JP5436809B2 - Linear motor - Google Patents

Description

  The present invention relates to a linear motor used for a drive unit or the like of a stage device.

Conventionally, there exists Unexamined-Japanese-Patent No. 2003-88088 as a technique of such a field | area. The linear motor described in this publication is incorporated in an electron beam drawing system for drawing a circuit pattern on the surface of a semiconductor element, for example, and adjusts the position of the semiconductor element with respect to an electron gun that irradiates the electron beam Is driven. The linear motor is fixed to the base of the stage apparatus, and includes a first side wall part and a second side wall part facing each other, and a coupling part that connects the first side wall part and the second side wall part. A U-shaped yoke, a row of first permanent magnet groups fixed to the inner surface of the first side wall portion, and an inner surface of the second side wall portion so as to face the first permanent magnet group A row of second permanent magnet groups, a coil unit disposed between the first permanent magnet group and the second permanent magnet group and coupled to a stage moving on the base; and around the yoke And a shield body for preventing magnetic flux generated from the first and second permanent magnet groups and the coil unit from leaking to the outside. The base of the stage apparatus to which the yoke is fixed has a U-shaped cross section opened upward, and the U-shaped yoke has a corner portion of the first side wall portion protruding into a corner portion inside the base. It is fixed to the base in the applied state.
JP 2003-88088 A

  By the way, in the first permanent magnet group and the second permanent magnet group provided in the above-described conventional linear motor, N poles and S poles are alternately arranged. Further, the first permanent magnet group and the second permanent magnet group are arranged so that the N pole and the S pole of the permanent magnet face each other. And attraction force arises between the 1st permanent magnet group and the 2nd permanent magnet group, and by this attraction force, stress is applied in the direction in which the 1st side wall part and the 2nd side wall part fall inward, respectively. receive. Then, the corner of the first side wall is abutted against the inner corner of the base, and the positioning of the yoke with respect to the base is compared with the amount of collapse deformation of the first side wall abutted against the base. As a result, the amount of deformation of the collapse of the second side wall portion increases, so that the symmetry between the first permanent magnet group and the second permanent magnet group centering on the coil unit is lost. If the symmetry between the first permanent magnet group and the second permanent magnet group centered on the coil unit is lost, the error between the design moving direction of the coil unit and the direction of the Lorentz force acting on the coil unit becomes large. Therefore, there has been a problem that smooth movement of the coil unit is hindered and the reliability of the linear motor is lowered.

  An object of the present invention is to provide a linear motor that is designed to improve reliability.

The linear motor of the present invention includes a row of first magnet groups and a row of second magnets arranged so as to be opposed to the first magnet group and so that magnetic poles different from those of the first magnet group are opposed to each other. A group, a yoke that supports the first magnet group and the second magnet group and is fixed to the structure, and a coil disposed between the first magnet group and the second magnet group, in the linear motor having a yoke is Rutotomoni are first magnet group on one side is fixed, and the first side yoke and the other side faces the structure, the second magnet group on one side fixed And a base yoke to which the first side yoke and the second side yoke are fixed. The base yoke protrudes in the opposing direction of the first and second magnet groups. Do Protrusions for Me-decided is provided, the distal end surface of the protruding portion protrudes from the other side of the first side yoke, by which the front end surface is brought into contact with the structure, yoke of the first and second Positioning is performed in the facing direction of the magnet group .

According to the linear motor of the present invention, for example, when the yoke is positioned and fixed to the yoke housing portion (structure) of the stage device, the base yoke and the tip end surface of the protruding portion abut against the wall surface of the yoke housing portion. The side yoke and the second side yoke can be brought into a non-contact state with respect to the yoke housing portion. As a result, even if the first side yoke and the second side yoke are deformed so as to fall inward by the attractive force generated between the first magnet group and the second magnet group, the first side Since the deformation amounts of the yoke and the second side yoke are substantially the same, the symmetry between the first magnet group and the second magnet group can be maintained, and the distance between the coil and the first magnet group, The distance between the coil and the second magnet group can be kept equal. This suppresses an increase in error between the coil design movement direction and the direction of the Lorentz force acting on the coil, ensuring smooth movement of the coil and improving the reliability of the linear motor. It is done. In addition, even if the first side yoke and the second side yoke are collapsed inwardly and deformed, there is almost no influence on the abutting accuracy between the base yoke and the tip end surface of the protruding portion. The distance between the magnet group and the distance between the coil and the second magnet group can be kept equal. This contributes to the improvement of the reliability of the linear motor as a result.

