JPS62257455A - シ−ト状物のプラズマ処理および化学処理連続装置 - Google Patents
シ−ト状物のプラズマ処理および化学処理連続装置Info
- Publication number
- JPS62257455A JPS62257455A JP9935486A JP9935486A JPS62257455A JP S62257455 A JPS62257455 A JP S62257455A JP 9935486 A JP9935486 A JP 9935486A JP 9935486 A JP9935486 A JP 9935486A JP S62257455 A JPS62257455 A JP S62257455A
- Authority
- JP
- Japan
- Prior art keywords
- sheet
- chamber
- opening
- inlet
- airtightly
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000126 substance Substances 0.000 title claims description 25
- 239000000463 material Substances 0.000 claims description 150
- 238000012545 processing Methods 0.000 claims description 36
- 238000001035 drying Methods 0.000 claims description 32
- 238000012993 chemical processing Methods 0.000 claims description 22
- 238000012856 packing Methods 0.000 claims description 18
- 238000004804 winding Methods 0.000 claims description 16
- 238000009832 plasma treatment Methods 0.000 claims description 10
- 239000003795 chemical substances by application Substances 0.000 claims description 9
- 238000007789 sealing Methods 0.000 claims description 9
- 239000011261 inert gas Substances 0.000 claims description 7
- 239000007789 gas Substances 0.000 claims description 5
- 238000011144 upstream manufacturing Methods 0.000 claims description 4
- 230000000903 blocking effect Effects 0.000 claims description 3
- 230000002093 peripheral effect Effects 0.000 claims 1
- 238000003672 processing method Methods 0.000 claims 1
- 230000001105 regulatory effect Effects 0.000 claims 1
- 238000000034 method Methods 0.000 description 16
- 239000004744 fabric Substances 0.000 description 7
- 238000010438 heat treatment Methods 0.000 description 7
- 230000000694 effects Effects 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 229920003002 synthetic resin Polymers 0.000 description 3
- 239000000057 synthetic resin Substances 0.000 description 3
- 229920003051 synthetic elastomer Polymers 0.000 description 2
- 239000005061 synthetic rubber Substances 0.000 description 2
- 230000033228 biological regulation Effects 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000002542 deteriorative effect Effects 0.000 description 1
- 239000013013 elastic material Substances 0.000 description 1
- 229920001971 elastomer Polymers 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000000178 monomer Substances 0.000 description 1
- 239000002985 plastic film Substances 0.000 description 1
- 229920006255 plastic film Polymers 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 239000005060 rubber Substances 0.000 description 1
Landscapes
- Treatment Of Fiber Materials (AREA)
- Treatments Of Macromolecular Shaped Articles (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9935486A JPS62257455A (ja) | 1986-05-01 | 1986-05-01 | シ−ト状物のプラズマ処理および化学処理連続装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9935486A JPS62257455A (ja) | 1986-05-01 | 1986-05-01 | シ−ト状物のプラズマ処理および化学処理連続装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62257455A true JPS62257455A (ja) | 1987-11-10 |
| JPH0260685B2 JPH0260685B2 (enrdf_load_stackoverflow) | 1990-12-18 |
Family
ID=14245265
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9935486A Granted JPS62257455A (ja) | 1986-05-01 | 1986-05-01 | シ−ト状物のプラズマ処理および化学処理連続装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62257455A (enrdf_load_stackoverflow) |
-
1986
- 1986-05-01 JP JP9935486A patent/JPS62257455A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0260685B2 (enrdf_load_stackoverflow) | 1990-12-18 |
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