JPH0745971Y2 - Electrostrictive effect element - Google Patents

Electrostrictive effect element

Info

Publication number
JPH0745971Y2
JPH0745971Y2 JP1989009971U JP997189U JPH0745971Y2 JP H0745971 Y2 JPH0745971 Y2 JP H0745971Y2 JP 1989009971 U JP1989009971 U JP 1989009971U JP 997189 U JP997189 U JP 997189U JP H0745971 Y2 JPH0745971 Y2 JP H0745971Y2
Authority
JP
Japan
Prior art keywords
external electrode
electrostrictive
effect element
insulating material
terminal connecting
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1989009971U
Other languages
Japanese (ja)
Other versions
JPH02101560U (en
Inventor
隆 前田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp filed Critical NEC Corp
Priority to JP1989009971U priority Critical patent/JPH0745971Y2/en
Publication of JPH02101560U publication Critical patent/JPH02101560U/ja
Application granted granted Critical
Publication of JPH0745971Y2 publication Critical patent/JPH0745971Y2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Description

【考案の詳細な説明】 [産業上の利用分野] 本考案は電歪効果素子に関し、特に縦効果を利用した積
層型の電歪効果素子の電極構造に関する。
DETAILED DESCRIPTION OF THE INVENTION [Industrial field of application] The present invention relates to an electrostrictive effect element, and more particularly to an electrode structure of a laminated electrostrictive effect element utilizing a vertical effect.

[従来の技術] 第4図(a)はこの種の電歪効果素子の従来の斜視図、
第4、図(b)はその縦断面図である。
[Prior Art] FIG. 4 (a) is a conventional perspective view of an electrostrictive effect element of this type,
FIG. 4 (b) is a vertical sectional view thereof.

電歪材1よりなる端子接続部3の上下に複数の電歪材1
と内部電極2とが交互に積層され、積層体を形成してい
る。この電歪材1は複合ベロブスカイト構造を有するチ
タン酸ジルコニウム酸鉛等のセラミックからなり、内部
電極2は銀−パラジウム合金等から成る。また、図示の
電歪効果素子の側面において、内部電極2の端面は1層
おきに絶縁性物質4a,4bにより被覆され絶縁され、該被
覆は該電歪効果素子の両側面で1層おきに互い違いにな
るように設けられている。絶縁性物質4a,4bによる被覆
の上には該電歪効果素子の各内部電極2をそれぞれ1層
おきに電気的に接続するため外部電極5a,5bが被着し配
設されている。また、はんだ付け付近の絶縁性物質4a,4
b上および外部電極5a,5b上にはソルダレジスト8a,8bが
塗布されている。さらに、電歪効果素子の中央部に位置
する端子接続部3上の各外部電極5a,5bにはリード線6a,
6bがはんだ7により電気的に接続されている。したがっ
て、リード線6a,6b間に所定の電圧を印加すると外部電
極5a,5bを通してすべての内部電極2に電圧が印加さ
れ,素子全体が縦効果で図中矢印で示したX,Y方向に歪
む。
A plurality of electrostrictive materials 1 are provided above and below the terminal connecting portion 3 made of the electrostrictive material 1.
And the internal electrodes 2 are alternately laminated to form a laminated body. The electrostrictive material 1 is made of a ceramic such as lead zirconate titanate having a composite perovskite structure, and the internal electrode 2 is made of a silver-palladium alloy or the like. In addition, on the side surface of the electrostrictive effect element shown in the drawing, the end surfaces of the internal electrodes 2 are coated and insulated by the insulating substances 4a and 4b every other layer, and the coating is provided every other layer on both side surfaces of the electrostrictive effect element. It is provided to be staggered. External electrodes 5a and 5b are attached and disposed on the coatings of the insulating materials 4a and 4b to electrically connect the internal electrodes 2 of the electrostrictive effect element every other layer. In addition, the insulating material 4a, 4
Solder resists 8a and 8b are applied on b and the external electrodes 5a and 5b. Further, the lead wires 6a, 5b are connected to the external electrodes 5a, 5b on the terminal connecting portion 3 located at the center of the electrostrictive effect element.
6b is electrically connected by solder 7. Therefore, when a predetermined voltage is applied between the lead wires 6a and 6b, the voltage is applied to all the internal electrodes 2 through the external electrodes 5a and 5b, and the entire element is distorted in the X and Y directions indicated by the arrows in the figure due to the vertical effect. .

