JPS61272984A - Electrostrictive effect element - Google Patents
Electrostrictive effect elementInfo
- Publication number
- JPS61272984A JPS61272984A JP60114505A JP11450585A JPS61272984A JP S61272984 A JPS61272984 A JP S61272984A JP 60114505 A JP60114505 A JP 60114505A JP 11450585 A JP11450585 A JP 11450585A JP S61272984 A JPS61272984 A JP S61272984A
- Authority
- JP
- Japan
- Prior art keywords
- layer
- solder
- internal electrode
- electrostrictive
- effect element
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/80—Constructional details
- H10N30/87—Electrodes or interconnections, e.g. leads or terminals
- H10N30/875—Further connection or lead arrangements, e.g. flexible wiring boards, terminal pins
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/01—Manufacture or treatment
- H10N30/06—Forming electrodes or interconnections, e.g. leads or terminals
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/50—Piezoelectric or electrostrictive devices having a stacked or multilayer structure
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Transducers For Ultrasonic Waves (AREA)
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明はメカトロニクス機器に用いる電歪効果素子に関
し、特に積層型の電歪効果素子の端子の取シ出し構造に
関する。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to an electrostrictive effect element used in mechatronic equipment, and more particularly to a terminal extraction structure of a laminated electrostrictive effect element.
従来、積層型の電歪効果素子は第3図に示す構造を採っ
ている。第3図において1は複合ペロブスカイト構造を
有するチタン酸ジルコニウム酸鉛からなるセラミックの
電歪材層であり、2は銀−パラジウム合金を用いた内部
電極層である。Conventionally, a stacked electrostrictive effect element has a structure shown in FIG. In FIG. 3, 1 is a ceramic electrostrictive material layer made of lead zirconate titanate having a composite perovskite structure, and 2 is an internal electrode layer using a silver-palladium alloy.
3は内部電極層2の端面を一層おきに絶縁するために被
着されている絶縁保護膜でちる。4は内部電極層2を一
層おきに電気的接続するために被着した外部電極である
。Reference numeral 3 denotes an insulating protective film coated to insulate the end faces of the internal electrode layers 2 every other layer. Reference numeral 4 designates external electrodes deposited to electrically connect every other internal electrode layer 2.
通常、電歪効果素子に電気信号を加えるためには、外部
電極4にリード線5を半田6を介して半田付けで取り付
けている。Normally, in order to apply an electric signal to the electrostrictive element, a lead wire 5 is attached to the external electrode 4 via a solder 6.
この半田付は時の半田量は出来るだけ少量がよい。その
理由は半田量が多いと電歪効果素子動作時の伸び縮みの
ときに半田6と外部電極4との間に応力が働き動作時の
信頼性が低下する。It is best to use as little solder as possible during this soldering process. The reason for this is that if the amount of solder is large, stress will be generated between the solder 6 and the external electrode 4 when the electrostrictive element expands and contracts during operation, reducing reliability during operation.
少量の半田でリード線を半田付は接続するためには、リ
ード線の線径を小さくしなければならない。したがって
線径が小さくなるとリード線が切れやすく゛なるなどの
取扱上の欠点が生じる。In order to solder and connect lead wires with a small amount of solder, the wire diameter of the lead wires must be made small. Therefore, as the wire diameter becomes smaller, there are disadvantages in handling such as the lead wire being more likely to break.
本発明の目的はかかる従来欠点を除去した電歪効果素子
を提供することにある。An object of the present invention is to provide an electrostrictive effect element that eliminates such conventional drawbacks.
