JPS624538A - Table device - Google Patents

Abstract

PURPOSE:To prevent accuracy from deteriorating due to thermal deformation of a table device, by coupling a linear motor, moving member and a table through transmission route parts of heat generated from the linear motor. CONSTITUTION:A device, generating heat from a mover 11 in the second linear motor 10 and emitting a part of the heat to be radiated into the air by a connecting member 12, transmits the rest of the heat to a table through the connecting member 12 as shown by a route 101 in the drawing while to a moving member through a stator 10A as shown by a route 102. During this time, the device, radiating the heat, decreases a transmission quantity of heat to the moving member and the table to a small value. While the device, generating heat by a mover 14A in the first linear motor 14 and radiating a part of the heat into the air from a connecting member 13, transmits the rest of the heat to the moving member through the connecting member 13 and the stator 10A of the second linear motor 10 as shown by a route 103 while to a fixed part through a stator 15 as shown by a route 104 in the drawing.

Description

DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a table device, and particularly to a table device suitable for precise positioning.

[Conventional technology]

In a table device that drives a table by a linear motor, in order to prevent precision deterioration of the table device due to heat generation of the linear motor, for example,
As shown in Japanese Patent No. 8, a structure in which a linear step motor cooled by a cooling medium is provided outside the table device is known.

[Problems to be Solved by the Invention] In the conventional example described above, a 1J near step motor is provided outside the table device, and the driving force of this linear step motor is transmitted to the table by a connecting rod to drive the table. The device became large, making it unsuitable for small table devices.

Ren Wan Shuobo T Sentinel The present invention is small in size with less deterioration in precision due to thermal deformation.

The purpose is to provide a lightweight table device.

[Means for solving problems]

The above object is to provide a moving member capable of linear movement on a fixed part, provide a table that moves linearly in a direction orthogonal to this moving member, and provide a space between the fixed part and the moving member and between the moving member and the table. In the table device provided with first and second linear motors that respectively provide driving force, the linear motors, the moving member, and the table are connected via a heat transfer path section for heat generated from the linear motors.

[Effect]

The heat generated from the linear motor is transmitted to the fixed part, the moving member, and the table through the heat transfer path, and during the heat transfer process, the heat is radiated by the heat transfer path to suppress the thermal expansion of each component mentioned above. I can do it.

〔Example〕

Embodiments of the present invention will be described below with reference to the drawings.

FIG. 1 shows an embodiment of the table device of the present invention. In this figure, 1 is a fixed part, 2 is a movable member provided on the fixed part 1 so as to be movable in a straight line, and 3 is a movable member on the movable member 2. The table is provided so as to be movable in a straight line in a direction perpendicular to the direction of movement. Hereinafter, the moving direction of the moving member 2 will be the Y direction,
The direction of movement of the table 3 will be referred to as the X direction. The fixed part 1 includes two guide parts 4 along the Y direction. Needle rollers 5 are provided along the upper surface 4A and inner surface 4B of this guide portion 4.
A retainer 5 is provided, and the lower surface of the movable member 2 is provided with guide surfaces 6A and 6B to be guided by it.6 The upper surface of the movable member 2 is provided with two guide portions 7 along the X direction. is provided.

A retainer 8 having needle rollers 8A is provided along the upper surface 7A and inner surface 7B of the guide portion 7, and guide surfaces 9A and 9B guided by the retainer 8 are provided on the lower surface of the table 3. On both sides of the moving member 2, there are X-axis stators 10A that constitute a second linear motor 10 that drives the table 3.
is provided along the X direction, and an X-axis movable element 11 constituting a second linear motor 10 that drives the table 3 is provided in the X-axis stator 10A. This X-axis mover 11
is connected to the table 3 by a connecting member 12 that constitutes a heat transfer path section. As a result, the table 3 is driven in the X direction by the X-axis mover 11 via the connecting member 12. Connecting members 13 constituting heat transfer paths are attached to both ends of the two sets of X-axis stators 10A, respectively. At the center of each of the connecting members 13, a Y-axis movable member 14A, which constitutes a first linear motor 14 that drives each moving member 2, is provided. The Y-axis movable element 14A is provided within a Y-axis stator 15 that constitutes a linear motor 14 that drives the moving member 2. The Y-axis stator 15 is connected to the support column 16 on the fixed part 1
Therefore, it is provided at the same height as the X-axis stator 10A.

As shown in FIG. 2, the aforementioned moving member 2 is connected to the X-axis stator 10A of the second linear motor 10 by a connecting member 17 that constitutes a heat transfer path.

Next, the operation of one embodiment of the table device of the present invention described above will be explained.

In Figure 3, which shows the heat transfer path generated from the first and second linear motors 10 and 14, the broken line indicates the heat transfer path, and the X-axis mover in the first linear motor 10 A part of the heat generated by the X-axis stator 11 is transmitted to the table 3 via the connecting member 12, and the other heat is transmitted to the moving member 2 via the X-axis stator 10A and the connecting member 17. This moving member 2. The heat transferred to the table 3 is transferred to the connecting member 1
Since heat is radiated through the heat transfer path consisting of 2.17,
It becomes small. Moreover, Y of the first linear motor 14
The heat generated by the shaft mover 14A is transferred to the connecting member 13. Second
to the moving member 2 via the connecting member 17 of the X-axis stator 10A of the linear motor 10.

