JPS62260054A - 化合物薄膜蒸着装置 - Google Patents

化合物薄膜蒸着装置

Info

Publication number
JPS62260054A
JPS62260054A JP10215386A JP10215386A JPS62260054A JP S62260054 A JPS62260054 A JP S62260054A JP 10215386 A JP10215386 A JP 10215386A JP 10215386 A JP10215386 A JP 10215386A JP S62260054 A JPS62260054 A JP S62260054A
Authority
JP
Japan
Prior art keywords
crucible
filament
vacuum
vacuum chamber
heat shield
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10215386A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0510424B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Inventor
Hajime Nakatani
元 中谷
Shigeru Yamaji
茂 山地
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP10215386A priority Critical patent/JPS62260054A/ja
Publication of JPS62260054A publication Critical patent/JPS62260054A/ja
Publication of JPH0510424B2 publication Critical patent/JPH0510424B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP10215386A 1986-05-06 1986-05-06 化合物薄膜蒸着装置 Granted JPS62260054A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10215386A JPS62260054A (ja) 1986-05-06 1986-05-06 化合物薄膜蒸着装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10215386A JPS62260054A (ja) 1986-05-06 1986-05-06 化合物薄膜蒸着装置

Publications (2)

Publication Number Publication Date
JPS62260054A true JPS62260054A (ja) 1987-11-12
JPH0510424B2 JPH0510424B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1993-02-09

Family

ID=14319786

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10215386A Granted JPS62260054A (ja) 1986-05-06 1986-05-06 化合物薄膜蒸着装置

Country Status (1)

Country Link
JP (1) JPS62260054A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006114241A (ja) * 2004-10-12 2006-04-27 Ulvac Japan Ltd 電子線発生装置、クラスターイオンビーム装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006114241A (ja) * 2004-10-12 2006-04-27 Ulvac Japan Ltd 電子線発生装置、クラスターイオンビーム装置

Also Published As

Publication number Publication date
JPH0510424B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1993-02-09

Similar Documents

Publication Publication Date Title
JPS63270458A (ja) 化合物薄膜形成装置
JPS62260054A (ja) 化合物薄膜蒸着装置
JPS61272367A (ja) 薄膜形成装置
JPS6329925A (ja) 化合物薄膜形成装置
JPH0510423B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
KR900008155B1 (ko) 박막형성방법 및 그 장치
JPS60262963A (ja) 化合物薄膜蒸着装置
JPS60262964A (ja) 化合物薄膜蒸着装置
JPH01139758A (ja) 薄膜蒸着方法および薄膜蒸着装置
JPH0535218B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JPH0449173Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JPH0735569B2 (ja) 薄膜形成装置
JPH05311407A (ja) 薄膜形成装置
JPH0541698B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JPH05179431A (ja) 薄膜形成装置
JPH03153865A (ja) 化合物薄膜形成装置
JPS63230868A (ja) 化合物薄膜形成方法
JPH0719746B2 (ja) 薄膜蒸着装置
JPS6311662A (ja) 化合物薄膜形成装置
JPS60158618A (ja) 薄膜蒸着装置
JPS60124923A (ja) 薄膜蒸着装置
JPH0774435B2 (ja) 薄膜形成装置
JPS62287617A (ja) 薄膜形成装置
JPH02102533A (ja) 半導体装置の製造方法
JPS63278218A (ja) 化合物薄膜形成装置