JPS63122288A - Electrostriction effect element - Google Patents
Electrostriction effect elementInfo
- Publication number
- JPS63122288A JPS63122288A JP61270129A JP27012986A JPS63122288A JP S63122288 A JPS63122288 A JP S63122288A JP 61270129 A JP61270129 A JP 61270129A JP 27012986 A JP27012986 A JP 27012986A JP S63122288 A JPS63122288 A JP S63122288A
- Authority
- JP
- Japan
- Prior art keywords
- electrode conductors
- conductors
- effect element
- piezoelectric ceramic
- external electrode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004020 conductor Substances 0.000 claims abstract description 56
- 239000000919 ceramic Substances 0.000 claims abstract description 17
- 230000006866 deterioration Effects 0.000 abstract description 2
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical group [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- 239000012212 insulator Substances 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 239000002002 slurry Substances 0.000 description 2
- 238000005476 soldering Methods 0.000 description 2
- KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 description 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- 239000011230 binding agent Substances 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000005336 cracking Methods 0.000 description 1
- 230000006378 damage Effects 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000007731 hot pressing Methods 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 238000010030 laminating Methods 0.000 description 1
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 239000003960 organic solvent Substances 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 238000007650 screen-printing Methods 0.000 description 1
- 238000005245 sintering Methods 0.000 description 1
- 238000007569 slipcasting Methods 0.000 description 1
- 229910000679 solder Inorganic materials 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/80—Constructional details
- H10N30/87—Electrodes or interconnections, e.g. leads or terminals
- H10N30/872—Interconnections, e.g. connection electrodes of multilayer piezoelectric or electrostrictive devices
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/80—Constructional details
- H10N30/87—Electrodes or interconnections, e.g. leads or terminals
- H10N30/875—Further connection or lead arrangements, e.g. flexible wiring boards, terminal pins
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/80—Constructional details
- H10N30/88—Mounts; Supports; Enclosures; Casings
Landscapes
- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
Abstract
Description
【発明の詳細な説明】
[産業上の利用分野]
本発明は、シート状の圧電セラミック部材と内部電極導
体とが交互に積層された積層焼結体を含み、該積層焼結
体の対向する一対の側面に露出する内部電極導体の一方
の端部が前記対向する側面において互い違いに絶縁され
、絶縁されていない前記内部電極導体の他方の端部が前
記側面ごとに設けられた外部電極導体にそれぞれ接続さ
れている電歪効果素子に関する。[Detailed Description of the Invention] [Industrial Application Field] The present invention includes a laminated sintered body in which sheet-like piezoelectric ceramic members and internal electrode conductors are alternately laminated, and One end of the internal electrode conductors exposed on a pair of side surfaces is alternately insulated on the opposing side surfaces, and the other end of the internal electrode conductor that is not insulated is connected to an external electrode conductor provided for each side surface. This relates to the electrostrictive effect elements connected to each other.
[従来の技術]
第4図は、この種の電歪効果素子の従来例の断面図であ
る。この電歪効果素子は、圧電セラミック部材31の表
面に内部電極32が形成され、これらの複数枚がa層さ
れて積層体30が形成され、その1つの側面に露出した
内部電極32の端面に1層おきに絶縁膜33aが形成さ
れ、さらにその上に第1の外部電極導体34aが形成さ
れ。[Prior Art] FIG. 4 is a sectional view of a conventional example of this type of electrostrictive effect element. In this electrostrictive effect element, an internal electrode 32 is formed on the surface of a piezoelectric ceramic member 31, a plurality of these pieces are stacked in a layer to form a laminate 30, and an end face of the internal electrode 32 exposed on one side thereof is An insulating film 33a is formed every other layer, and a first external electrode conductor 34a is further formed thereon.
