JPS62236141A - Production of magnetic recording medium - Google Patents
Production of magnetic recording mediumInfo
- Publication number
- JPS62236141A JPS62236141A JP7972986A JP7972986A JPS62236141A JP S62236141 A JPS62236141 A JP S62236141A JP 7972986 A JP7972986 A JP 7972986A JP 7972986 A JP7972986 A JP 7972986A JP S62236141 A JPS62236141 A JP S62236141A
- Authority
- JP
- Japan
- Prior art keywords
- magnetic recording
- layer
- vapor deposition
- recording layer
- recording medium
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000005291 magnetic effect Effects 0.000 title claims abstract description 35
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 13
- 239000010409 thin film Substances 0.000 claims abstract description 11
- 238000000034 method Methods 0.000 claims abstract description 8
- 229920006254 polymer film Polymers 0.000 claims abstract description 6
- 239000000758 substrate Substances 0.000 claims abstract description 3
- 238000001771 vacuum deposition Methods 0.000 claims abstract 2
- 238000007740 vapor deposition Methods 0.000 abstract description 15
- 239000010408 film Substances 0.000 abstract description 8
- 238000001704 evaporation Methods 0.000 abstract description 6
- 230000008020 evaporation Effects 0.000 abstract description 6
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 abstract description 3
- 229910052760 oxygen Inorganic materials 0.000 abstract description 3
- 239000001301 oxygen Substances 0.000 abstract description 3
- 229910020630 Co Ni Inorganic materials 0.000 abstract 1
- 229910002440 Co–Ni Inorganic materials 0.000 abstract 1
- KKEYFWRCBNTPAC-UHFFFAOYSA-L terephthalate(2-) Chemical compound [O-]C(=O)C1=CC=C(C([O-])=O)C=C1 KKEYFWRCBNTPAC-UHFFFAOYSA-L 0.000 abstract 1
- 238000000151 deposition Methods 0.000 description 5
- -1 polyethylene terephthalate Polymers 0.000 description 5
- 229920000139 polyethylene terephthalate Polymers 0.000 description 5
- 239000005020 polyethylene terephthalate Substances 0.000 description 5
- 230000008021 deposition Effects 0.000 description 4
- 230000000694 effects Effects 0.000 description 4
- 238000004804 winding Methods 0.000 description 3
- 230000000052 comparative effect Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000005294 ferromagnetic effect Effects 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 238000003860 storage Methods 0.000 description 2
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 238000005566 electron beam evaporation Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 238000011156 evaluation Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 229920006267 polyester film Polymers 0.000 description 1
- 230000002265 prevention Effects 0.000 description 1
- 230000002250 progressing effect Effects 0.000 description 1
- 238000007738 vacuum evaporation Methods 0.000 description 1
Landscapes
- Compositions Of Macromolecular Compounds (AREA)
- Magnetic Record Carriers (AREA)
- Manufacturing Of Magnetic Record Carriers (AREA)
Abstract
Description
【発明の詳細な説明】
産業上の利用分野
本発明は高密度磁気記録に適した磁気記録媒体の製造方
法に関するものである。DETAILED DESCRIPTION OF THE INVENTION Field of Industrial Application The present invention relates to a method of manufacturing a magnetic recording medium suitable for high-density magnetic recording.
