JPS6224927A - Table device - Google Patents

Table device

Info

Publication number
JPS6224927A
JPS6224927A JP16182585A JP16182585A JPS6224927A JP S6224927 A JPS6224927 A JP S6224927A JP 16182585 A JP16182585 A JP 16182585A JP 16182585 A JP16182585 A JP 16182585A JP S6224927 A JPS6224927 A JP S6224927A
Authority
JP
Japan
Prior art keywords
guides
linear motor
stator
guide
mover
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP16182585A
Other languages
Japanese (ja)
Inventor
Isao Kobayashi
功 小林
Hirotake Hirai
洋武 平井
Takashi Yamaguchi
高司 山口
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP16182585A priority Critical patent/JPS6224927A/en
Publication of JPS6224927A publication Critical patent/JPS6224927A/en
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K41/00—Propulsion systems in which a rigid body is moved along a path due to dynamo-electric interaction between the body and a magnetic field travelling along the path
    • H02K41/02—Linear motors; Sectional motors
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
    • B23Q1/25—Movable or adjustable work or tool supports
    • B23Q1/44—Movable or adjustable work or tool supports using particular mechanisms
    • B23Q1/56—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs only, the sliding pairs being the first two elements of the mechanism
    • B23Q1/60—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs only, the sliding pairs being the first two elements of the mechanism two sliding pairs only, the sliding pairs being the first two elements of the mechanism
    • B23Q1/62—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs only, the sliding pairs being the first two elements of the mechanism two sliding pairs only, the sliding pairs being the first two elements of the mechanism with perpendicular axes, e.g. cross-slides
    • B23Q1/621—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs only, the sliding pairs being the first two elements of the mechanism two sliding pairs only, the sliding pairs being the first two elements of the mechanism with perpendicular axes, e.g. cross-slides a single sliding pair followed perpendicularly by a single sliding pair
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K41/00—Propulsion systems in which a rigid body is moved along a path due to dynamo-electric interaction between the body and a magnetic field travelling along the path
    • H02K41/02—Linear motors; Sectional motors
    • H02K41/03—Synchronous motors; Motors moving step by step; Reluctance motors

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Electromagnetism (AREA)
  • Power Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Machine Tool Units (AREA)

Abstract

PURPOSE:To enable a guide to be prevented from decreasing its straightness due to heat generation of a linear motor, by arranging the X-direction linear motor extending over two moving units on Y-guides while a Y-mover, being a constitutional element of the Y-direction linear motor, between the Y-guides. CONSTITUTION:A device, providing an X-stator 8A of an X-direction linear motor 8 extending over both moving units 3 between X-guides 5, 5, provides an X-mover 9, mounted to a table 6 through an intermediate member 10, to be arranged in said stator 8A, and the table 6 is driven in a direction X by the X-direction linear motor 8. While the device, mounting a Y-mover 12 of a Y-direction linear motor 13 to the bottom surface central part of the X-stator 8 through an intermediate member 11 and providing a Y-stator 13A between both Y-guides 2 on a fixed part 1,drives the table 6 in a direction Y through X-guides 7. In this way, the device obtains a table motion of high straightness with no decrease of straightness of the X-guides 5 even if the moving unit 3 is a little thermally deformed by heat generation of the movers 9, 12.

Description

【発明の詳細な説明】 〔産業上の利用分野〕 本発明はテーブル装置に係り、特に真直度の高いテーブ
ル運動を実現するに好適なテーブル装置に関する。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a table device, and particularly to a table device suitable for realizing highly straight table motion.

〔従来の技術〕[Conventional technology]

リニアモータによりテーブルを駆動する装置において、
リニアモータの発熱によるテーブル装置の精度劣化を防
ぐ方法としては、たとえば特開昭５８−１２２７２８号
公報に示されるように冷却媒体により冷却されるリニア
ステップモータをテーブル装置の外部に設けた構造のも
のが知られている。In a device that drives a table using a linear motor,
As a method for preventing precision deterioration of the table device due to heat generated by the linear motor, for example, as shown in Japanese Patent Laid-Open No. 58-122728, a linear step motor cooled by a cooling medium is provided outside the table device. It has been known.