[考案が解決しようとする課題] 上述した従来の電歪効果素子は次のような欠点がある。[Problems to be Solved by the Invention] The conventional electrostrictive effect element described above has the following drawbacks.

(1) 絶縁性物質上にはんだが付着するのを防止する
ために外部電極上にソルダレジストが塗布されている
が、このために電歪効果素子駆動時にソルダレジストの
接着面で応力が生じ、下地の絶縁性物質にストレスが加
わり絶縁破壊がおこる。
(1) Solder resist is applied to the external electrodes to prevent the solder from adhering to the insulating material, which causes stress on the adhesive surface of the solder resist when the electrostrictive effect element is driven. Stress is applied to the underlying insulating material, causing dielectric breakdown.

(2) このために、はんだ付け部の端子接続部を厚く
すると、電歪効果素子の全長が大きくなり製品が大型に
なる。
(2) For this reason, if the terminal connection portion of the soldering portion is made thick, the total length of the electrostrictive effect element becomes large, and the product becomes large.

(3) はんだ付け面積は側面全長の外部電極の幅で決
まるため、大きくとれず、はんだ作業がやりにくく、作
業能率が低下する。
(3) Since the soldering area is determined by the width of the external electrode along the entire length of the side surface, the soldering area cannot be made large, and the soldering work is difficult to perform and the work efficiency is reduced.

[課題を解決するための手段] 本考案の電歪効果素子は、複数の電歪材が積層された端
子接続部と複数の電歪材と内部電極とが交互に積層され
た電歪部を有する積層体と、前記積層体の対向する一対
の側面に露出する内部電極の一方の端面に前記一対の側
面において互い違いに絶縁性物質が塗布され、絶縁性物
質が塗布されない内部電極のもう一方の端部は前記側面
ごとに設けられた外部電極に接続され、前記端子接続部
上の前記外部電極からリード線をとり出している電歪効
果素子において、前記外部電極が、電歪材層上に配設さ
れた複数本の外部電極と、端子接続部上に側面幅方向に
配設され前記複数本の外部電極層と接続された外部電極
とからなっている。
[Means for Solving the Problems] The electrostrictive effect element of the present invention comprises a terminal connecting portion in which a plurality of electrostrictive materials are laminated, and an electrostrictive portion in which a plurality of electrostrictive materials and internal electrodes are alternately laminated. A laminate having, and an insulating material is alternately applied on the pair of side surfaces to one end surface of the internal electrode exposed on the pair of side surfaces facing each other of the laminated body, and the other of the internal electrodes to which the insulating material is not applied. The end portion is connected to an external electrode provided on each side surface, and in the electrostrictive effect element in which a lead wire is taken out from the external electrode on the terminal connection portion, the external electrode is on the electrostrictive material layer. The external electrodes are provided and a plurality of external electrodes are provided on the terminal connection portion in the lateral width direction and connected to the external electrode layers.

[作用] 側面全長に配設された複数本の外部電極が端子接続部に
おいて、側面幅方向に配設させた電極面と接続している
ので、はんだが絶縁性物質上につかず、熱ストレスで絶
縁性物質が破壊されなくなる。側面全長に配設された外
部電極を複数本にすることで個々の外部電極の幅が小さ
くなり、その分端子接続部を小さくできる。ソルダレジ
ストを使用していないので作業工数が低減できる。
[Operation] Since the plurality of external electrodes arranged along the entire length of the side surface are connected to the electrode surface arranged in the width direction of the side surface at the terminal connection portion, the solder does not adhere to the insulating material and heat stress The insulating material is no longer destroyed. By using a plurality of external electrodes arranged along the entire length of the side surface, the width of each external electrode can be reduced, and the terminal connection portion can be reduced accordingly. Since no solder resist is used, the number of work steps can be reduced.

[実施例] 次に、本考案の実施例について図面を参照して説明す
る。
[Embodiment] Next, an embodiment of the present invention will be described with reference to the drawings.