一方、対向する他の側面には、前述の絶縁33aが形成
されなかった内部電極32の端面に絶縁膜33bが形成
され、その上に第2の外部電極導体34bが形成され、
そして両側面の外部電極導体34a、34bにリード線
10a、10bが接続された構造となっている。On the other hand, on the other opposing side surface, an insulating film 33b is formed on the end face of the internal electrode 32 on which the above-mentioned insulating layer 33a is not formed, and a second external electrode conductor 34b is formed thereon.
The structure is such that lead wires 10a and 10b are connected to external electrode conductors 34a and 34b on both sides.
この従来の電歪効果素子はリード線10a、10bを介
して電圧供給部の外部端子A、Bから外部電極導体34
a、34b間に電圧を供給すると、すべての圧電セラミ
ック部材31の両端に電圧が印加され、素子全体として
図示した矢印のX、Y方向に歪が発生する。This conventional electrostrictive element is connected to an external electrode conductor 34 from external terminals A and B of a voltage supply section via lead wires 10a and 10b.
When a voltage is applied between a and 34b, a voltage is applied to both ends of all the piezoelectric ceramic members 31, and the entire element is distorted in the X and Y directions shown by the arrows.
[発明が解決しようとする問題点]
上述した従来の電歪効果素子は、リード線付きの構造と
なっているので、電圧の繰り返し印加、長時間印加、高
電圧印加等によってリード線10a、fobまたはリー
ド線10a、10bと外部電極導体34a、34bとの
接続箇所が破断することがあり、また、半田付は等でリ
ード線10a、10bを接続した場合、外部電極導体3
4a、34bの半田量われが生じたり、半田付は部の歪
抑制効果による絶縁33a、33bおよび圧電セラミッ
ク部材31の破壊が生じたりして、信頼性上大きな欠点
がある。[Problems to be Solved by the Invention] Since the conventional electrostrictive effect element described above has a structure with lead wires, the lead wires 10a, fob may be damaged by repeated voltage application, long-time application, high voltage application, etc. Alternatively, the connection points between the lead wires 10a, 10b and the external electrode conductors 34a, 34b may break, and if the lead wires 10a, 10b are connected by soldering, etc., the external electrode conductors 34a, 34b may break.
This method has major drawbacks in terms of reliability, such as cracking of the solder portions 4a and 34b, and destruction of the insulators 33a and 33b and the piezoelectric ceramic member 31 due to the strain suppressing effect of soldering.
[問題点を解決するための手段]
本発明の電歪効果素子は、積層焼結体の両端の圧電セラ
ミック部材の、前記外部電極導体が設けられている側面
と接する角部のうち対角線上にある2つの角部がそれぞ
れ面取りされ、前記両端の圧電セラミック部材の外表面
に一対の端子電極導体が被着形成され、前記端子電極導
体と前記外部電極導体とが面取りされた角部においてそ
れぞれ接続されていることを特徴とする。[Means for Solving the Problems] The electrostrictive effect element of the present invention has a piezoelectric ceramic member at both ends of a laminated sintered body, which is diagonally diagonally connected to the side surface on which the external electrode conductor is provided. Two certain corners are chamfered, a pair of terminal electrode conductors are formed on the outer surface of the piezoelectric ceramic member at both ends, and the terminal electrode conductor and the external electrode conductor are respectively connected at the chamfered corners. It is characterized by being
このように面取り加工を施したチップ型構造にすること
により、電歪効果素子としての信頼性および量産性を大
幅に向上させたものである。The chamfered chip-type structure greatly improves the reliability and mass productivity of the electrostrictive element.
[実施例]
次に、本発明の実施例について図面を参照して説明する
。[Example] Next, an example of the present invention will be described with reference to the drawings.
第1図は本発明の電歪効果素子の一実施例を示す断面図
、第2図はその角部の斜視図である。FIG. 1 is a sectional view showing an embodiment of the electrostrictive effect element of the present invention, and FIG. 2 is a perspective view of a corner thereof.