本発明の電歪効果素子は電歪材層が内部電極層にはさま
れて積層配設され、かつ上下2層の内部m極層に接した
電歪材からなる保護層を有する積層体の側面に露出する
内部電極層の端面が部分的に絶縁性保護膜でamされ、
さらに導電体によって内部電極l−と1層おきに電気的
に接続する外部電極が保護層上に延長され、保護層上に
延長形成された外部電極上でリード端子が電気的に接続
されたことを特徴とする。The electrostrictive effect element of the present invention is a laminate in which an electrostrictive material layer is sandwiched between internal electrode layers and has a protective layer made of an electrostrictive material in contact with two internal m-pole layers, upper and lower. The end face of the internal electrode layer exposed on the side surface is partially covered with an insulating protective film,
Further, external electrodes electrically connected to internal electrodes l- every other layer by conductors are extended onto the protective layer, and lead terminals are electrically connected on the external electrodes extended and formed on the protective layer. It is characterized by
以下、本発明について図面を参照して説明する。 Hereinafter, the present invention will be explained with reference to the drawings.
第1図は本発明の一実施例の電歪効果素子の斜視図であ
る。FIG. 1 is a perspective view of an electrostrictive element according to an embodiment of the present invention.
図中、1は厚さ0.1 mのチタン酸ジルコニウム酸鉛
からなるセラミ、りの電歪材層、2は厚さ5μmの銀−
パラジウム合金を用いた内部電極層、3は内部電極層2
の端面を一層おきに絶縁させた厚さ15μmのガラス皮
膜の絶縁保護膜、4は銀ペースト被着させた外部電極、
5は直径0.2層mのポリウレタン被棟銅線などのリー
ド線、6は外部電極4とリード線5を電気的接続する共
晶半田などの半田である。この外部電極4−とリード線
5とを接続する半田6は、圧電的に不活性なダミ一層と
して最外層に設けた保護層7上に延長して形成された外
部電極4に接続させている。 。In the figure, 1 is an electrostrictive material layer made of ceramic lead zirconate titanate with a thickness of 0.1 m, and 2 is a silver layer with a thickness of 5 μm.
Internal electrode layer using palladium alloy, 3 is internal electrode layer 2
4 is an insulating protective film made of a glass film with a thickness of 15 μm, insulating the end face of every other layer, 4 is an external electrode coated with silver paste,
5 is a lead wire such as a polyurethane-coated copper wire having a diameter of 0.2 m, and 6 is a solder such as eutectic solder for electrically connecting the external electrode 4 and the lead wire 5. The solder 6 that connects the external electrode 4- and the lead wire 5 is connected to the external electrode 4, which is extended and formed on a protective layer 7 provided as the outermost layer as a piezoelectrically inert dummy layer. . .
次に本実施例を製造工程順に説明する。Next, this embodiment will be explained in order of manufacturing steps.
先ずチタン酸鉛などからなるセラミックの仮焼粉末を準
備し、少量のポリブチラール樹脂などの有慨バインダー
および7タル酸ジオクチルなどの可塑剤と共にエチルセ
ロソルブなどの有機溶媒中に分散させ、泥漿をつくる。First, a ceramic calcined powder made of lead titanate or the like is prepared and dispersed in an organic solvent such as ethyl cellosolve with a small amount of a binder such as polybutyral resin and a plasticizer such as dioctyl heptalate to form a slurry. .
との泥漿をドクターブレードを用いたスリップキャステ
ィング法により厚さ100μmのポリエステルフィルム
上に流動塗布し、厚さ70μmの電歪材となるグリーン
シートを被着形成する。The slurry was fluidly applied onto a 100 μm thick polyester film by a slip casting method using a doctor blade to form a 70 μm thick green sheet serving as an electrostrictive material.
次にポリエステルフィルムからグリーンシートを剥離し
た後、銀−パラジクムペーストなどの導体ペース)fス
クリーン印刷によシ所定の形状に内部電極層2′ft形
成する。Next, after peeling off the green sheet from the polyester film, an internal electrode layer 2'ft is formed in a predetermined shape by screen printing with a conductor paste such as silver-palladium paste.
このグリーンシートを所望の枚数だけ積み重ね、熱プレ
スで上下から圧着して電歪材の積層体を形成する。A desired number of green sheets are stacked and pressed together from above and below using a hot press to form a laminate of electrostrictive material.