第1図(a)は本考案の第1実施例を示す電歪効果素子
の斜視図、第1図(b)は第1図(a)の縦断面図、第
3図(a)は本実施例の外部電極5a,5bのパターン図で
ある。第4図と同符号は同一部材を示す。
1 (a) is a perspective view of an electrostrictive effect element showing a first embodiment of the present invention, FIG. 1 (b) is a vertical sectional view of FIG. 1 (a), and FIG. 3 (a) is a book. It is a pattern diagram of external electrodes 5a and 5b of an example. The same symbols as in FIG. 4 indicate the same members.

本実施例の電歪効果素子では、外部電極層5a,5bがH形
状をしており、中央のリード線6a,6bが端子接続部3か
らはみ出さないように形成されている。
In the electrostrictive effect element of this embodiment, the external electrode layers 5a and 5b are H-shaped, and the central lead wires 6a and 6b are formed so as not to protrude from the terminal connecting portion 3.

次に、本実施例の電歪効果素子の製造方法について説明
する。
Next, a method of manufacturing the electrostrictive effect element according to the present embodiment will be described.

まず、チタン酸鉛などからなるセラミックの仮焼粉末を
準備し、少量のポリブチラール樹脂などの有機バインダ
ーおよびフタル酸ジオクチルなどの可塑剤と共にエチル
セロソルブなどの有機溶媒中に分散させ、泥漿をドクタ
ーブレードを用いてスリップキャスティング法により厚
さ100μmのポリエステルフィルム上に流動塗布し厚さ7
0μmのグリーンシートの形に被着して電歪材1を形成
する。次に、該グリーンシート上に銀−バラジウムペー
ストなどの導体ペーストをスクリーン印刷により被着
し、内部電極2を形成する。その後、内部電極2が印刷
された部分のグリーンシートを所定の大きさに切断しポ
リエステルフィルムから剥離する。このグリーンシート
を所望の枚数だけ積み重ね、熱プレスで上下から圧着し
て電歪材1と内部電極2とが交互に配設された積層体を
形成する。また、このグリーンシートの積層工程時にお
いて内部電極2の形成されていない数十枚のグリーンシ
ートを積層体の中央部に位置するように積み重ねてダミ
ー層としての絶縁性の端子接続部3を形成する。次に、
この積層体に含有する有機バインダーを高温分解して蒸
発させ除去してから、例えば5℃/分の昇温スピードで
温度1120℃まで昇温させ、温度1120℃の状態を2時間保
持した焼結を行なう。次に、焼結後の積層体を格子状に
切断すると内部電極2の端面が露出する。一方の側面に
は内部電極2の端面に一層おきに電気泳動法によりガラ
ス等の絶縁性物質4aを被着し、他方の側面には絶縁性物
質4aを被着しなかった内部電極2の逆側になる端面に絶
縁性物質4bを被着する。絶縁性物質4a,4bの各上面から
は絶縁性物質4a,4bを被着しなかった内部電極2と電気
的な接続をするために、第3図(a)で示すようなH字
形状のスクリーンマスク(図示省略)を用いて銀ペース
トなどの導電ペーストをスクリーン印刷により積層体の
全長に渡り印刷し、外部電極5aと外部電極5bを形成す
る。次に、積層体中央部の端子接続部3上の外部電極5
a,5bにリード線6a,6bをはんだ7で接続して本実施例の
電歪効果素子が完成する。
First, prepare a calcined powder of ceramics such as lead titanate, disperse it in an organic solvent such as ethyl cellosolve together with a small amount of an organic binder such as polybutyral resin and a plasticizer such as dioctyl phthalate, and doctor sludge. Using a slip casting method, a fluid film was applied on a polyester film with a thickness of 100 μm to obtain a thickness of 7
The electrostrictive material 1 is formed by depositing in the shape of a green sheet of 0 μm. Next, a conductor paste such as a silver-valadium paste is applied on the green sheet by screen printing to form the internal electrodes 2. Then, the green sheet in the portion where the internal electrodes 2 are printed is cut into a predetermined size and peeled from the polyester film. A desired number of the green sheets are stacked and pressed from above and below by a hot press to form a laminated body in which the electrostrictive material 1 and the internal electrode 2 are alternately arranged. In addition, in the step of stacking the green sheets, dozens of green sheets on which the internal electrodes 2 are not formed are stacked so as to be located in the central portion of the stack to form the insulating terminal connecting portion 3 as a dummy layer. To do. next,
After the organic binder contained in this laminate is decomposed at high temperature and evaporated to be removed, the temperature is raised to 1120 ° C. at a heating rate of 5 ° C./min. Do. Next, when the laminated body after sintering is cut into a lattice shape, the end faces of the internal electrodes 2 are exposed. An insulating material 4a, such as glass, is deposited on one end surface of the inner electrode 2 by an electrophoretic method at every other end surface, and on the other side, the reverse of the internal electrode 2 not coated with the insulating material 4a. The insulating material 4b is applied to the end surface that faces the side. In order to make an electrical connection from the upper surfaces of the insulating substances 4a and 4b to the internal electrodes 2 on which the insulating substances 4a and 4b have not been deposited, an H-shaped structure as shown in FIG. A conductive paste such as a silver paste is screen-printed using a screen mask (not shown) over the entire length of the stack to form the external electrodes 5a and 5b. Next, the external electrode 5 on the terminal connecting portion 3 at the center of the laminated body
The lead wires 6a and 6b are connected to a and 5b with solder 7 to complete the electrostrictive effect element of this embodiment.