〔発明が解決しようとする問題点〕[Problem that the invention seeks to solve]

上記従来例ではテーブル装置の外部にリニアステップモ
ータを設け、連接棒によりテーブルを駆動するためにテ
ーブル装置が大形化し、小形のテーブル装置には不向き
であった。In the conventional example described above, a linear step motor is provided outside the table device and the table is driven by a connecting rod, which increases the size of the table device, making it unsuitable for small-sized table devices.

本発明は、熱変形による精度劣化の少ない小形、軽量な
テーブル装置を提供することを目的とする。SUMMARY OF THE INVENTION An object of the present invention is to provide a small and lightweight table device with less deterioration in accuracy due to thermal deformation.

Ｃ問題点を解決するための手段〕 上記本発明の目的は、テーブルを案内する２本のＸガイ
ド及びテーブルをＸ方向に駆動するＸ方向リニアモータ
を、Ｙガイド上の２個の可動体にまたがって設け、Ｘガ
イドと直交するＹ方向に駆動するＹ方向リニアモータの
構成要素であるＹ可動子Ｙガイド間に配置することによ
り達成される。Means for Solving Problem C] The object of the present invention is to connect the two X guides that guide the table and the X direction linear motor that drives the table in the X direction to two movable bodies on the Y guide. This is achieved by arranging a Y movable element, which is a component of a Y-direction linear motor that spans the Y-direction and drives in the Y-direction perpendicular to the X-guide, between the Y-guides.

〔作用〕[Effect]

リニアモータが発熱しても、二の熱はＸガイドに影響を
与えないので、Ｘガイドの真直度は低下しない。このた
め、真直度の高いテーブル運動を実現することができる
。Even if the linear motor generates heat, the heat does not affect the X guide, so the straightness of the X guide does not deteriorate. Therefore, table motion with high straightness can be realized.

〔実施例〕〔Example〕

以下、本発明の実施例を図面によって説明する、。 Hereinafter, embodiments of the present invention will be described with reference to the drawings.

第１図は本発明のテーブル装置の一実施例を示すもので
、この図において１は固定部、２は固定部１上に平行に
設けられた２本のＹガ・ｒド、３は各々のＹガイド２上
に設けられ、各々のＹガイドにより案内される可動体で
ある。Ｙガ、イド２と可動体３の間には、保持器４内に
銅められた針状ころ４Ａが複数個設けられている。２個
のＸガイド５が２個の可動体３にまたがり、Ｙガイド２
と直交する方向に平行に設けられている。２個のＸガイ
ド５の上にはＸガイド５により案内されるテーブル６が
設けられている。、Ｘガイド５とテーブル６の間には保
持器７内に納められた針状ころ７Ａが複数個設けられて
いる。以後Ｙガイド２に平行な方向をＹ方向、Ｘガイド
５に平行な方向をＸ方向と呼ぶことにする。２個のＸガ
イド５の間にはＸ方向リニアモータ８のＸ固定子８Ａが
２個の可動体３にまたがって設けられている。そのＸ固
定子８Ａ内にはＸ可動子９が備えられる。Ｘ可動子９は
、中間部材１０を介してテーブル６に取り付けられる。FIG. 1 shows an embodiment of the table device of the present invention. In this figure, 1 is a fixed part, 2 is two Y/R guides provided in parallel on the fixed part 1, and 3 is each It is a movable body that is provided on the Y guide 2 of , and is guided by each Y guide. A plurality of copper-plated needle rollers 4A are provided in a cage 4 between the Y guide, the idler 2, and the movable body 3. Two X guides 5 span two movable bodies 3, and a Y guide 2
It is provided parallel to the direction orthogonal to the A table 6 guided by the two X guides 5 is provided above the two X guides 5. A plurality of needle rollers 7A housed in a cage 7 are provided between the X guide 5 and the table 6. Hereinafter, the direction parallel to the Y guide 2 will be referred to as the Y direction, and the direction parallel to the X guide 5 will be referred to as the X direction. An X stator 8A of an X-direction linear motor 8 is provided between the two X guides 5, spanning the two movable bodies 3. An X movable element 9 is provided within the X stator 8A. The X mover 9 is attached to the table 6 via an intermediate member 10.

