JPS6225475A - Electrostrictive effect element and manufacture thereof - Google Patents

Abstract

PURPOSE:To facilitate a manufacture of an electrostrictive effect element by forming an insulating layer in the same surface as an inner electrode layer in case of alternately laminating an electrostrictive material layer and an inner electrode layer to eliminate an insulating material of the side perpendicular to the inner electrode surface after laminating. CONSTITUTION:An inner electrode layer 32 of Pt is formed on an electrostrictive layer 31 which mainly contains Pb(Mg1/3Nb2/3)O. Part of the layer 32 is cut in parallel to form by printing insulators 33a, 33b of ZrO2. Then, the insulators 33a, 33b are alternately disposed reversely at every other step on the layer 31, and the layer 31, and the layer 32 is laminated. After a thermal pressing, it is sintered at 1,250 deg.C, cut at the prescribed position, Pt paste is coated on the exposed parts of the insulators 33a, 33b, dried to form conductive layers 34a, 34b, similar conductive layers 35, 36 are formed on the upper and lower surfaces of the laminate and connected with the layer 34. When a voltage is applied between external terminals 50 and 51, a voltage is applied to the inner electrode layer through the electrodes 35, 36.

Description

DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to an electrostrictive effect element and a manufacturing method thereof, and more particularly to an electrode structure 8 of an electrostrictive effect element using a longitudinal effect and a manufacturing method thereof.

[Conventional technology]

Conventionally, this type of electrostrictive effect element has a structure as shown in FIG. That is, a laminate is formed by laminating a plurality of sheets in which an internal electrode layer 32 is provided on one surface of an electrostrictive layer 31 made of an electrostrictive material in the form of a film or a thin plate, and one side surface, that is, the left side is exposed between the sheets. A layer of E is formed on the end surface of the internal electrode layer 32.
Then, an insulating part 33a is provided, and a conductive paste is applied thereon to form a first conductive layer 34a, which is connected to the lower electrode 36.

On the other hand, on the opposite side surface, that is, the right side surface, an insulating section 33b is provided on the right end surface of the internal electrode layer 32 where the insulating section 33a was not provided on the left side surface, and a second conductive layer 34b is formed on this. The upper part is connected to the pole 35 to produce an electrostrictive element.

[Problem that the invention seeks to solve]

In this conventional '1 strain effect element, when the external terminals 50 and 51 are brought into contact with the upper electrode plate 35 and the lower electrode plate 36, respectively, and a voltage is applied, the voltage is applied to all the electrostrictive layers 31, and the voltage is applied to all the electrostrictive layers 31. A large operational strain is generated at a low voltage, and the electrostrictive effect element as a whole is distorted in the vertical direction indicated by arrows X and Y in FIG.

In the above-mentioned conventional electrostrictive effect element, the electrostrictive layer 31 is in the form of a film or a thin plate, so the thickness is as thin as approximately (), i. It was extremely difficult to coat the parts, and there were major problems in insulation reliability8 and mass production.

[Means for solving problems]

An object of the present invention is to solve such conventional problems and provide an electrostrictive effect element that is easy to manufacture and has high reliability.

The electrostrictive effect element of the present invention is a multilayer chip-type electrostrictive effect element in which electrostrictive material layers and internal electrode layers are alternately laminated. One end of each layer of the electrode layer is composed of an insulating material different from the electrostrictive material layer, and the insulating material of each layer is alternately stacked in opposite directions, so that the conductive material and the internal electrode layer are insulated every other layer. Characterized by structure.

Furthermore, the method for manufacturing an electrostrictive effect element of the present invention includes a step of forming an electrostrictive material layer, and forming an internal electrode layer by applying a conductive paste to the surface of the electrostrictive material layer with a screen stamp, and then forming an insulating material. A step of printing a mixed paste with an organic binder on the same plane as the internal electrode layer to form a composite sheet, and after alternately laminating the composite sheets to form an FF layer body.
a step of heating and sintering; a cutting step of cutting the insulating material and internal electrodes of the laminate to alternately expose the ends;
A conductive material layer is applied to the cut surface, and on top of the laminate,
The method is characterized in that it consists of a step of connecting the lower electrode plates of different polarities, respectively.

〔Example〕

Hereinafter, the present invention will be explained in detail with reference to the drawings.

