sectional view thereof of an electrostrictive effect element of the present invention. FIG. FIG. 3 is a longitudinal sectional view thereof. (Main reference numbers) 1... Electrostrictive material layer, 2... Internal electrode layer, 3a, 3b... Protective layer, 4a, 4b... Insulating material, 5a, 5b... External electrode layer, 6a, 6b・・End face electrode layer, 7.8・・Members for mounting, 9a, 9b・・Metal cap
Claims (1)
歪材層と内部電極層とを交互に積層し、前記上下端に位
置する内部電極層に接するように配設された保護層とに
より形成される積層体と、前記積層体の１側面の内部電
極層の露出部分に１層おきに絶縁性物質を塗布した上か
ら一方の保護層壁面上まで延長配設した第１の外部電極
層と、前記積層体の他の側面の前記絶縁性物質が塗布さ
れていない内部電極層の露出部分に絶縁性物質を塗布し
た上から他方の保護層壁面上まで延長配設した第２の外
部電極層とを具備する電歪効果素子において、 前記第１及び第２の外部電極層に前記保護層の側壁面上
で接続するように、それぞれ積層体の上部および下部に
冠着した導電性の金属キャップを更に具備することを特
徴とする電歪効果素子。[Claims] A plurality of electrostrictive material layers and internal electrode layers are alternately stacked so that the upper and lower ends serve as internal electrode layers, and are arranged so as to be in contact with the internal electrode layers located at the upper and lower ends. an insulating material is coated every other layer on the exposed portion of the internal electrode layer on one side of the laminate, and the layer is extended from above to the wall surface of one of the protective layers. The first external electrode layer and the exposed portion of the internal electrode layer on the other side of the laminate where the insulating material is not coated are coated with an insulating material and extended from above to the wall surface of the other protective layer. In the electrostrictive effect element comprising a second external electrode layer, caps are provided on the upper and lower parts of the laminate, respectively, so as to connect to the first and second external electrode layers on the side wall surfaces of the protective layer. An electrostrictive effect element further comprising an attached conductive metal cap.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61105914A JPH06105800B2 (en) | 1986-05-08 | 1986-05-08 | Electrostrictive effect element |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61105914A JPH06105800B2 (en) | 1986-05-08 | 1986-05-08 | Electrostrictive effect element |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62262472A true JPS62262472A (en) | 1987-11-14 |
| JPH06105800B2 JPH06105800B2 (en) | 1994-12-21 |
Family
ID=14420130
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP61105914A Expired - Lifetime JPH06105800B2 (en) | 1986-05-08 | 1986-05-08 | Electrostrictive effect element |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH06105800B2 (en) |
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02137279A (en) * | 1988-11-17 | 1990-05-25 | Nec Corp | Electrostriction effect element |
| JPH0273750U (en) * | 1988-11-25 | 1990-06-05 | ||
| JPH02177485A (en) * | 1988-12-28 | 1990-07-10 | Nec Corp | Electrostrictive effect element |
| JPH0296758U (en) * | 1989-01-20 | 1990-08-01 | ||
| US5168189A (en) * | 1991-09-18 | 1992-12-01 | Caterpillar Inc. | Solderless connector for a solid state motor stack |
| US6264310B1 (en) * | 1997-02-28 | 2001-07-24 | Hitachi Koki Co., Ltd. | Multi-nozzle ink jet head with dummy piezoelectric elements at both ends of a piezoelectric element array for controlling the flow of adhesive about the piezoelectric element array |
| US7111927B2 (en) | 2000-06-12 | 2006-09-26 | Seiko Epson Corporation | Piezoelectric vibrator unit |
| WO2010141299A1 (en) * | 2009-06-04 | 2010-12-09 | Cts Corporation | Piezoelectric stack actuator assembly |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US8052597B2 (en) | 2005-08-30 | 2011-11-08 | Boston Scientific Scimed, Inc. | Method for forming an endoscope articulation joint |
| US8202265B2 (en) | 2006-04-20 | 2012-06-19 | Boston Scientific Scimed, Inc. | Multiple lumen assembly for use in endoscopes or other medical devices |
| JP5377100B2 (en) * | 2009-06-16 | 2013-12-25 | 京セラ株式会社 | Multilayer piezoelectric element, injection device and fuel injection system using the same |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59219972A (en) * | 1983-05-30 | 1984-12-11 | Nec Corp | Electrostriction effect element |
| JPS6122374U (en) * | 1984-07-13 | 1986-02-08 | 日本電気株式会社 | electrostrictive effect element |
| JPS6188772A (en) * | 1984-10-05 | 1986-05-07 | Nippon Soken Inc | Actuator using piezoelectric element |
-
1986
- 1986-05-08 JP JP61105914A patent/JPH06105800B2/en not_active Expired - Lifetime
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59219972A (en) * | 1983-05-30 | 1984-12-11 | Nec Corp | Electrostriction effect element |
| JPS6122374U (en) * | 1984-07-13 | 1986-02-08 | 日本電気株式会社 | electrostrictive effect element |
| JPS6188772A (en) * | 1984-10-05 | 1986-05-07 | Nippon Soken Inc | Actuator using piezoelectric element |
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02137279A (en) * | 1988-11-17 | 1990-05-25 | Nec Corp | Electrostriction effect element |
| JPH0273750U (en) * | 1988-11-25 | 1990-06-05 | ||
| JPH02177485A (en) * | 1988-12-28 | 1990-07-10 | Nec Corp | Electrostrictive effect element |
| JPH0296758U (en) * | 1989-01-20 | 1990-08-01 | ||
| US5168189A (en) * | 1991-09-18 | 1992-12-01 | Caterpillar Inc. | Solderless connector for a solid state motor stack |
| US6264310B1 (en) * | 1997-02-28 | 2001-07-24 | Hitachi Koki Co., Ltd. | Multi-nozzle ink jet head with dummy piezoelectric elements at both ends of a piezoelectric element array for controlling the flow of adhesive about the piezoelectric element array |
| US7111927B2 (en) | 2000-06-12 | 2006-09-26 | Seiko Epson Corporation | Piezoelectric vibrator unit |
| WO2010141299A1 (en) * | 2009-06-04 | 2010-12-09 | Cts Corporation | Piezoelectric stack actuator assembly |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH06105800B2 (en) | 1994-12-21 |
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