テーブル６は、Ｘ固定子８Ａ及びＸ可動子９により構成
されるＹ方向リニアモータ８によりＸ方向に駆動される
。Ｘ固定子８の下面中央部付近には中間部材１１を介し
てＹ方向リニアモータ１３のＹ可動子１２が取り付けら
れている。The table 6 is driven in the X direction by a Y direction linear motor 8 constituted by an X stator 8A and an X movable element 9. A Y movable element 12 of a Y-direction linear motor 13 is attached near the center of the lower surface of the X stator 8 via an intermediate member 11.

固定部１上には２本のＹガイド２の間にＹ方向リニアモ
ータ１３のＹ固定子１３Ａが設けられている。Ｙ可動子
１２及びＹ固定子１３Ａにより構成されるＹ方向リニア
モータ１３によりＸガイド７を介してテーブル６がＹ方
向に駆動される。A Y stator 13A of a Y-direction linear motor 13 is provided on the fixed part 1 between two Y guides 2. The table 6 is driven in the Y direction via the X guide 7 by a Y direction linear motor 13 constituted by a Y movable element 12 and a Y stator 13A.

第２図は第１図に示す本発明の装置の一実施例における
リニアモータから発生する熱の伝達経路を示すものであ
る６図中、破線が熱の伝達経路を示す。Ｘ可動子９及び
Ｙ可動子１２より発生した熱は、Ｘ固定子８Ａを介して
２個の可動体３に伝えられる。従って、Ｘ可動子９及び
Ｙ可動子１２の発熱により可動体３が若干の熱変形を起
こしても、Ｘガイド５の真直度は低下しないため、真直
度の高いテーブル運動を実現することができる。FIG. 2 shows the heat transfer path generated from the linear motor in one embodiment of the apparatus of the present invention shown in FIG. 1. In FIG. 6, the broken line indicates the heat transfer path. Heat generated by the X movable element 9 and the Y movable element 12 is transmitted to the two movable bodies 3 via the X stator 8A. Therefore, even if the movable body 3 undergoes slight thermal deformation due to the heat generated by the X mover 9 and the Y mover 12, the straightness of the X guide 5 will not decrease, making it possible to achieve highly straight table motion. .

第３図は本発明の装置の他の実施例を示すもので、第１
図と同一部分は同一符号で示す。第１図と異なる点は、
リニアモータの設置方法を変え。FIG. 3 shows another embodiment of the device of the present invention.
The same parts as in the figure are indicated by the same reference numerals. The difference from Figure 1 is that
Changed the method of installing the linear motor.

テーブル６にＸ可動子９を直接取り付け、Ｘ固定子８Ａ
にＹ可動子１２を直接取り付けたことにある。Directly attach the X mover 9 to the table 6, and the X stator 8A
This is because the Y mover 12 is directly attached to the.

このように構成することによって、上述した実施例と同
様にテーブルの熱変形を防ぐことができると共に、テー
ブル装置の軽量化を計ることが可能である。With this configuration, it is possible to prevent thermal deformation of the table as in the above-described embodiment, and it is also possible to reduce the weight of the table device.

〔発明の効果〕〔Effect of the invention〕

本発明によれば、リニアモータの発熱によるガイドの０
Ａ度の低下を防ぐことができるので、真直度の高いテー
ブル運動を実現することができる。According to the present invention, the guide becomes zero due to the heat generated by the linear motor.
Since a decrease in the A degree can be prevented, highly straight table motion can be realized.