従来の技術
磁気記録の分野に於ては、高密度記録化や記録信号の短
波長化が進められておシ、これに対応して、従来の塗布
塵の磁気記録媒体に代ってGo−Mi合金等の強磁性金
属材料を電子ビーム蒸着法等の薄膜形成手段によシ、ポ
リエステルフィルム上に強磁性金属薄膜として直接形成
することにより製造した蒸着テープが有望視され各方面
で改良が進められている。〔例えば、外国論文誌アイ・
イー・イー・イー磁気学会報(I ICHICTran
sactions onMagnetics)vol、
MAG−21、No−3、P、P、 1217〜=12
20 (1985))
策−3図は、従来の蒸着テープ製造に用いられている蒸
着機の一例である。第2図で1は電子銃、2は蒸発源、
3は防着板、4は蒸着ドラム、6はガイドロール、6は
グロー放電電極、7はシャッター、8は送り出し軸、9
は巻取り軸である。Conventional technology In the field of magnetic recording, higher recording densities and shorter wavelengths of recording signals are progressing. Vapor deposition tapes produced by directly forming ferromagnetic metal thin films on polyester films using ferromagnetic metal materials such as Mi alloys using thin film forming methods such as electron beam evaporation are seen as promising, and improvements are being made in various fields. It is being [For example, foreign journal i.
IICHICTran
actions on Magnetics) vol.
MAG-21, No-3, P, P, 1217~=12
20 (1985)) Measure-3 Figure 3 is an example of a vapor deposition machine used in the production of conventional vapor deposition tape. In Figure 2, 1 is an electron gun, 2 is an evaporation source,
3 is a deposition prevention plate, 4 is a vapor deposition drum, 6 is a guide roll, 6 is a glow discharge electrode, 7 is a shutter, 8 is a sending shaft, 9
is the winding shaft.
第3図の装置を用いて、ポリエチレンテレフタレートフ
ィルム上にCo−Ni−0斜め蒸着膜を形成する工程は
、蒸着テープの製造工程で最も熱負荷が大きい工程で、
蒸着ドラム4の表面を冷却することで、使用するポリエ
チレンテレフタレートフィルムに与える熱影響を小さく
する工夫がされている。The process of forming a Co-Ni-0 obliquely vapor-deposited film on a polyethylene terephthalate film using the apparatus shown in FIG.
The surface of the deposition drum 4 is cooled to reduce the thermal effect on the polyethylene terephthalate film used.
とりわけ、使用するポリエチレンテレフタレートフィル
ムが薄くなるにつれて、機械強度が弱まるので、蒸着ド
ラムの冷却が重要視されてきている。In particular, as the polyethylene terephthalate film used becomes thinner, its mechanical strength weakens, so cooling of the deposition drum has become important.
発明が解決しようとする問題点
しかしながら上記した構成では、磁気テープの保存環境
条件が広範囲となる屋外用途の録画機器への適用等に於
ては、形状9寸法変化が、特性に影響を与え、実用上大
きな問題となる。本発明は上記した事情に鑑みなされた
もので、保存状態における形状2寸法変化の発生を殆ん
ど無視可能な、磁気記録媒体を大量に得ることの出来る
磁気記録媒体の製造方法を提供するものである。Problems to be Solved by the Invention However, with the above-mentioned configuration, when applied to recording equipment for outdoor use where the magnetic tape is stored in a wide range of environmental conditions, changes in shape and dimensions may affect the characteristics. This poses a big problem in practice. The present invention has been made in view of the above-mentioned circumstances, and provides a method for manufacturing a magnetic recording medium that can produce a large amount of magnetic recording media in which the occurrence of changes in shape and two dimensions during storage can be almost ignored. It is.
問題点を解決するための手段
上記問題点を解決するため、本発明の磁気記録媒体の製
造方法は、高分子フィルムの一方に磁気記録層もう一方
に薄膜層を真空蒸着法で形成する際、夫々の層を厚み方
向に分割して蒸着すると共に、基板温度を異なる条件で
蒸着するものである。Means for Solving the Problems In order to solve the above problems, the method for manufacturing a magnetic recording medium of the present invention includes forming a magnetic recording layer on one side of a polymer film and a thin film layer on the other side by vacuum evaporation. Each layer is divided into layers in the thickness direction and deposited under different substrate temperature conditions.
