JPS59126620A - Method and device for manufacturing film - Google Patents

Abstract

PURPOSE:To enable to reduce the warpage of a magnetic recording medium by a method wherein the quantity of heat accumulated on a substrate when a film is formed on the first surface of the substrate and the quantity of heat which is accumulated when a film is formed on the second surface are almost equalized. CONSTITUTION:A roll 2, to be used to roll out a substrate 11, and a take-up roll 3 are provided inside a vacuum chamber 1, and substrate supporting electrodes 16-19 and targets 5-9 are arranged between guide rolls 4 and 4'. In order to form a magnetic film on both sides of the substrate 11 using the device, first, the first magnetic film 12 is formed on the first surface of the substrate 11 using the target 5. Subsequently, the first magnetic film 14 is formed on the second surface of the substrate 11 using the target 8. Then, the second magnetic film 15 is formed on said magnetic film 14 using the target 9, and then the second magnetic film 13 is formed on the first surface using the target 6. As a result, the total quantity of heat accumulated on the substrate 11 when a film is formed on the first surface of the substrate 11 and the total quantity of heat accumulate on the substrate can be almost equalized, thereby enabling to manufacture the recording medium having a little warpage.

Description

DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a film manufacturing method for forming thin films on both sides of a substrate, and a film manufacturing apparatus used in the film manufacturing method.
In particular, the present invention relates to a method of manufacturing a magnetic recording medium having magnetic layers on both sides of a substrate, and a manufacturing apparatus used in the manufacturing method.

In recent years, as a method for manufacturing a recording medium for high-density magnetic recording, a method for manufacturing a magnetic recording medium has been developed in which a magnetic thin film is attached to a substrate such as a polyester film by vapor deposition, sputtering, or other methods. There is. However, when forming magnetic layers on both sides of a thin film-like substrate (=, a magnetic layer is formed on the first surface of the substrate, and then a magnetic layer is formed on the second surface of the substrate. It is common to manufacture double-sided recording media.However, recording media manufactured by this process tend to warp, cannot record and reproduce high-quality information, and are often unusable.

An object of the present invention is to provide a membrane manufacturing method and a membrane manufacturing apparatus in which films are formed on both sides of a substrate, in which warping of a substrate on which a film is formed can be minimized. There is a particular thing.

Another object of the present invention is to manufacture a magnetic recording medium that can minimize warpage of the ffl recording medium in a method and apparatus for manufacturing a magnetic recording medium in which magnetic films are formed on both sides of a substrate. An object of the present invention is to provide a method and a manufacturing apparatus.

According to the present invention, in a film manufacturing method in which films are formed on both sides of a substrate, a first step of forming a first film on one surface of the substrate, and after the first step, a second step of forming a first film on the other surface of the wafer, and after the second step.

A sixth step of forming a second film on the other surface of the base, and a fourth step of forming a second film on one surface of the base after the sixth step. A method for producing a membrane having the following characteristics can be obtained.

Further, according to the present invention, a film manufacturing apparatus for forming films on both sides of a substrate includes a vacuum container, a substrate feeding mechanism for moving the substrate in a predetermined direction within the vacuum container, and a substrate transport mechanism for moving the substrate in a predetermined direction within the vacuum container. a first target provided on the movement starting end band and for forming a first film on one surface of the substrate;

a second target provided closer to the end of the movement path of the substrate than the first target and for forming a first film on the other surface of the substrate; a sixth target provided near the end of the movement path for forming a second film on the other surface of the base;
A fourth film is provided closer to the end of the moving path of the base than the target, and is for forming a second film on one surface of the base.
A film manufacturing apparatus is obtained, which is characterized in that it is equipped with a target.

The present invention will be described in detail below with reference to the drawings.

FIG. 1 is a conceptual diagram of a conventional continuous sputtering apparatus for manufacturing magnetic recording media. In the figure, 1 is a vacuum container, and the vacuum container 1 is heated to 10 Tor by a vacuum pump (not shown).
After being evacuated to a pressure of R, the argon gas is introduced from the argon gas introduction system (not shown) to 5X10' Tor.
The pressure is maintained in the range r to lX1O-2 Torr. Reference numeral 2 denotes a delivery roll, on which a film-like substrate 11 (eg, polyester film, etc.) is wound.

The base body 11 that has come out from the feed roll 2 is guided by the guide roll 4,
4" and is wound up onto the take-up roll 6. That is, 2.3.4 and 4" constitute a substrate feeding mechanism for moving the substrate 11 in a predetermined direction within the vacuum container 1. In the vacuum container 1, a target 5, a target 6, a substrate supporting electrode 7, a target 8, a target 9, and a substrate supporting electrode 1o are arranged in the middle of the movement of the substrate from the delivery roll 2 to the take-up roll 6. An AC power source or a DC power source (not shown) is connected to each target to supply power, and glow discharge is performed between each target and the vacuum vessel 1. With the apparatus shown in FIG.