この電歪効果素子では従来と同じく圧電セラミック部材
31および内部電極導体32を交互に重ね合わせ、積層
焼結体に形成された積層体30の、内部電極導体32が
端面において、相対する側面に設けられた1対の外部電
極導体34a、34bに1層おきに交互に接続されて1
対の櫛歯形電極が構成されている。In this electrostrictive effect element, piezoelectric ceramic members 31 and internal electrode conductors 32 are stacked alternately as in the conventional case, and the internal electrode conductors 32 are provided on the end faces of the laminate 30 formed as a laminated sintered body and on opposite sides. The external electrode conductors 34a and 34b are connected alternately every other layer.
A pair of comb-shaped electrodes are configured.
圧電セラミック部材31は、例えば、ニッケル・ニオブ
酸鉛Pb(Nil/3Nb2/3)03を主成分とする
電歪材料の予焼粉末に微量の宥機バインダを添加し、こ
れを有機溶媒中に分散させた泥漿を準備し、この泥漿を
スリップキャスティング成膜法により形成したものであ
る。内部電極導体32はこの圧電セラミック部材31の
片面に、銀粉末とパラジウム粉末とを70 : 30の
比率で混合させた粉末を主成分とする導体ペーストをス
クリーン印刷等で被着形成したものである。電歪効果素
子は内部電極導体32が対になるように圧電セラミック
部材31の所定枚数を積層してホットプレスにより一体
化した後、約ttoo℃の温度で2時間程度焼結して圧
電セラミック部材31と内部電極導体32を交互に積層
形成し、側面を切断して、内部電極導体32の端面が外
部に露出した状態に形成し、柱状のa屠体30とする。The piezoelectric ceramic member 31 is made by, for example, adding a small amount of a softener binder to a prefired powder of an electrostrictive material whose main component is nickel/lead niobate Pb (Nil/3Nb2/3)03, and adding this to an organic solvent. A dispersed slurry was prepared, and this slurry was formed by a slip casting film formation method. The internal electrode conductor 32 is formed by applying a conductive paste whose main component is a mixture of silver powder and palladium powder at a ratio of 70:30 to one side of the piezoelectric ceramic member 31 by screen printing or the like. . The electrostrictive effect element is manufactured by laminating a predetermined number of piezoelectric ceramic members 31 such that the internal electrode conductors 32 form a pair, integrating them by hot pressing, and then sintering them at a temperature of about 20° C. for about 2 hours to form a piezoelectric ceramic member. 31 and internal electrode conductors 32 are alternately laminated, and the side surfaces are cut so that the end surfaces of the internal electrode conductors 32 are exposed to the outside to form a columnar carcass 30.
積層体30の第1の側面、すなわち第1図の左側側面に
′露出した内部電極導体32に1層おきにガラス等の絶
縁33aが形成され、その上に銀粉末を主成分とする導
電ペーストを被着して第1の外部電極導体34aが形成
され、第1の側面と対向する側面には第1の側面で絶縁
が形成されなかった内部電極導体32の上に絶133b
が形成され、その上に同様に外部電極導体34bが形成
される。An insulator 33a such as glass is formed every other layer on the internal electrode conductor 32 exposed on the first side surface of the laminate 30, that is, the left side surface in FIG. A first external electrode conductor 34a is formed by depositing the first external electrode conductor 34a, and a first external electrode conductor 34a is formed on the internal electrode conductor 32 on which insulation is not formed on the first side surface on the side surface opposite to the first side surface.
is formed, and an external electrode conductor 34b is similarly formed thereon.
第2図に示すように、この積層体30の、対角線上にあ
る2つの角部、すなわち、下面の角部30aおよび上面
の角部30bは研磨機等でほぼ45度に面取り加工され
ている。As shown in FIG. 2, the two diagonal corners of this laminate 30, namely the bottom corner 30a and the top corner 30b, are chamfered at approximately 45 degrees using a polishing machine or the like. .