作用
本発明の磁気記録媒体の製造方法は、上記した構成によ
り、複数の温度ステージで、高分子フィルムの両面に蒸
着することで、応力バランスが広い範囲でとれているた
めに、使用環境を広くとっても形状9寸法安定性が良好
な磁気記録媒体を大量に製造できるのである。Effect The method for producing a magnetic recording medium of the present invention has the above-described structure, and by vapor depositing on both sides of a polymer film at multiple temperature stages, the stress balance can be maintained over a wide range, so it can be used in a wide range of environments. Magnetic recording media with very good shape and dimension stability can be manufactured in large quantities.
実施例
以下、図面を参照にして本発明の実施例について説明す
る。第1図は本発明の製造方法を実施する・のに用いた
蒸着装置の一例である。第2図は本発明によシ得られる
磁気記録媒体の拡大断面図である。第1図で10はウェ
ブ、11は第1軸、12は第2軸、13は第1円筒キャ
ン、14は第2円筒キャン、16は第1蒸発源、16は
第2蒸発源、17は第1蒸気流、18は第2蒸気流、1
9は第1マスク、2oは第2マスク、21は遮へい板、
22はガイドロールで、巻取りは図に矢印で示したF方
向、R方向の双方向に可能な構成とした。Embodiments Hereinafter, embodiments of the present invention will be described with reference to the drawings. FIG. 1 shows an example of a vapor deposition apparatus used to carry out the manufacturing method of the present invention. FIG. 2 is an enlarged sectional view of a magnetic recording medium obtained according to the present invention. In FIG. 1, 10 is a web, 11 is a first shaft, 12 is a second shaft, 13 is a first cylindrical can, 14 is a second cylindrical can, 16 is a first evaporation source, 16 is a second evaporation source, and 17 is a The first vapor stream, 18 is the second vapor stream, 1
9 is a first mask, 2o is a second mask, 21 is a shielding plate,
Reference numeral 22 denotes a guide roll, which can be wound in both the F direction and the R direction shown by arrows in the figure.
第2図で23は高分子フィルム、24は第1の磁気記録
層、26は第1の薄膜層、26は第2の磁気記録層、2
7は第2の薄膜層である。In FIG. 2, 23 is a polymer film, 24 is a first magnetic recording layer, 26 is a first thin film layer, 26 is a second magnetic recording layer, 2
7 is a second thin film layer.
第1図、第2図で本発明について概説する。The present invention will be outlined in FIGS. 1 and 2.
第1図の装置を用いて、厚み10μmのポリエチレンテ
レフタレートフィルム23に先ず第1円筒キャン13の
温度を一20″Cにして5i0層25(第1薄膜層)を
0.07μm蒸着し、次に斜め蒸着で第2円筒キャン1
4を同じ<−20”Cにして、Go−Ni(Ni 20
wt%)を1x 10 (Torr) 中の酸素中
で0.06μm第1磁気記録層24として形成した。〔
この処理は巻取り方向はF方向である。〕
次にR方向に切りかえて、巻き取りを行い、キャン温度
は夫々60°Cにして、8i0層0.07 p Ia2
7(第2薄膜層)と第2磁気記録層0.05μm26を
同様に形成した。Using the apparatus shown in FIG. 1, a 5i0 layer 25 (first thin film layer) of 0.07 μm was deposited on the polyethylene terephthalate film 23 with a thickness of 10 μm by first setting the temperature of the first cylindrical can 13 to −20″C, and then 2nd cylindrical can 1 by oblique deposition
4 to the same <-20"C, Go-Ni (Ni 20"
wt%) was formed as a 0.06 μm first magnetic recording layer 24 in oxygen at 1×10 (Torr). [
In this process, the winding direction is the F direction. ] Next, switch to the R direction, wind up, set the can temperature to 60°C, and form an 8i0 layer of 0.07p Ia2.
7 (second thin film layer) and a second magnetic recording layer 26 having a thickness of 0.05 μm were formed in the same manner.