  In addition, it is preferable that the protruding portion penetrates at least one of the first side yoke and the second side yoke, and the tip end surface of the protruding portion protrudes from the outer surface of the side yoke. With such a configuration, it is possible to reduce the size of the base yoke, that is, the size of the linear motor, as compared with the case where the protruding portion of the base yoke protrudes from the side or the side of the side yoke.

  The positioning protrusion is preferably provided integrally with the base yoke. According to such a configuration, since the tip end surface of the protruding portion and the base yoke can be in a highly accurate positional relationship, the positioning of the yoke with respect to the yoke housing portion can be performed with high accuracy. In addition to simplifying the structure of the linear motor, the assembly work of the linear motor can be speeded up.

  In addition, it is preferable that the positioning protrusion is provided separately from the base yoke. According to such a configuration, it is easy to select the length and material of the protruding portion, which contributes to improvement of the versatility of the linear motor.

  According to the present invention, the reliability of the linear motor can be improved.

  DESCRIPTION OF EMBODIMENTS Hereinafter, preferred embodiments of an XY stage apparatus including a linear motor according to the present invention will be described in detail with reference to the drawings. In the description of the drawings, the same elements are denoted by the same reference numerals, and redundant description is omitted. Further, as shown in the drawings, the X axis and the Y axis are 90 degrees on the horizontal plane, the vertical direction is defined as the Z axis direction, and the X axis, Y axis, and Z axis are used below when necessary.

[First Embodiment]
As shown in FIG. 1, the stage device 1 includes a frame portion 3 disposed on both sides of the base 2 in the X-axis direction, and a pair of stone surface plates 5 that are arranged side by side on the base 2 and extend in the Y-axis direction. And a movable stage 7 that moves in the Y-axis direction along the stone surface plate 5, and a pair of linear motors 8 that function as a drive unit for the movable stage 7.

  As shown in FIGS. 1 and 2, the linear motor 8 includes a yoke 40 extending in the Y-axis direction outside the movable stage 7 in the X-axis direction, and a coil unit 50 connected to the movable stage 7. ing.

The yoke 40 that functions as a stator of the linear motor 8 is disposed in a yoke housing part (structure) 33 formed at the upper end of the frame part 3. The yoke storage portion 33 includes a bottom portion 33b having a bottom surface 33a parallel to the XY plane, and a side wall 33c that protrudes in the Z-axis direction from the bottom surface 33a outside in the X-axis direction. The yoke storage portion 33 is formed in an L-shaped cross section by a bottom surface 33a and a side surface 33d of the side wall 33c.

  As shown in FIGS. 2 to 5, the yoke 40 includes a base yoke 41 fixed to the side wall 33 c of the yoke housing portion 33 by a bolt 45, and an X-axis direction from one end of the base yoke 41 in the Z-axis direction. A protruding plate-like first side yoke 42 and a plate-like second side yoke protruding in the X-axis direction from the other end of the base yoke 41 in the Z-axis direction so as to face the first side yoke 43. The yoke 40 is configured by a base yoke 41, a first side yoke 42, and a second side yoke 43 in a substantially U shape.

  One end of the first side yoke 42 in the X-axis direction is fixed to the side surface of the base yoke 41 by a bolt 46. A first row of first magnets 48 in which magnets are arranged so that N poles and S poles are alternately arranged in the Y-axis direction is fixed to the inner surface on the other end side of the first side yoke 42. Yes. Similarly, one end of the second side yoke 43 in the X-axis direction is fixed to the side surface of the base yoke 41 by a bolt 47. A row in which magnets are arranged on the inner surface of the second side yoke 43 on the other end side so that N poles and S poles are alternately arranged in the Y-axis direction so as to face the first magnet group 48. The second magnet group 49 is fixed.

  The first magnet group 48 and the second magnet group 49 are arranged so that the N pole and the S pole of the magnet face each other, and between the first magnet group 48 and the second magnet group 49. Has a suction force that attracts each other.

  The coil unit 50 functioning as a mover of the linear motor 8 is a plate-shaped member having a plurality of coils 50c connected in the Y-axis direction covered with a case and having extended portions 50a and 50b at both ends in the X-axis direction. It is. One extension part 50 a of the coil unit 50 is connected to the upper end part of the support wall part 13 d protruding upward from the upper wall part 13 a of the Y-axis slider 13, and the other extension part 50 b is accommodated in the yoke 40. Has been. A minute gap is formed between the tip of the extended portion 50 b and the inner surface 41 f of the base yoke 41.

