JPS6225150U - - Google Patents
Info
- Publication number
- JPS6225150U JPS6225150U JP1985117748U JP11774885U JPS6225150U JP S6225150 U JPS6225150 U JP S6225150U JP 1985117748 U JP1985117748 U JP 1985117748U JP 11774885 U JP11774885 U JP 11774885U JP S6225150 U JPS6225150 U JP S6225150U
- Authority
- JP
- Japan
- Prior art keywords
- polishing
- workpiece
- polishing machine
- tank
- levitates
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005498 polishing Methods 0.000 claims description 9
- 239000007788 liquid Substances 0.000 claims description 2
- 238000004140 cleaning Methods 0.000 claims 1
- 235000012431 wafers Nutrition 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 239000000758 substrate Substances 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985117748U JPS6225150U (enrdf_load_stackoverflow) | 1985-07-31 | 1985-07-31 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985117748U JPS6225150U (enrdf_load_stackoverflow) | 1985-07-31 | 1985-07-31 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6225150U true JPS6225150U (enrdf_load_stackoverflow) | 1987-02-16 |
Family
ID=31003550
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1985117748U Pending JPS6225150U (enrdf_load_stackoverflow) | 1985-07-31 | 1985-07-31 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6225150U (enrdf_load_stackoverflow) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS54143993A (en) * | 1978-04-28 | 1979-11-09 | Nippon Telegr & Teleph Corp <Ntt> | Noncontact surface polisher |
| JPS5932350B2 (ja) * | 1980-12-17 | 1984-08-08 | 神鋼電機株式会社 | ブレ−キ制御装置 |
-
1985
- 1985-07-31 JP JP1985117748U patent/JPS6225150U/ja active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS54143993A (en) * | 1978-04-28 | 1979-11-09 | Nippon Telegr & Teleph Corp <Ntt> | Noncontact surface polisher |
| JPS5932350B2 (ja) * | 1980-12-17 | 1984-08-08 | 神鋼電機株式会社 | ブレ−キ制御装置 |
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