FIG. 1 is a sectional view showing an embodiment of the present invention.

That is, 5 e.g. magnesium-lead niobate Pb (M,
! i' V, Nb z/s ) with Os as the main component and -j
A slurry dispersed in a 6i1E strained material i medium is prepared, and this slurry is coated onto a filler film to a thickness of several hundred microns using a film-forming device that manufactures ordinary laminated chip capacitors. After drying, the slurry is dispersed in a Mylar film. The electrostrictive layer 31 is formed by peeling off. After screen-printing a conductive paste such as platinum on the surface of this electrostrictive layer 31 to form an internal electrode layer 32 at a desired position, one end of the internal electrode layer 22 is cut out in parallel in advance to form a cut-out portion. ZrO2, BaT
A mixed paste of an insulating material such as iOx, C+Pb ceramic, and an organic binder is screen printed again to form insulating parts 33a and 33b on one end of the internal electrode layer 22 by coating and drying.

Next, the internal electrode layer 32 and the insulating parts 33a, 3 are placed on the electrostrictive layer 31.
3b is printed on the edge of one surface, and the insulating parts 33a, 331) are laminated in opposite directions alternately on the left and right with one layer S above and below, and after being temporarily formed by hot press, it is placed in a sintering furnace. By sintering at a temperature of about 1250° C., a laminate having an electrostrictive layer 31, an internal electrode layer 32, and insulating portions 33a and 33b can be obtained.

Next, after cutting this laminate at a predetermined position as shown in FIG. 1, a conductive paste such as platinum is applied and dried on the left side surface where one insulating portion 33a is exposed, thereby forming a first conductive layer 34a. . On the other hand, a conductive paste made of the same material as the first conductive layer is applied and dried on the right side surface where the insulating part 33b is exposed.
A conductive layer 34b is formed.

Next, a conductive paste such as platinum is applied to the upper and lower surfaces of this laminate to form electrode plates 35 and 36, which are electrically connected to each of the conductor layers 34 and 35, respectively.

In this way, the first conductive layer 34 is electrically connected to each end of the internal conductive layer 32 which is exposed alternately with one insulating part 33a, and the internal part which is alternately exposed with the other insulating part 33b is electrically connected to the first conductive layer 34. Each end of the electrode layer 32a and the second conductive layer 3
4b is electrically connected and a voltage is applied between the upper and lower external terminals 50.51, a voltage can be applied between each internal electrode layer 320 via the upper and lower T electrode plates 35.36. .

〔Effect of the invention〕

As explained above, in the present invention, since the insulating layer is formed in the same plane as the internal electrode layer, there is no need to apply an insulating material to the side surface perpendicular to the internal electrode layer after forming the laminate, which facilitates mass production. , and has the effect of dramatically improving the reliability of electrical insulation.

[Brief explanation of the drawing]

FIG. 1 is a sectional view showing one embodiment of the strain effect element of the present invention. FIG. 2 is a sectional view showing an example of a conventional electrostrictive effect element. 31...Tun strained layer, 32...Internal electrode layer, 33a. 33b...Insulation section, 34a, 34b...
...Conductive layer. 35.36...1 pole plate, 50,51...
・External terminal. Agent: Patent Attorney Otode Uchihara IA

Claims (2)

[Claims] (1) A multilayer chip capacitor type electrostrictive effect element in which electrostrictive material layers and internal electrode layers are alternately laminated is coated with a conductive material that connects to each of the upper and lower electrode surfaces of the internal electrode layer. One end of each layer is made of an insulating material different from the electrostrictive material layer, and the insulating materials of each layer are alternately stacked in opposite directions, and the conductive material and the internal electrode layer are insulated every other layer. An electrostrictive effect element comprising: (2) A step of forming an electrostrictive material layer, and after forming an internal electrode layer by screen printing a conductive paste on the surface of the electrostrictive material layer, a mixed paste of an insulating material and an organic binder is applied to the internal electrode layer. a step of printing on the same plane as the layer to form a composite sheet; a step of alternately stacking the composite sheets to form a laminate and then heating and sintering; The process consists of a cutting process in which the electrode layers are cut to expose the ends alternately, and a process in which a conductive material layer is applied to the cut surfaces and connected to electrode plates of different polarities on the top and bottom of the laminate, respectively. A method of manufacturing an electrostrictive element, characterized in that: