JP2527219Y2 - Linear motion rolling guide unit - Google Patents

Description

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an improvement of a linear motion rolling guide unit for linear reciprocating motion used in a semiconductor manufacturing apparatus, office electronic equipment, a reader thereof, and the like.

2. Description of the Related Art The linear motion rolling guide unit used in the above-described applications has a large load capacity, can support a complex load, and requires smooth, high-precision, high-speed reciprocating motion.
As shown in FIG. 4, the track rail A and the casing B are interposed between the track grooves C and D on both sides of the track rail A and the track groove E on the casing B opposite thereto. As shown in FIG. 5, the track rails G and H are fixed to the bed I in parallel with the structure slidably assembled via the moving body F as a unit, and at least each of the track rails G and H is One or more, in the example shown, four casings J, K, L are assembled, and a structure is adopted in which the above-mentioned semiconductor manufacturing equipment, office electronic equipment, etc. are mounted on a sliding table fixed to these casings. ing.

In this conventional linear motion rolling guide unit, since the casing B or J, K, L, etc. straddling the track rail A or G, H has no degree of freedom of displacement in the double arrow M direction, the track rail G , H requires extremely high parallelism, which not only makes parallel installation difficult, but also
If the error of the parallelism of the track rails G and H increases due to the influence of heat and other factors, the sliding resistance of the casings J, K and L will change,
There is a problem that non-smooth sliding occurs.

In view of the problems involved in the above-described conventional linear motion rolling guide unit using two parallel track rails, the present invention reduces the parallelism of the two track rails by about several tens of microns. Even if there is an error of, or even during use, an error of such a degree of parallelism occurs, the casing straddling one of the track rails is displaced in a direction orthogonal to the track rail, and the error is reduced. It is an object of the present invention to provide a linear motion rolling guide unit which absorbs and eliminates, always ensures smooth sliding, has a simple structure capable of sufficiently receiving at least a vertically downward load, and can be supplied relatively inexpensively. .

Means for Solving the Problems In order to solve the problems, the present invention is directed to two sets of linear motion rolling guide units which carry a sliding table and are arranged in parallel, one of which is provided on both side walls. A track rail having a track groove formed therein, a casing forming a track groove opposed to the track groove, slidably extending over the track rail, and a rolling element interposed between the track grooves. Consisting of
The other is a track rail formed with a diagonally upward outward circular arc-shaped track groove formed at a ridge edge where the top wall and both side walls intersect, and a circular arc-shaped track groove opposed to the track groove. And a casing that slides freely over the track rail and a rolling element ball interposed between the track grooves.

In the present invention, one of the two sets of linear motion rolling guide units is formed with a circular arc-shaped orbit in a diagonally upward outward direction formed at a ridge portion where the top wall and both side walls intersect. A track rail, a casing forming a circular arc-shaped track groove opposed to the track groove, slidably extending over the track rail, and a ball of a rolling element interposed between the track grooves. Therefore, even if there is an error of about several tens of microns in the parallelism between the two track rails, the ball moves in the circular arc-shaped track groove in a direction perpendicular to the track groove. Thereby, the error can be absorbed and eliminated, and the fluctuation of the sliding resistance and the smooth sliding do not occur.

Embodiment FIG. 1 shows an example of an embodiment of two sets of linear motion rolling guide units which are arranged in parallel while carrying a sliding table 33. Two track rails 1 and 2 are mounted on a base 3. Are fixed in parallel to each other, and the casing 4 straddling one of the track rails 1 is provided with two side walls 5, 6 of the track rail 1.
Gothic arch-shaped raceway grooves 7, 8 formed in the
Examples of rolling elements 13 and 14 serving as balls interposed between the raceway grooves 7 and 8 and the raceway grooves 11 and 12 having a Gothic arch shape formed on the inner side walls 9 and 10 of the casing 4. It is slidably assembled via

FIG. 2 is an enlarged sectional view showing a contact state between a gothic arch-shaped raceway groove 8 on the track rail 1 side, a gothic arch-shaped raceway groove 12 on the casing 4 side, and a rolling element 14 as a ball. The raceway grooves 8, 12 and the rolling elements 14 are at points N, O,
Contact is made at four points P and Q in a preload state.
It carries loads in the S, T, and U directions and loads due to rotational moments in the double arrow U direction.

Accordingly, the casing 4 is
The displacement in the direction perpendicular to the length direction is set to zero.