  The coil unit 50 is arranged in a state in which the distance S1 between the first magnet group 48 and the coil unit 50 and the distance S2 between the second magnet group 49 and the coil unit 50 are equal. The coil 50c of the coil unit 50 is energized so that the magnetic poles change in accordance with the N-pole and S-pole patterns of the first magnet group 48 and the second magnet group 49. The movable stage 7 is moved by generating a repulsive force between each of the two magnet groups 49.

The base yoke 41 is formed with projecting portions 41a and 41c having a rectangular cross section projecting from both sides in the Z-axis direction. A plurality of protruding portions 41a are formed on the first side yoke 42 side, and these protruding portions 41a are spaced apart from each other in the Y-axis direction. The protruding portion 41a is inserted into a U-shaped notch 42b formed at one end of the first side yoke 42 in the X-axis direction, and the distal end surface 41b of the protruding portion 41a is the first side yoke. It protrudes from the outer surface 42a of 42. Similarly, a plurality of protrusions (second protrusions) 41c are formed on the second side yoke 29 side, and these protrusions 41c are separated from each other in the Y-axis direction. The protrusion 41c is inserted into a U-shaped notch 43b formed at one end of the second side yoke 43 in the X-axis direction, and the tip end surface 41d of the protrusion 41c is the second side yoke. It protrudes from the outer surface 43a of 43.

  According to the linear motor 7 having the above configuration, when the yoke 40 is positioned and fixed to the yoke storage portion 33, the outer surface 41g of the base yoke 41 is abutted against the side surface 33d of the yoke storage portion 33, and the tip surface 41b of the protrusion 41a. By abutting against the bottom surface 33a of the yoke storage portion 33, a gap S3 can be formed between the bottom surface 33a of the yoke storage portion 33 and the first side yoke 42. As a result, even if the first side yoke 42 and the second side yoke 43 are deformed so as to fall inward due to the attractive force generated between the first magnet group 48 and the second magnet group 49, Since the deformation amounts of the first side yoke 42 and the second side yoke 43 are substantially the same, the symmetry between the first magnet group 48 and the second magnet group 49 can be maintained, and the coil unit 50 and The distance S1 between the first magnet group 48 and the distance S2 between the coil unit 50 and the second magnet group 49 can be kept equal. As a result, an increase in error between the design moving direction (Y-axis direction) of the coil unit 50 and the direction of the Lorentz force acting on the coil 50c of the coil unit 50 is suppressed. The movement is ensured and the reliability of the linear motor 8 is improved.

  Furthermore, even if the first side yoke 42 and the second side yoke 43 fall down inwardly and are deformed, there is almost no influence on the abutting accuracy by the base yoke 41 and the tip surface 41b of the protruding portion 41a. The distance S1 between the coil unit 50 and the first magnet group 48 and the distance S2 between the coil unit 50 and the second magnet group 49 can be kept equal. This contributes to the improvement of the reliability of the linear motor 8 as a result.

  Further, since the protruding portions 41a and 41c are provided integrally with the base yoke 41, the tip surfaces 41b and 41d of the protruding portions 41a and 41c and the base yoke 41 can be in a highly accurate positional relationship. Accordingly, it is possible to accurately position the yoke 40 with respect to the yoke storage portion 33. In addition to simplification of the structure of the linear motor 8, the assembly work of the linear motor 8 can be speeded up. Further, since the protruding portions 41a and 41c are provided through the first side yoke 42 and the second side yoke 43, respectively, the protruding portion of the base yoke 41 is compared with the case of protruding from the lower side of the side yoke. Thus, the size of the base yoke 41 in the X-axis direction, that is, the size of the linear motor 8 can be reduced.

[Second Embodiment]
The linear motor according to the second embodiment is different from the first embodiment in the configuration of the yoke.

  As shown in FIGS. 6 to 9, the yoke 60 is fixed to one side surface of the base yoke 61 by the thick plate-like base yoke 61 fixed to the side wall 33 c of the yoke housing portion 33 by the bolt 45 and the bolt 46. The plate-shaped first side yoke 62 and the plate-shaped second side yoke 63 fixed to the other side surface of the base yoke 61 by a bolt 47 are included. The yoke 60 is formed in a substantially U shape by a base yoke 61, a first side yoke 62, and a second side yoke 63.