このグリーンシートの積層時に内部電極層2を形成した
グリーンシートの上、下にそれぞれ20〜30枚の内部
電極層の形成されていないグリーンシートを積み重ねて
ダミ一層としての保護層を形成する。When stacking the green sheets, 20 to 30 green sheets on which no internal electrode layer is formed are stacked above and below the green sheet on which the internal electrode layer 2 is formed, respectively, to form a protective layer as a dummy layer.
次にこの積層体に含まれる有機バインダーを高温で分解
して蒸発除去させてから上昇スピード5℃/分で温度1
120℃ まで上昇させ、温度1120℃で2時間保持
して焼結を行う。Next, the organic binder contained in this laminate is decomposed at high temperature and removed by evaporation, and then the temperature is increased to 1°C at a rising speed of 5°C/min.
The temperature is increased to 120°C and held at 1120°C for 2 hours to perform sintering.
焼結させた積層体を内周刃切断機で所望の厚みに切断し
て第2図(a)に示すようなスライス板を作製する。ス
ライス板の切断面には内部電極層2の端部が露出してい
るので、一層おきに電気的接続を取るために、逆に内部
電極層2の端部を一層おきに電気泳動法によりガラスか
らなる絶縁保護膜3を被着形成する。The sintered laminate is cut into a desired thickness using an internal blade cutter to produce a sliced plate as shown in FIG. 2(a). Since the ends of the internal electrode layers 2 are exposed on the cut surface of the slice plate, in order to make electrical connections every other layer, the ends of the internal electrode layers 2 are glass-covered every other layer by electrophoresis. An insulating protective film 3 consisting of the following is deposited and formed.
次に第2図(b)に示すようにダミ一層としての保護層
7にまで銀ペーストをスクリーン印刷などによシ外部電
極4を延長して形成する。このように保護層7上に形成
された外部電極4上に半田付けによシ直径0..5 r
rtnφのリード線5を接続して電歪効果素子を作製す
る。Next, as shown in FIG. 2(b), silver paste is formed by screen printing or the like to extend the external electrode 4 up to the protective layer 7 as a dummy layer. A wire with a diameter of 0.0 mm is soldered onto the external electrode 4 formed on the protective layer 7 in this manner. .. 5 r
The lead wire 5 of rtnφ is connected to fabricate an electrostrictive effect element.
以上−説明したように本発明の電歪効果素子のリード線
が直径0.5 mm以上の太さのものを利用できるので
取扱い上、切断することなくリード線の信頼性が向上す
る効果がある。As explained above, since the lead wire of the electrostrictive effect element of the present invention can be used with a diameter of 0.5 mm or more, the reliability of the lead wire can be improved without cutting it in handling. .