また、積層体30の両端の圧電セラミック部材31の表
面には端子電極導体35a、35bがそれぞれ被着形成
され、1対の外部電極導体34a、34bの延長された
部分と、面取りされた角部30a、30bにおいて接続
されている。Further, terminal electrode conductors 35a and 35b are formed on the surfaces of the piezoelectric ceramic members 31 at both ends of the laminate 30, respectively, and the extended portions of the pair of external electrode conductors 34a and 34b and the chamfered corner portions are formed. They are connected at 30a and 30b.
この電歪効果素子は、剛性の厚板等からなる取付は部材
50.51を電歪効果素子の上下面に取付け、取付は部
材50.51間に電圧を印加することにより、端子電極
導体35a、35bおよび外部電極導体34a、34b
を介して内部電極導体32に電圧を印加することができ
る。This electrostrictive effect element is made of a rigid thick plate or the like, and is mounted by attaching members 50.51 to the upper and lower surfaces of the electrostrictive effect element, and by applying a voltage between the members 50 and 51, the terminal electrode conductor 35a , 35b and external electrode conductors 34a, 34b
A voltage can be applied to the internal electrode conductor 32 via.
第3図は角部の面取りの他の実施例を示す斜視図である
。この場合、積層体30の下面の角部30aおよび上面
の角部30bを研磨機等で円筒面状に面取り加工したも
ので、第1の実施例と同様の効果がある。FIG. 3 is a perspective view showing another embodiment of corner chamfering. In this case, the lower corner 30a and the upper corner 30b of the laminate 30 are chamfered into a cylindrical shape using a polisher or the like, and the same effect as in the first embodiment can be obtained.
[発明の効果]
以上説明したように本発明は、電歪効果素子の上下面の
対角線に位置する2つの角部を面取りし、かつ上下面に
端子導体電極を設けて外部電極導体と接続し、印加電圧
が端子電極導体および外部電極導体を通じて内部電極導
体に印加されるように構成したことにより、電圧印加の
ためのリード線が不用となり、リード線の破断等による
接続の信頼性低下をなくし、一方チツブ型構造であるこ
とにより量産性を高める効果がある。[Effects of the Invention] As explained above, the present invention chamfers the two diagonal corners of the upper and lower surfaces of the electrostrictive element, and provides terminal conductor electrodes on the upper and lower surfaces to connect them to external electrode conductors. By configuring the structure so that the applied voltage is applied to the internal electrode conductor through the terminal electrode conductor and the external electrode conductor, lead wires for voltage application are no longer required, eliminating deterioration in connection reliability due to lead wire breakage, etc. On the other hand, the chip-shaped structure has the effect of increasing mass productivity.
第1図は本発明の電歪効果素子の一実施例の断面図、第
2図、第3図は角部の面取りをそれぞれ示す斜視図、第
4図は従来例を示す断面図である。
30、、、、、、、、積層体、
30a、30b、、、角部、
31、、、、、、、、圧電セラミック部材、32、、、
、、、、内部電極導体、
33a、33b、、、絶縁膜。
34a、34b、、、外部電極導体、
35a、35b、、、端子電極導体、
50.51.、、、、取付は部材。
第1図
第4図FIG. 1 is a sectional view of one embodiment of the electrostrictive effect element of the present invention, FIGS. 2 and 3 are perspective views showing chamfered corners, and FIG. 4 is a sectional view of a conventional example. 30, Laminate, 30a, 30b, Corner 31, Piezoelectric ceramic member 32,
,,,internal electrode conductor, 33a, 33b,,,insulating film. 34a, 34b, ..., external electrode conductor, 35a, 35b, ..., terminal electrode conductor, 50.51. ,,,Installation is by parts. Figure 1 Figure 4
Claims (1)
互に積層された積層焼結体を含み、該積層焼結体の対向
する一対の側面に露出する内部電極導体の一方の端部が
前記対向する側面において互い違いに絶縁され、絶縁さ
れていない前記内部電極導体の他方の端部が前記側面ご
とに設けられた外部電極導体にそれぞれ接続されている
電歪効果素子において、 前記積層焼結体の両端の圧電セラミック部材の、前記外
部電極導体が設けられている側面と接する角部のうち対
角線上にある2つの角部がそれぞれ面取りされ、前記両
端の圧電セラミック部材の外表面に一対の端子電極導体
が被着形成され、前記端子電極導体と前記外部電極導体
とが面取りされた角部においてそれぞれ接続されている