  A row of first magnet groups 48 are fixed to the inner surface of the first side yoke 62 on the free end side. A second magnet group 48 in a row is fixed to the inner surface of the second side yoke 63 on the free end side so as to face the first magnet group 48.

On the side surface of the base yoke 61 on the first side yoke 62 side, there are provided a plurality of connection holes 61a into which the tip portions 64c of the plurality of driving pins (projections) 64 are respectively press-fitted. These connecting holes 61a are arranged so as to be separated from each other in the Y-axis direction. Similarly, on the side surface of the base yoke 61 on the second side yoke 63 side, a plurality of connection holes 61b into which the tip portions 65c of the plurality of driving pins ( second projecting portions) 65 are press-fitted are provided. These connecting holes 61b are arranged so as to be separated from each other in the Y-axis direction.

  The driving pin 64 includes a disc-shaped head portion 64a having an abutting surface (tip surface) 64d that abuts against the yoke housing portion 33, a columnar main body portion 64b protruding from the head portion 64a, and a main body portion 64b. It consists of a cylindrical tip 64c protruding from the tip surface. The distal end portion 64c of the driving pin 64 has a cylindrical shape with a smaller diameter than the main body portion 64b, and the distal end surface of the main body portion 64b is formed to be parallel to the abutting surface 64d. The driving pin 65 has a similar structure.

  The first side yoke 62 is formed with a plurality of through holes 62b through which the main body portion 64b of the driving pin 64 is inserted in the Z-axis direction. These through holes 62 b are provided at positions corresponding to the connecting holes 61 a of the base yoke 61. A gap S4 is formed between the inner peripheral surface of the through hole 62b and the outer peripheral surface of the main body portion 64a of the driving pin 64. Similarly, the second side yoke 63 is formed with a plurality of through holes 63b through which the main body portion 65b of the driving pin 65 is inserted in the Z-axis direction. These through holes 63 b are provided at positions corresponding to the connection holes 61 b of the base yoke 61. A gap S <b> 5 is formed between the inner peripheral surface of the through hole 63 b and the outer peripheral surface of the main body portion 65 a of the driving pin 65.

  The driving pin 64 has a distal end portion 64 c press-fitted into the coupling hole 61 a of the base yoke 61 through the through hole 62 b of the first side yoke 62, and the distal end surface of the main body portion 64 b is brought into contact with the side surface of the base yoke 61. The base yoke 61 and the abutting surface 64d of the driving pin 64 are aligned. Further, the abutting surface 64 d of the head 64 a of the driving pin 64 protrudes from the outer surface 62 a of the first side yoke 62. Similarly, the driving pin 65 has a tip 65c press-fitted into the connecting hole 61b of the base yoke 61 through the through hole 63b of the second side yoke 63, and the tip of the main body 65b abuts the side of the base yoke 61. As a result, the base yoke 61 and the abutment surface 65d of the driving pin 65 are aligned. The abutting surface 65 d of the head portion 65 a of the driving pin 65 protrudes from the outer surface 63 a of the second side yoke 63.

  According to the linear motor having the above configuration, the outer surface 61c of the base yoke 61 is abutted against the side surface 33d of the yoke housing portion 33 to position and fix the yoke 60 to the yoke housing portion 33, and the head 64a of the driving pin 64 is fixed. By abutting the abutting surface 64d against the bottom surface 33a of the yoke storage portion 33, a gap S6 can be formed between the bottom surface 33a of the yoke storage portion 33 and the first side yoke. Therefore, even if the first side yoke 42 and the second side yoke 43 are deformed so as to fall inward by the attractive force generated between the first magnet group 48 and the second magnet group 49, the coil The distance S1 between the unit 50 and the first magnet group 48 and the distance S2 between the coil unit 50 and the second magnet group 49 can be kept equal, and the design moving direction of the coil unit 50 (Y (Axial direction) and the direction of the Lorentz force acting on the coil 50c of the coil unit 50 are restrained from increasing, so that the coil unit 50 can be smoothly moved and the reliability of the linear motor can be improved. It is done.

