JPS62261040A - 表面欠陥検査方法 - Google Patents

表面欠陥検査方法

Info

Publication number
JPS62261040A
JPS62261040A JP10308386A JP10308386A JPS62261040A JP S62261040 A JPS62261040 A JP S62261040A JP 10308386 A JP10308386 A JP 10308386A JP 10308386 A JP10308386 A JP 10308386A JP S62261040 A JPS62261040 A JP S62261040A
Authority
JP
Japan
Prior art keywords
inspected
detection
surface defect
defect inspection
detection head
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10308386A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0553225B2 (enrdf_load_stackoverflow
Inventor
Toru Nishiyama
徹 西山
Minoru Nomaru
能丸　実
Kazuyasu Yamazaki
山崎　和康
Kichinosuke Kishitani
岸谷　吉之助
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nissan Motor Co Ltd
Original Assignee
Nissan Motor Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nissan Motor Co Ltd filed Critical Nissan Motor Co Ltd
Priority to JP10308386A priority Critical patent/JPS62261040A/ja
Publication of JPS62261040A publication Critical patent/JPS62261040A/ja
Publication of JPH0553225B2 publication Critical patent/JPH0553225B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Manipulator (AREA)
JP10308386A 1986-05-07 1986-05-07 表面欠陥検査方法 Granted JPS62261040A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10308386A JPS62261040A (ja) 1986-05-07 1986-05-07 表面欠陥検査方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10308386A JPS62261040A (ja) 1986-05-07 1986-05-07 表面欠陥検査方法

Publications (2)

Publication Number Publication Date
JPS62261040A true JPS62261040A (ja) 1987-11-13
JPH0553225B2 JPH0553225B2 (enrdf_load_stackoverflow) 1993-08-09

Family

ID=14344739

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10308386A Granted JPS62261040A (ja) 1986-05-07 1986-05-07 表面欠陥検査方法

Country Status (1)

Country Link
JP (1) JPS62261040A (enrdf_load_stackoverflow)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02298807A (ja) * 1989-05-15 1990-12-11 Nissan Motor Co Ltd 測定装置
JPH0642914A (ja) * 1992-07-24 1994-02-18 Canon Inc 変位測定装置
JP2007523334A (ja) * 2004-02-18 2007-08-16 イスラ ヴィズィオーン ジュステーム アーゲー 欠陥位置特定方法及びマーキングシステム
JP2020034316A (ja) * 2018-08-28 2020-03-05 フロンティアシステム株式会社 管状体又は棒状体の検査装置

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02298807A (ja) * 1989-05-15 1990-12-11 Nissan Motor Co Ltd 測定装置
JPH0642914A (ja) * 1992-07-24 1994-02-18 Canon Inc 変位測定装置
JP2007523334A (ja) * 2004-02-18 2007-08-16 イスラ ヴィズィオーン ジュステーム アーゲー 欠陥位置特定方法及びマーキングシステム
JP2020034316A (ja) * 2018-08-28 2020-03-05 フロンティアシステム株式会社 管状体又は棒状体の検査装置

Also Published As

Publication number Publication date
JPH0553225B2 (enrdf_load_stackoverflow) 1993-08-09

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