JPS6224238B2 - - Google Patents

Info

Publication number
JPS6224238B2
JPS6224238B2 JP21176782A JP21176782A JPS6224238B2 JP S6224238 B2 JPS6224238 B2 JP S6224238B2 JP 21176782 A JP21176782 A JP 21176782A JP 21176782 A JP21176782 A JP 21176782A JP S6224238 B2 JPS6224238 B2 JP S6224238B2
Authority
JP
Japan
Prior art keywords
manipulator
work table
air purification
purification box
turntable
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP21176782A
Other languages
English (en)
Japanese (ja)
Other versions
JPS59102581A (ja
Inventor
Kazunari Imahashi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokyo Electron Ltd
Original Assignee
Tokyo Electron Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Electron Ltd filed Critical Tokyo Electron Ltd
Priority to JP21176782A priority Critical patent/JPS59102581A/ja
Publication of JPS59102581A publication Critical patent/JPS59102581A/ja
Publication of JPS6224238B2 publication Critical patent/JPS6224238B2/ja
Granted legal-status Critical Current

Links

JP21176782A 1982-12-01 1982-12-01 ワ−クステ−シヨン Granted JPS59102581A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP21176782A JPS59102581A (ja) 1982-12-01 1982-12-01 ワ−クステ−シヨン

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP21176782A JPS59102581A (ja) 1982-12-01 1982-12-01 ワ−クステ−シヨン

Publications (2)

Publication Number Publication Date
JPS59102581A JPS59102581A (ja) 1984-06-13
JPS6224238B2 true JPS6224238B2 (enrdf_load_stackoverflow) 1987-05-27

Family

ID=16611242

Family Applications (1)

Application Number Title Priority Date Filing Date
JP21176782A Granted JPS59102581A (ja) 1982-12-01 1982-12-01 ワ−クステ−シヨン

Country Status (1)

Country Link
JP (1) JPS59102581A (enrdf_load_stackoverflow)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH072316B2 (ja) * 1986-05-23 1995-01-18 東京エレクトロン株式会社 無塵室用搬送ロボットによる搬送方法
US4986715A (en) * 1988-07-13 1991-01-22 Tokyo Electron Limited Stock unit for storing carriers

Also Published As

Publication number Publication date
JPS59102581A (ja) 1984-06-13

Similar Documents

Publication Publication Date Title
JP4283559B2 (ja) 搬送装置及び真空処理装置並びに常圧搬送装置
KR100265287B1 (ko) 반도체소자 제조용 식각설비의 멀티챔버 시스템
JP4244555B2 (ja) 被処理体の支持機構
JPH07109854B2 (ja) 自動ハンドリング装置
JP2002166376A (ja) 基板搬送用ロボット
JPH01241840A (ja) 基板処理装置
CN103227131A (zh) 传送机器人
JP2004090186A (ja) クリーン搬送ロボット
KR102561594B1 (ko) 기판 처리 장치
JPS6224238B2 (enrdf_load_stackoverflow)
JP4100585B2 (ja) 半導体製造装置におけるポッド供給装置
WO2025087061A1 (zh) 晶舟移载装置
JPS6248038A (ja) 産業用ロボツト
JPS63141341A (ja) 半導体ウエハカセット用移送ロボット
JPH0632684Y2 (ja) ロボットを用いた搬送装置
JPH0432437A (ja) 吸着パット
JPH0247045U (enrdf_load_stackoverflow)
JPH0589337U (ja) ロボットパレタイザ
JP3332982B2 (ja) 基板処理システムおよびキャリア搬送装置
JPH04189483A (ja) ウエハ収納治具搬送ロボット
JP2524393B2 (ja) キャリヤ搬送装置
JP2001179579A (ja) ワーク加工システム
JP2000243809A (ja) 多関節ロボット装置
JPH03102851A (ja) ウェーハ収納治具
JPS62277284A (ja) 無塵室用搬送ロボットによる搬送方法