Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Keyence Corp
Original Assignee
Keyence Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Keyence CorpfiledCriticalKeyence Corp
Priority to JP9733886ApriorityCriticalpatent/JPS62254003A/ja
Publication of JPS62254003ApublicationCriticalpatent/JPS62254003A/ja
Publication of JPH0460526B2publicationCriticalpatent/JPH0460526B2/ja