  Further, since a gap S4 is formed between the inner peripheral surface of the through hole 62b and the outer peripheral surface of the main body portion 64a of the driving pin 64, the first side yoke 62 and the second side yoke 63 are connected to each other. Even if it collapses inwardly and deforms, there is almost no influence on the abutting accuracy by the abutting surface 64d of the base yoke 61 and the driving pin 64. Accordingly, the distance S1 between the coil unit 50 and the first magnet group 48 and the distance S2 between the coil unit 50 and the second magnet group 49 can be kept equal. This contributes to the improvement of the reliability of the linear motor as a result.

  Further, since the driving pins 64 and 65 are provided separately from the base yoke 61, the length and material of the driving pins 64 and 65 can be easily selected. This means that the driving pins 64 and 65 are made of a magnetic material or a non-magnetic material, or the gap S6 between the first side yoke 62 and the bottom surface 33a of the yoke storage portion 33 is adjusted according to the specifications of the linear motor. This contributes to improving the versatility of the linear motor.

  It goes without saying that the present invention is not limited to the embodiment described above. For example, the projecting portions 41a and 41b are not limited to projecting through the first side yoke 42 and the second side yoke 43 but projecting from the lower side or side of the side yoke in the Z-axis direction. May be.

  Further, the protruding portions 41 a and 41 b may be provided only on one side, not on both sides of the base yoke 41. Similarly, the driving pins 64 and 65 may be provided only on one side.

  Further, the shape of the driving pins 64 and 65 is not limited to a substantially cylindrical shape, and may be a quadrangular prism shape or a polygonal column shape as long as it has a function as the driving pin described above. Further, the base yokes 41 and 62 may be fixed to the bottom surface 33a of the yoke housing portion 33 by bolts inserted through the base yoke in the Z-axis direction.

It is sectional drawing which shows one Embodiment of the XY stage apparatus provided with the linear motor which concerns on this invention. It is sectional drawing which shows a linear motor. It is a perspective view which shows the yoke of a linear motor. It is a disassembled perspective view which shows the yoke of a linear motor. It is a top view which shows the yoke of a linear motor. It is sectional drawing which shows the linear motor applied to 2nd Embodiment. It is a perspective view which shows the yoke of the linear motor shown by FIG. FIG. 7 is an exploded perspective view showing a yoke of the linear motor shown in FIG. 6. It is a top view which shows the yoke of the linear motor shown by FIG.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 ... Stage apparatus, 2 ... Base, 3 ... Frame part, 5 ... Stone surface plate, 7 ... Movable stage, 8 ... Linear motor, 40, 60 ... Yoke, 50 ... Coil unit, 34 ... Yoke storage part (structure) , 41, 61 ... base yoke, 41a ... projecting portion, 41c ... projecting portion (second projecting portion) , 41b, 41d ... tip surface, 42, 62 ... first side yoke, 43, 63 ... second side yoke 48 ... first magnet group, 49 ... second magnet group, 50c ... coil, 64 ... driving pin (protruding portion), 65 ... driving pin (second projecting portion) , 64d, 65d ... butting surface (tip) Surface), S1 to S6 ... gaps.

Claims (5)

A row of first magnet groups, a row of second magnet groups arranged opposite to the first magnet group, and arranged such that magnetic poles different from the first magnet group are opposed to the first magnet group; A yoke that supports the first magnet group and the second magnet group and is fixed to the structure; and a coil disposed between the first magnet group and the second magnet group. In linear motors,
The yoke is
Together with the on one side a first magnet group is fixed, and the first side yoke and the other side facing the structure,
A second side yoke having the second magnet group fixed to one side surface;
A base yoke to which the first side yoke and the second side yoke are fixed;
The base yoke is provided with a positioning protrusion that protrudes in the opposing direction of the first and second magnet groups,
The front end surface of the protruding portion protrudes from the other side surface of the first side yoke ,
The linear motor is characterized in that the yoke is positioned in a facing direction of the first and second magnet groups when the tip surface comes into contact with the structure . The projecting portion penetrates the first side yoke in the facing direction of the first and second magnet groups, and the tip end surface of the projecting portion projects from the outer surface of the first side yoke. The linear motor according to claim 1.   The linear motor according to claim 1, wherein the positioning protrusion is provided integrally with the base yoke.   The linear motor according to claim 1, wherein the positioning protrusion is provided separately from the base yoke. The base yoke is provided with a second projecting portion whose front end surface projects from the other side surface of the second side yoke in the facing direction of the first and second magnet groups. The linear motor as described in any one of Claims 1-4.

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