Further, the Y-axis stator 15 of the second linear motor 10 is transmitted to the fixed part 1 via the support column 16. This moving member 2
The heat transferred to the connecting member 13 is radiated by the heat transfer path formed by the connecting member 13, so that the heat is small. Therefore, table 3. Thermal expansion of members such as the moving member 2 is reduced, and accuracy deterioration can be reduced.

In addition, in the above-mentioned embodiment, the first linear motor 1
4. Although the second linear motor 10 was designed to generate approximately the same amount of heat, depending on how the table device is used, the first linear motor 14. The amount of heat generated by the second linear motor 10 may differ. In this case, the connecting member 12
Alternatively, it is also possible to omit the connecting member 13.

FIG. 4 shows another embodiment of the table device of the present invention. In this figure, the same reference numerals as in FIG. 1 indicate the same parts. This embodiment differs from the embodiment shown in FIG. 1. This is because the movable member 14A of the first linear motor 14 for driving the moving member 2 is provided between the fixed part 1 and the moving member 2 so that the moving surface thereof is vertical.

With this configuration, the heat generated from the linear motors 10 and 14 can be efficiently dissipated similarly to the embodiment shown in FIG. Furthermore, it is possible to downsize the table device.

FIG. 5 shows still another embodiment of the table device of the present invention, and in this figure, the same reference numerals as in FIG. 1 indicate the same or corresponding parts.

In this embodiment, one first linear motor 14 that drives the moving member 2 is arranged at the center in the X direction on the fixed part 1, and one second linear motor 10 that drives the table 2 is arranged.
is arranged at the center of the moving member 2 in the Y direction, the movable element 14A of the first linear motor 14 is connected to the lower surface of the moving member 2 via the connecting member 13, and the second linear motor 1 is connected to the lower surface of the moving member 2 via the connecting member 13.
0 mover 10A is connected to the table 3 via the connecting member 12.
It is connected to the bottom surface of. Furthermore, the connecting members 1°2°13 are provided with radiation fins 12A and 13A, respectively. The radiation fins 12A and 13A may be omitted depending on the amount of heat generated.

Next, the operation of yet another embodiment of the table device of the present invention described above will be described.

First linear motor 14 and second linear motor 10
A part of the heat generated from the mover 11 of the second linear motor 10 is dissipated into the air by the connecting member 12, and the remaining heat is dissipated into the air by the second linear motor 10. The signal is transmitted to the table 3 through the connecting member 12 as shown by a path 101 in FIG. 6, and is transmitted to the moving member 2 through the stator 10A as shown by a path 102. Since the heat is dissipated during this time, the amount of heat transferred to the moving member 2 and the table 3 is small. Further, a portion of the heat generated by the movable element 14A of the first linear motor 14 is transferred from the connecting member 13 to the air.

The remaining heat is transmitted to the moving member 2 through the connecting member 13 and the stator 10A of the second linear motor 10 as shown in the path 103 in FIG. As shown, it is transmitted to the fixed part 1 through the stator 15. Therefore, it is transmitted to the moving member 2 and the fixed part 1. Therefore, the amount of heat transmitted to the moving member 2 and the fixed part 1 is small. As a result, the thermal expansion of members such as the table 3° moving member 2 is reduced, and the resulting deterioration in precision can be reduced.

Note that the radiation fins 12A provided in the above embodiment,
Of course, 13A can also be applied to the embodiments shown in FIGS. 1 and 4.

〔Effect of the invention〕

According to the present invention, deterioration in accuracy due to thermal deformation of the table device can be reduced, so that precise positioning can be performed and the table device can be downsized.

[Brief explanation of drawings]

Fig. 1 is a perspective view showing an embodiment of the table device of the present invention, Fig. 2 is a sectional view taken along the line ■-■ in Fig. 1, and Fig. 3 is a plan view illustrating the heat transfer path in the embodiment. , FIG. 4 is a perspective view showing another embodiment of the table device of the present invention, FIG. 5 is a perspective view showing still another embodiment of the table device of the present invention, and FIG. 6 explains the heat transfer path thereof. FIG. DESCRIPTION OF SYMBOLS 1... Fixed part, 2... Moving member, 3... Table, 4... Guide part, 5... Holder, 6... Guide surface,
7...Information department. 8... Cage, 9... Guide surface, 10... Second linear motor, IOA... Its mover, 11... Its stator. 12.13... Connecting member, 14... First linear motor, 14A... Its mover, 15... Its stator, trench I picture

Claims (1)

[Claims] 1. A moving member that moves linearly is provided on the fixed part, and a table that moves linearly in a direction perpendicular to the moving member is provided,
In the table device, the linear motor, the moving member, and the table are connected to each other by the linear motor. A table device characterized in that the table devices are connected via a heat transfer path portion for heat generated from the two. 2. In the table device according to claim 1, the heat transfer path portion between the mover of the first linear motor and the stator of the second linear motor is constituted by a connecting member that connects them. A table device characterized by: 3. In the table device according to claim 1 or 2, the heat transfer path section between the movable element of the second linear motor and the table is constituted by a connecting member that connects them. Features table equipment. 4. In the table device according to claim 2 or 3, the heat transfer path section between the second linear motor stator and the moving member is configured with a connecting member that connects them. Features table equipment.