第2図(a)は本考案の第2の実施例を示す電歪効果素
子の斜視図、第2図(b)は第2図(a)の縦断面図、
第3図(b)は本実施例の外部電極5a,5bのパターン図
である。第4図と同符号は同一部材を示す。
2 (a) is a perspective view of an electrostrictive effect element showing a second embodiment of the present invention, FIG. 2 (b) is a vertical sectional view of FIG. 2 (a),
FIG. 3B is a pattern diagram of the external electrodes 5a and 5b of this embodiment. The same symbols as in FIG. 4 indicate the same members.

本実施例の電歪効果素子では、外部電極5a,5bがU字形
状をしており、下端のリード線6a,6bが端子接続部3か
らはみ出ないように形成されている。
In the electrostrictive effect element of this embodiment, the external electrodes 5a, 5b are U-shaped, and the lead wires 6a, 6b at the lower end are formed so as not to protrude from the terminal connecting portion 3.

次に、本実施例の電歪効果素子の製造法について説明す
る。
Next, a method for manufacturing the electrostrictive effect element according to the present embodiment will be described.

第2図において第1の実施例の製造法の積層工程におい
て電歪材1に内部電極2が印刷形成されたグリーンシー
トを所望の枚数だけ積み重ね、さらに該グリーンシート
を積み重ねた上部または下部(第2図は下部の例)に内
部電極2の形成されていないグリーンシートを数十枚積
み重ね、端子接続部3が形成されるように熱プレスで上
下から圧着して積層体を形成する。そして第1の実施例
と同じ方法により第3図(b)で示すようなスクリーン
マスクを用いて外部電極5a,5bを形成した後積層体下部
の端子接続部3上の外部電極5a,5bにリード線6a,6bをは
んだ7で接続して本実施例の電歪効果素子が完成する。
In FIG. 2, a desired number of green sheets having the internal electrodes 2 printed thereon are stacked on the electrostrictive material 1 in the stacking step of the manufacturing method of the first embodiment, and the green sheet is stacked on top or bottom (first or second). In FIG. 2, several tens of green sheets on which the internal electrodes 2 are not formed are stacked in the lower example), and a green laminate is formed by pressure bonding from above and below by a hot press so that the terminal connecting portions 3 are formed. Then, the external electrodes 5a and 5b are formed by using the screen mask as shown in FIG. 3 (b) by the same method as in the first embodiment, and then the external electrodes 5a and 5b on the terminal connecting portion 3 under the laminated body are formed. The lead wires 6a and 6b are connected by the solder 7 to complete the electrostrictive effect element of this embodiment.