ことを特徴とする電歪効果素子。[Claims] It includes a laminated sintered body in which sheet-like piezoelectric ceramic members and internal electrode conductors are alternately laminated, and one of the internal electrode conductors exposed on a pair of opposing side surfaces of the laminated sintered body. In the electrostrictive element, the ends of which are alternately insulated on the opposing side surfaces, and the other ends of the uninsulated internal electrode conductors are respectively connected to external electrode conductors provided for each of the side surfaces, Of the corners of the piezoelectric ceramic members at both ends of the laminated sintered body that are in contact with the side surfaces on which the external electrode conductors are provided, two diagonally located corners are chamfered, respectively, and the outer surfaces of the piezoelectric ceramic members at both ends are chamfered. An electrostrictive effect element, characterized in that a pair of terminal electrode conductors is formed and adhered to the outer electrode conductor, and the terminal electrode conductor and the external electrode conductor are connected to each other at chamfered corners.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP61270129A JPS63122288A (en) | 1986-11-12 | 1986-11-12 | Electrostriction effect element |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP61270129A JPS63122288A (en) | 1986-11-12 | 1986-11-12 | Electrostriction effect element |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS63122288A true JPS63122288A (en) | 1988-05-26 |
Family
ID=17481955
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP61270129A Pending JPS63122288A (en) | 1986-11-12 | 1986-11-12 | Electrostriction effect element |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS63122288A (en) |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH04111770U (en) * | 1991-03-15 | 1992-09-29 | テイーデイーケイ株式会社 | Laminated piezoelectric device |
JPH04309274A (en) * | 1991-04-08 | 1992-10-30 | Murata Mfg Co Ltd | Laminated piezo-electric element |
EP0620049A2 (en) * | 1993-04-16 | 1994-10-19 | Hewlett-Packard Company | Multilayer acoustic transducer |
WO2009069693A1 (en) * | 2007-11-27 | 2009-06-04 | Kyocera Corporation | Laminated piezoelectric element and method for manufacturing the same, injection apparatus and fuel injection system |
JP2013098426A (en) * | 2011-11-02 | 2013-05-20 | Tdk Corp | Laminate piezoelectric element |
-
1986
- 1986-11-12 JP JP61270129A patent/JPS63122288A/en active Pending
Cited By (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH04111770U (en) * | 1991-03-15 | 1992-09-29 | テイーデイーケイ株式会社 | Laminated piezoelectric device |
JPH04309274A (en) * | 1991-04-08 | 1992-10-30 | Murata Mfg Co Ltd | Laminated piezo-electric element |
EP0620049A2 (en) * | 1993-04-16 | 1994-10-19 | Hewlett-Packard Company | Multilayer acoustic transducer |
EP0620049A3 (en) * | 1993-04-16 | 1995-09-06 | Hewlett Packard Co | Multilayer acoustic transducer. |
WO2009069693A1 (en) * | 2007-11-27 | 2009-06-04 | Kyocera Corporation | Laminated piezoelectric element and method for manufacturing the same, injection apparatus and fuel injection system |
JP5101630B2 (en) * | 2007-11-27 | 2012-12-19 | 京セラ株式会社 | Multilayer piezoelectric element, method for manufacturing the same, injection device, and fuel injection system |
US8502434B2 (en) | 2007-11-27 | 2013-08-06 | Kyocera Corporation | Multi-layer piezoelectric element, method for manufacturing the same, injection apparatus and fuel injection system |
JP2013098426A (en) * | 2011-11-02 | 2013-05-20 | Tdk Corp | Laminate piezoelectric element |
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