JPS6225684Y2 - - Google Patents
Info
- Publication number
- JPS6225684Y2 JPS6225684Y2 JP14774681U JP14774681U JPS6225684Y2 JP S6225684 Y2 JPS6225684 Y2 JP S6225684Y2 JP 14774681 U JP14774681 U JP 14774681U JP 14774681 U JP14774681 U JP 14774681U JP S6225684 Y2 JPS6225684 Y2 JP S6225684Y2
- Authority
- JP
- Japan
- Prior art keywords
- angular displacement
- light
- objective lens
- prism
- detection mechanism
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000006073 displacement reaction Methods 0.000 claims description 11
- 238000001514 detection method Methods 0.000 claims description 3
- 230000003287 optical effect Effects 0.000 description 8
- 238000010586 diagram Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 238000010276 construction Methods 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
Landscapes
- Length Measuring Devices By Optical Means (AREA)
- Optical Transform (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14774681U JPS5857708U (ja) | 1981-10-06 | 1981-10-06 | 角変位検出機構 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14774681U JPS5857708U (ja) | 1981-10-06 | 1981-10-06 | 角変位検出機構 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5857708U JPS5857708U (ja) | 1983-04-19 |
| JPS6225684Y2 true JPS6225684Y2 (OSRAM) | 1987-07-01 |
Family
ID=29940592
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14774681U Granted JPS5857708U (ja) | 1981-10-06 | 1981-10-06 | 角変位検出機構 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5857708U (OSRAM) |
-
1981
- 1981-10-06 JP JP14774681U patent/JPS5857708U/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5857708U (ja) | 1983-04-19 |
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