Casing straddled on the other track rail 2
Reference numeral 15 denotes a diagonally upward outward circular arc-shaped track groove 19, 20 formed at a ridge edge where the top wall 16 and both side walls 17, 18 of the track rail 2 intersect, and the track groove 19, 20 Opposite,
It is slidably mounted via rows of balls 23 and 24 of rolling elements interposed between circular arc-shaped orbit grooves 21 and 22 formed at the inner corners of the casing 15.

FIG. 3 is an enlarged cross-sectional view showing a contact state between the circular arc-shaped raceway groove 20 of the track rail 2, the circular arc-shaped raceway groove 22 of the casing 15, and the ball 24. And the ball 24 contact at two points W and X, and carry a mainly downward load indicated by arrows Y and Z.

Therefore, the casing 15 is
The ball 24 can be displaced in the transverse direction perpendicular to the length direction along the circular arc-shaped raceway grooves 20 and 22 within a range in which the ball 24 is allowed to slightly roll.

In FIG. 1, reference numerals 25, 26, 27 and 28 denote return paths of rows of rolling elements 13 and 14 and rows of balls 23 and 24 of rolling elements.
Reference numerals 30, 31, and 32 denote direction changing paths of the rolling elements 13 and 14 rows and balls 23 and 24 rows of the rolling elements, reference numeral 33 denotes a sliding table, and reference numeral 34 denotes a fixing bolt hole of the sliding table 33.

The rolling elements 13, 14, 23, 24 interposed between the two raceway grooves 7, 11, 8, 12, 19, 21, 20, 22 respectively include the direction change paths 29, 30, 31. , 32 and the return paths 25, 26, 27, 28 infinitely circulate, and the sliding table 33 carried on the casings 4, 15 slides freely along the track rails 1, 2.

In the case of the illustrated embodiment, assuming that an error of about several tens of microns or a displacement during work occurs in the parallelism of the track rail 2 with respect to the track rail 1, the casing 4 is orthogonal to the longitudinal direction of the track rail 1 as described above. Although the displacement in the direction of the double arrow M is zero, the track rail 2 and the casing 15
Since the track rails 2 and the casing 15 can be relatively displaced in the double arrow M direction because of the relative slight displacement by the rows 9, 20, 21, 22 and the rows of balls 23, 24, the track rails 2 and Since the error in the parallelism between the track rails 1 and 2 is absorbed and eliminated, fluctuations in the sliding resistance of the sliding table 33 and non-smooth sliding can be prevented. 1 and 2 parallel installation work becomes easy.

Effects The present invention has the above-described configuration and operation,
Even if there is an error of about several tens of microns in the parallelism between the two track rails, the track rail formed by the circular arc-shaped raceway groove between the track rail and the casing and the ball rolling on the raceway groove can be used. Due to the relative displacement between the casing and the casing, the error can be absorbed and eliminated while maintaining the accuracy.
It is possible to prevent the occurrence of non-smooth sliding or the like, and it is possible to always achieve smooth sliding.

As a result, there is also an effect that it is possible to ease the difficulty of the work of installing the two track rails in parallel.

In terms of structure, a circular arc-shaped raceway groove may be provided in one of the track rails and the casing straddling the track rail, so that the structure is relatively simple and the cost can be reduced.

[Brief description of the drawings]

FIG. 1 is an enlarged longitudinal sectional view of an example of the embodiment, FIG. 2 is an enlarged sectional view of a gothic arch-shaped orbital groove portion, FIG. 3 is an enlarged sectional view of a circular arc-shaped orbital groove portion, and FIG. And FIG. 5 is a perspective view showing an example of the use of the linear motion rolling guide unit. 1,2: track rail, 4: casing, 5,6: side wall, 7,8,1
1,12: raceway groove, 13,14: rolling element, 15: casing, 16: top wall, 17,18: side wall, 19, 20, 21, 22: raceway groove, 23, 24: ball.

Claims (1)

(57) [Scope of request for utility model registration] 1. Two sets of linear motion rolling guide units, which carry a sliding table and are arranged in parallel, comprising: a track rail having track grooves formed on both side walls; And a rolling member interposed between the track grooves and a rolling member interposed between the track grooves, and the other has a top wall and side walls. A track rail formed with a diagonally upward circular arc-shaped track groove formed at an intersecting ridge, and a circular arc-shaped track groove opposed to the track groove are formed, and can be laid over the track rail. A linear motion rolling guide unit comprising: a casing that slides in a direction; and a ball of a rolling element interposed between the raceway grooves.