なお、本実施例の電歪効果素子は、積層方向の断面がい
ずれも方形形状であるが、円またはリング、多角形の断
面でもようことは言うまでもない。また、電歪材1上に
配設された外部電極は3本以上でもよい。
The electrostrictive effect element of this example has a rectangular cross section in the stacking direction, but it goes without saying that it may have a circular, ring, or polygonal cross section. Further, the number of external electrodes arranged on the electrostrictive material 1 may be three or more.

[考案の効果] 以上説明したように本考案は、外部電極を側面全長に配
設された複数本の外部電極と、端子接続部において該外
部電極と接続され側面幅方向に配設された外部電極とで
構成することにより、次の効果がある。
[Effects of the Invention] As described above, the present invention provides a plurality of external electrodes having external electrodes arranged along the entire length of the side surface, and external electrodes arranged in the lateral direction of the side surface connected to the external electrodes at the terminal connecting portions. The following effects can be obtained by constituting with electrodes.

(1) 電極面が側面全長に配設された外部電極に対し
交わることにより、はんだが絶縁性物質上につかず熱ス
トレスで絶縁性物質が破壊されなくなる。
(1) Since the electrode surface intersects with the external electrode arranged along the entire length of the side surface, the solder does not adhere to the insulating material, and the insulating material is not destroyed by thermal stress.

(2) ソルダレジスト等の絶縁樹脂を塗布する必要が
ないので作業工数の低減ができる。
(2) Since it is not necessary to apply an insulating resin such as a solder resist, the number of work steps can be reduced.

(3) 端子接続部の電極面寸法を側面全幅まで広げる
ことかでき、はんだ作業がやりやすくなり作業能率が向
上する。
(3) The electrode surface size of the terminal connecting portion can be expanded to the entire width of the side surface, which facilitates the soldering work and improves the work efficiency.

(4) 側面全長に配設された外部電極を複数本にする
ことにより、素子に流れ込む許容電流量をかえることな
く端子接続部の外部電極幅を縮小することができる。こ
の縮小分だけ端子接続部を小さくできるため製品の小型
化ができる。また、同サイズのままだと電歪効果素子の
全長に対し、歪率量が大きくなり性能が向上する。
(4) By using a plurality of external electrodes arranged along the entire length of the side surface, the external electrode width of the terminal connecting portion can be reduced without changing the allowable current amount flowing into the element. Since the terminal connecting portion can be made smaller by this reduction, the product can be made smaller. Further, if the size remains the same, the amount of strain rate increases with respect to the entire length of the electrostrictive effect element, and the performance improves.

【図面の簡単な説明】[Brief description of drawings]