これを8InI1幅の磁気テープとして、カセットに挿
入し、−10°C,20’C,60″Cl8o′Cの各
環境で1ケ月間保存した後、23°Cで初期からの寸法
の変化をスキューを測定することで評価した。This was inserted into a cassette as an 8InI 1-width magnetic tape, stored at -10°C, 20'C, and 60''Cl8o'C for one month, and then stored at 23°C to check for changes in dimensions from the initial stage. Evaluation was made by measuring skew.
比較は厚み10μmのポリエチレンテレフタレートフィ
ルムを用い、第3図の装置でGo−Ni(ui 2ow
t %)を1x 10 (Torr)中の酸素中で0
.1μm同じ入射角条件で斜め蒸着して磁気記録層を形
成し、平坦化処理したテープ(比較例)を用い行った。For comparison, a polyethylene terephthalate film with a thickness of 10 μm was used, and Go-Ni (ui 2ow
t%) in oxygen at 1x 10 (Torr)
.. A magnetic recording layer was formed by oblique vapor deposition of 1 μm under the same incident angle conditions, and a flattened tape (comparative example) was used.
8ミリビデオの仕様で調査した結果、本発明品は、任意
抽出した40カセツト(1環境、10カセツト)で−1
0°Cl2o″C,60’C,80″Cで夫々4〜6(
μ5ec) 、 s 〜6.7 (μ5ec) 、 e
、e 〜B、0 (μ5ec) 、 4.e 〜s、s
(Hec) tと良好であったのに、比較例のテープ
は夫々19〜3B(μ5ec)。As a result of research using 8mm video specifications, the product of the present invention showed -1 in 40 arbitrarily selected cassettes (1 environment, 10 cassettes).
4 to 6 at 0°Cl2o''C, 60'C, and 80''C (
μ5ec), s ~6.7 (μ5ec), e
, e ~ B, 0 (μ5ec), 4. e ~s, s
(Hec)t, while the tapes of comparative examples were 19 to 3B (μ5ec).
11〜1e (μ5ec) 、 5〜22 (μ5ec
) 、 7−31(μ5ec) とバラツキが大きく
、スキューも大きく実用上問題となる部分が多くみられ
た。11~1e (μ5ec), 5~22 (μ5ec
), 7-31 (μ5ec), the variation was large, the skew was also large, and there were many parts that caused practical problems.
実施例では、夫々2分割して蒸着したが、必要に応じて
、3〜4回と分けてもよいし、巻取りを双方向にせずに
構成した装置を用いて、異なる温度で蒸着を続けて行う
こともできる。なお信頼性を確保すべき温度範囲の上限
、下限近くで蒸着することで満足できる結果を得ること
ができる。In the example, the vapor deposition was performed in two parts, but if necessary, the vapor deposition may be performed three to four times, or the vapor deposition could be continued at different temperatures using an apparatus configured without winding in both directions. You can also do it by Note that satisfactory results can be obtained by performing vapor deposition near the upper and lower limits of the temperature range in which reliability must be ensured.
蒸着する順序、即ち磁気記録層をはじめにつけるかどう
か、温度を低温側からはじめるかどうかは適宜選択でき
る。The order of vapor deposition, that is, whether or not to deposit the magnetic recording layer first, and whether or not to start from the low temperature side can be selected as appropriate.
尚、本発明の製造方法は、磁気テープ、磁気ディスクの
いずれにも用いることができる。Note that the manufacturing method of the present invention can be used for both magnetic tapes and magnetic disks.
発明の効果
以上のように本発明の磁気記録媒体の製造方法によれば
、保存温度範囲を広くしても、殆んど形状2寸法変化の
ない磁気記録媒体を大量に得ることができるといったす
ぐれた効果が得られる。Effects of the Invention As described above, the method for manufacturing a magnetic recording medium of the present invention has the advantage that it is possible to obtain a large quantity of magnetic recording media with almost no change in shape or dimension even if the storage temperature range is widened. You can get the same effect.