第1図は本発明の電歪効果素子の斜視図、第2図(a)
、 (b)は本発明の電歪効果素子の製造過程で作製
されるスライス板の斜視図、第3図は従来の電歪効果素
子の斜視図である。
4−(外#S電檀ジ
81図
筋 3 図Fig. 1 is a perspective view of the electrostrictive effect element of the present invention, Fig. 2(a)
, (b) is a perspective view of a slice plate produced in the manufacturing process of the electrostrictive effect element of the present invention, and FIG. 3 is a perspective view of a conventional electrostrictive effect element. 4-(Outside #S Dendanji 81 Figure 3 Figure
Claims (1)
つ上下二層の該内部電極層に接した電歪材からなる保護
層を有する積層体の側面に露出する内部電極層の端面が
部分的に絶縁性保護膜で被覆され、さらに導電体によっ
て前記内部電極層と一層おきに電気的に接続する外部電
極が、前記保護層上に延長され、前記保護層上に延長形
成された外部電極上でリード端子と電気的に接続された
ことを特徴とする電歪効果素子。The internal electrode layer exposed on the side surface of the laminate has an electrostrictive material layer sandwiched between internal electrode layers and a protective layer made of an electrostrictive material in contact with the upper and lower internal electrode layers. External electrodes whose end surfaces are partially covered with an insulating protective film and which are electrically connected to the internal electrode layer every other layer by conductors are extended on the protective layer and formed to extend on the protective layer. An electrostrictive effect element characterized in that it is electrically connected to a lead terminal on an external electrode.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP60114505A JPS61272984A (en) | 1985-05-28 | 1985-05-28 | Electrostrictive effect element |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP60114505A JPS61272984A (en) | 1985-05-28 | 1985-05-28 | Electrostrictive effect element |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS61272984A true JPS61272984A (en) | 1986-12-03 |
Family
ID=14639432
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP60114505A Pending JPS61272984A (en) | 1985-05-28 | 1985-05-28 | Electrostrictive effect element |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS61272984A (en) |
Cited By (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0247540A2 (en) * | 1986-05-22 | 1987-12-02 | Nec Corporation | Electrostriction effect element |
JPS63151087A (en) * | 1986-12-16 | 1988-06-23 | Ngk Spark Plug Co Ltd | Multilayer piezoelectric device |
JPS6457662U (en) * | 1987-10-01 | 1989-04-10 | ||
JPH02164085A (en) * | 1988-12-19 | 1990-06-25 | Nec Corp | Electrostriction effect element |
JPH06188471A (en) * | 1992-12-22 | 1994-07-08 | Nec Corp | Voltage actuator |
WO2000052769A1 (en) * | 1999-03-04 | 2000-09-08 | Robert Bosch Gmbh | Piezoelectric actuator |
WO2000079607A1 (en) * | 1999-06-19 | 2000-12-28 | Robert Bosch Gmbh | Piezoelectric actuator with improved electrode connections |
US7111927B2 (en) | 2000-06-12 | 2006-09-26 | Seiko Epson Corporation | Piezoelectric vibrator unit |
WO2012080381A1 (en) * | 2010-12-17 | 2012-06-21 | Robert Bosch Gmbh | Piezoelectric actuator |
-
1985
- 1985-05-28 JP JP60114505A patent/JPS61272984A/en active Pending
Cited By (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0247540A2 (en) * | 1986-05-22 | 1987-12-02 | Nec Corporation | Electrostriction effect element |
JPS63151087A (en) * | 1986-12-16 | 1988-06-23 | Ngk Spark Plug Co Ltd | Multilayer piezoelectric device |
JPS6457662U (en) * | 1987-10-01 | 1989-04-10 | ||
JPH02164085A (en) * | 1988-12-19 | 1990-06-25 | Nec Corp | Electrostriction effect element |
JPH06188471A (en) * | 1992-12-22 | 1994-07-08 | Nec Corp | Voltage actuator |
WO2000052769A1 (en) * | 1999-03-04 | 2000-09-08 | Robert Bosch Gmbh | Piezoelectric actuator |
WO2000079607A1 (en) * | 1999-06-19 | 2000-12-28 | Robert Bosch Gmbh | Piezoelectric actuator with improved electrode connections |
US6411018B1 (en) | 1999-06-19 | 2002-06-25 | Robert Bosch Gmbh | Piezoelectric actuator with improved electrode connections |
JP2003502869A (en) * | 1999-06-19 | 2003-01-21 | ローベルト ボツシユ ゲゼルシヤフト ミツト ベシユレンクテル ハフツング | Piezo actuator |
CZ301223B6 (en) * | 1999-06-19 | 2009-12-16 | Robert Bosch Gmbh | Piezoelectric actuator |
US7111927B2 (en) | 2000-06-12 | 2006-09-26 | Seiko Epson Corporation | Piezoelectric vibrator unit |
WO2012080381A1 (en) * | 2010-12-17 | 2012-06-21 | Robert Bosch Gmbh | Piezoelectric actuator |
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