第1図(a),(b)は本考案の第1の実施例を示す電
歪効果素子の斜視図およびその縦断面図、第2図
(a),(b)は本考案の第2実施例を示す電歪効果素
子の斜視図および縦断面図、第3図は第1、第2の実施
例の外部電極5a,5bのパターン図、第4図(a),
(b)は電歪効果素子の従来例の斜視図および縦断面図
である。 1……電歪材、2……内部電極、3……端子接続部、4
a,4b……絶縁性物質、5a,5b……外部電極、6a,6b……リ
ード線、7……はんだ、8a,8b……ソルダレジスト。
1 (a) and 1 (b) are perspective views and longitudinal sectional views of an electrostrictive effect element showing a first embodiment of the present invention, and FIGS. 2 (a) and 2 (b) are second and third embodiments of the present invention. FIG. 3 is a perspective view and a longitudinal sectional view of an electrostrictive effect element showing an embodiment, FIG. 3 is a pattern view of external electrodes 5a, 5b of the first and second embodiments, FIG. 4 (a),
(B) is a perspective view and a longitudinal sectional view of a conventional example of an electrostrictive effect element. 1 ... Electrostrictive material, 2 ... Internal electrode, 3 ... Terminal connection part, 4
a, 4b ... Insulating material, 5a, 5b ... External electrode, 6a, 6b ... Lead wire, 7 ... Solder, 8a, 8b ... Solder resist.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 【請求項1】複数の電歪材と内部電極とが交互に積層さ
れた電歪部と前記電歪材のひとつより厚みの大きな電歪
材からなる端子接続部とを有する積層体と、前記積層体
の対向する一対の側面に露出する内部電極の一方の端面
に前記一対の側面において互い違いに絶縁性物質が塗布
され、前記絶縁性物質が塗布されていない内部電極のも
う一方の端部は前記一対の側面の一方の側面で前記絶縁
性物質を横切るように設けられた第1の外部電極に接続
されるとともに前記一対の側面の他方の側面で前記絶縁
性物質を横切るように設けられた第2の外部電極に接続
され、前記端子接続部上に位置する前記第1および第2
の外部電極へ第1および第2のリード線を電気的にそれ
ぞれ接続している電歪効果素子において、 前記一方の側面では前記第1の外部電極に隣り合うよう
に第3の外部電極が前記絶縁性物質を横切るように設け
られるとともに、前記第1の外部電極と前記第3の外部
電極とを電気的に接続するように第4の外部電極が前記
端子接続部上に設けられ、かつ前記第1のリード線が前
記第4の外部電極に固定手段を介して接続されており、
前記他方の側面では前記第2の外部電極に隣り合うよう
に第5の外部電極が前記絶縁性物質を横切るように設け
られるとともに、前記第2の外部電極と前記第5の外部
電極とを電気的に接続するように第6の外部電極が前記
端子接続部上に設けられ、かつ前記第2のリード線が前
記第6の外部電極に固定手段を介して接続されているこ
とを特徴とする電歪効果素子。
1. A laminate having an electrostrictive portion in which a plurality of electrostrictive materials and internal electrodes are alternately laminated, and a terminal connecting portion made of an electrostrictive material having a thickness larger than one of the electrostrictive materials; Insulating substances are alternately applied on the pair of side faces to one end face of the internal electrodes exposed on the pair of opposite side faces of the laminated body, and the other ends of the internal electrodes to which the insulating substance is not applied are One side surface of the pair of side surfaces is connected to a first external electrode provided so as to cross the insulating material, and the other side surface of the pair of side surfaces is provided so as to cross the insulating material. The first and second terminals connected to a second external electrode and located on the terminal connecting portion.
In the electrostrictive effect element in which the first and second lead wires are electrically connected to the external electrode, the third external electrode is adjacent to the first external electrode on the one side surface. A fourth external electrode is provided on the terminal connecting portion so as to traverse an insulating material and electrically connects the first external electrode and the third external electrode, and A first lead wire is connected to the fourth external electrode via a fixing means,
On the other side surface, a fifth external electrode is provided so as to be adjacent to the second external electrode so as to cross the insulating material, and the second external electrode and the fifth external electrode are electrically connected to each other. A sixth external electrode is provided on the terminal connecting portion so as to be electrically connected, and the second lead wire is connected to the sixth external electrode via a fixing means. Electrostrictive effect element.
JP1989009971U 1989-01-30 1989-01-30 Electrostrictive effect element Expired - Lifetime JPH0745971Y2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1989009971U JPH0745971Y2 (en) 1989-01-30 1989-01-30 Electrostrictive effect element

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1989009971U JPH0745971Y2 (en) 1989-01-30 1989-01-30 Electrostrictive effect element

Publications (2)

Publication Number Publication Date
JPH02101560U JPH02101560U (en) 1990-08-13
JPH0745971Y2 true JPH0745971Y2 (en) 1995-10-18

Family

ID=31217189

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1989009971U Expired - Lifetime JPH0745971Y2 (en) 1989-01-30 1989-01-30 Electrostrictive effect element

Country Status (1)

Country Link
JP (1) JPH0745971Y2 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5167576B2 (en) * 2005-04-22 2013-03-21 Tdk株式会社 Multilayer piezoelectric element

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5527995U (en) * 1978-08-15 1980-02-22
NL7905817A (en) * 1979-07-27 1981-01-29 Philips Nv METHOD FOR MANUFACTURING A SOLAR CELL
DE2945450A1 (en) * 1979-11-10 1981-05-14 Licentia Patent-Verwaltungs-Gmbh, 6000 Frankfurt Solar cell electric contact prodn. - by flame, electric arc or plasma spraying of contact material
JPS61206316U (en) * 1985-06-14 1986-12-26
JPH0534122Y2 (en) * 1987-01-23 1993-08-30

Also Published As

Publication number Publication date
JPH02101560U (en) 1990-08-13

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