第1図は本発明の製造方法を実施するのに用いた蒸着装
置の要部構成図、第2図は本発明で製造できる磁気記録
媒体の拡大断面図、第3図は従来の磁気記録媒体の製造
に用いる蒸着装置の要部構成図である。
10・・・・・・ウェブ、13・・・・・・第1の円筒
キャン、14・・・・・・第2の円筒キャン、16・・
・・・・第1の蒸発源、16・・・・・・第2の蒸発源
、23・・・・・・高分子フィルム、24・・・・・・
第1の磁気記録層、26・・・・・・第1の薄膜層、2
6・・・・・・第2の磁気記録層、27・・・・・・第
1の薄膜層。Figure 1 is a block diagram of the main parts of a vapor deposition apparatus used to carry out the manufacturing method of the present invention, Figure 2 is an enlarged sectional view of a magnetic recording medium that can be manufactured by the present invention, and Figure 3 is a conventional magnetic recording medium. FIG. 2 is a configuration diagram of main parts of a vapor deposition apparatus used for manufacturing. 10... Web, 13... First cylindrical can, 14... Second cylindrical can, 16...
...First evaporation source, 16... Second evaporation source, 23... Polymer film, 24...
First magnetic recording layer, 26...First thin film layer, 2
6... Second magnetic recording layer, 27... First thin film layer.
Claims (1)
真空蒸着法で形成する際、夫々の層を厚み方向に分割し
て蒸着すると共に、基板温度を異なる条件で蒸着するこ
とを特徴とする磁気記録媒体の製造方法。When forming a magnetic recording layer on one side of a polymer film and a thin film layer on the other side using a vacuum evaporation method, each layer is vapor-deposited separately in the thickness direction, and the layers are vapor-deposited under different substrate temperature conditions. A method for manufacturing a magnetic recording medium.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7972986A JPS62236141A (en) | 1986-04-07 | 1986-04-07 | Production of magnetic recording medium |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7972986A JPS62236141A (en) | 1986-04-07 | 1986-04-07 | Production of magnetic recording medium |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS62236141A true JPS62236141A (en) | 1987-10-16 |
Family
ID=13698291
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP7972986A Pending JPS62236141A (en) | 1986-04-07 | 1986-04-07 | Production of magnetic recording medium |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS62236141A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0785466A (en) * | 1992-09-17 | 1995-03-31 | Kao Corp | Method and device for manufacturing magnetic recording medium, and magnetic recording medium |
JPH07254148A (en) * | 1994-03-16 | 1995-10-03 | Kao Corp | Production and apparatus for magnetic recording medium and the magnetic recording medium |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59126620A (en) * | 1983-01-10 | 1984-07-21 | Anelva Corp | Method and device for manufacturing film |
JPS59221829A (en) * | 1983-05-31 | 1984-12-13 | Matsushita Electric Ind Co Ltd | Production of vertical magnetic recording medium |
-
1986
- 1986-04-07 JP JP7972986A patent/JPS62236141A/en active Pending
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59126620A (en) * | 1983-01-10 | 1984-07-21 | Anelva Corp | Method and device for manufacturing film |
JPS59221829A (en) * | 1983-05-31 | 1984-12-13 | Matsushita Electric Ind Co Ltd | Production of vertical magnetic recording medium |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0785466A (en) * | 1992-09-17 | 1995-03-31 | Kao Corp | Method and device for manufacturing magnetic recording medium, and magnetic recording medium |
JP2843236B2 (en) * | 1992-09-17 | 1999-01-06 | 花王株式会社 | Method and apparatus for manufacturing magnetic recording medium |
JPH07254148A (en) * | 1994-03-16 | 1995-10-03 | Kao Corp | Production and apparatus for magnetic recording medium and the magnetic recording medium |
JP2843252B2 (en) * | 1994-03-16 | 1999-01-06 | 花王株式会社 | Method and apparatus for manufacturing magnetic recording medium |
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