【図面の簡単な説明】[Brief explanation of the drawing]

第１図は本発明のテーブル装置の一実施例を一部断面に
て示す斜視図、第２図はその実施例における熱の伝達経
路を説明する平面図、第３図は本発明の装置の他の実施
例を一部断面にて示す斜視図である。 １・・・固定部、２・・・Ｙガイド、３・・・可動体、
４・・・保持器、５・・・Ｘガイド、６・・・テーブル
、７・・・保持器、８・・・Ｘ方向リニアモータ、８Ａ
・・・Ｘ固定子、９・・・Ｘ可動子、１０・・・中間部
材、１１・・・中間部材、１２・・Ｙ方向リニアモータ
、１２Ａ・・Ｙ可動子、１３・・Ｙ固定子。 ロー−“＼＼ 代理人　弁理士　小川勝男１　　゛ 嘉　１　図 第　Ｚ　口FIG. 1 is a partially cross-sectional perspective view of an embodiment of the table device of the present invention, FIG. 2 is a plan view illustrating the heat transfer path in the embodiment, and FIG. 3 is a diagram of the device of the present invention. FIG. 7 is a perspective view partially showing another embodiment in cross section. 1... fixed part, 2... Y guide, 3... movable body,
4...Cage, 5...X guide, 6...Table, 7...Cage, 8...X direction linear motor, 8A
...X stator, 9...X mover, 10... intermediate member, 11... intermediate member, 12... Y direction linear motor, 12A... Y mover, 13... Y stator . Law “＼＼ Agent Patent Attorney Katsuo Ogawa 1 ゛Ka 1 Diagram Z Mouth

Claims (1)

【特許請求の範囲】[Claims] １、テーブルを直交２方向に移動させるテーブル装置に
おいて、固定部と、前記固定部上に平行に配置された２
本のＹガイドと、前記各Ｙガイド上に１個ずつ配置され
各々の前記Ｙガイドにより案内される２個の可動体と、
前記２個の可動体にまたがり前記Ｙガイドと直交する方
向に平行に配置された２本のＸガイドと、前記２本のＸ
ガイド上に配置されたテーブルと、互いに直交して連結
され、Ｙガイド間に配置したＹ方向のリニアモータとＸ
ガイド間に配置したＸ方向のリニアモータとを備えたこ
とを特徴とするテーブル装置。1. In a table device that moves a table in two orthogonal directions, a fixed part and two parts arranged parallel to each other on the fixed part are provided.
a Y guide for a book; two movable bodies arranged one on each of the Y guides and guided by each of the Y guides;
two X guides that span the two movable bodies and are arranged in parallel in a direction orthogonal to the Y guide;
A table placed on a guide, a Y-direction linear motor connected orthogonally to each other and placed between the Y guides, and an
A table device comprising: a linear motor in the X direction disposed between the guides.
JP16182585A 1985-07-24 1985-07-24 Table device Pending JPS6224927A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16182585A JPS6224927A (en) 1985-07-24 1985-07-24 Table device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16182585A JPS6224927A (en) 1985-07-24 1985-07-24 Table device

Publications (1)

Publication Number Publication Date
JPS6224927A true JPS6224927A (en) 1987-02-02

Family

ID=15742625

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16182585A Pending JPS6224927A (en) 1985-07-24 1985-07-24 Table device

Country Status (1)

Country Link
JP (1) JPS6224927A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5048318A (en) * 1989-09-18 1991-09-17 L. Schuler Gmbh Intermediate depositing station between machining stages of a press
US5875673A (en) * 1997-12-30 1999-03-02 Verson, A Division Of Allied Products Corporation Orientation station for multi-station metal-forming machines

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5048318A (en) * 1989-09-18 1991-09-17 L. Schuler Gmbh Intermediate depositing station between machining stages of a press
US5875673A (en) * 1997-12-30 1999-03-02 Verson, A Division Of Allied Products Corporation Orientation station for multi-station metal-forming machines

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