A thin film is formed on the base 11 as shown in FIG.

That is, on the first surface of the base 11.

A first magnetic film 12 is formed by the target 5 shown in FIG. 1, and then a second magnetic film 13 (this is a film substantially different from the magnetic film 12) is formed by the target 6.
is formed. Further, on the second surface of the base 11, a first magnetic film 14 (which is substantially the same film as the magnetic film 12) is formed by the target 8, and a second magnetic film 15 (substantially the same film as the magnetic film 12) is formed by the target 9. This is substantially the same film as the magnetic film 16) is formed. in this way.

Two layers of magnetic films are formed on each side of the base.

However, products manufactured by this manufacturing method suffer from large warpage and cannot be used as magnetic recording media. At present, the reason why warpage occurs is not fully understood, but when forming a magnetic film on the first surface of the substrate 11, heat radiation from the substrate surface includes heat rays radiated from the surface and heat rays radiated from the substrate 11.
It is considered that there are heat rays that pass through the substrate support electrode 7 and are radiated to the substrate support electrode 7. However, when a magnetic film is formed on the second surface of the substrate 11-, the radiation of heat rays from the surface of the substrate is considered to be the same as in the case of the first surface of the substrate 11. However, if we consider the heat rays that pass through the base 11 and are radiated to the base support electrode 10 side.

A portion of the heat rays passing through the substrate 11 is radiated to the substrate supporting electrode 10, but a portion is reflected by the magnetic film already attached to the first surface of the substrate 11. Some of the reflected heat rays are emitted from the second surface of the base 11, and some are reflected by the magnetic film on the second surface of the base 11. In this way, the heat rays are absorbed by the base 11 as they are repeatedly reflected.

1 (Heat is thought to accumulate in the body.

As is clear from the explanation below, the temperature rise of the substrate 11 is different when the film is formed on the first surface of the J% body 11 and when the film is subsequently formed on the second surface of the substrate 11. Conceivable. This is considered to be one of the causes of warping in the magnetic recording medium manufactured by the manufacturing method shown in FIG. Furthermore, there may be a cause for warping in that song as well, but it is currently unknown.

As can be seen from the following explanation, if the amount of heat accumulated on the substrate can be made to be the same when forming a film on the first surface of the substrate and when forming a film on the second surface of the substrate, the magnetic recording medium will be It should be possible to reduce the amount of warping.

FIG. 6 shows an embodiment of a magnetic recording medium manufacturing apparatus according to the present invention. Among the numbers in FIG. 6, the same numbers as those in FIG. 1 are assigned the same numbers as those explained in FIG. 1, or represent the same functions. In Figure 6, the target placement is set to target 5. Target 8. Tarkent 9. It is assumed that the targets 6 are arranged in this order, and each target is performing a glow discharge between it and the vacuum vessel 1 in the same manner as explained in FIG. Also, as is clear from Figure 2, 16.17° and 18.19 are substrate supporting electrodes.

FIG. 4 shows the order of magnetic films formed by the apparatus shown in FIG. That is, the first magnetic film 12 is formed on the first surface of the base 11 by the target 5, and then the first magnetic film 14 (this is substantially the same as the magnetic film 12) is formed on the second surface of the base 11 by the target 8. ) is formed, and a second magnetic film 1 is formed thereon by a target 9.
5 (which is substantially different from the magnetic films 12 and 14 and substantially the same as the magnetic films 15) is formed.

By doing this, the total amount of heat accumulated in the substrate 11 when forming a film on the first surface of the substrate 11 and the total amount of heat accumulated in the substrate when forming a film on the second surface of the substrate 11 are as follows. It's not exactly the same amount, though.

It is possible to produce a magnetic recording medium with less warpage than in the case shown in FIG. 1.

I-hi! Although the case in which two magnetic films are formed on both sides of the substrate has been described, the present invention also exhibits remarkable effects when two single-layer magnetic films are formed on each of both sides of the substrate.

The present invention in this case will be described in detail below.

FIG. 5 shows another embodiment of the present invention, which differs from the embodiment of FIG. 5 in that all four targets 6.9 are made of the same magnetic material. That is, by forming the same magnetic film twice on each surface of the base 11, the effect of heat on the base 11 is made similar to that in the case of FIG. 3.

FIG. 6 shows the order of magnetic films formed by the apparatus of FIG. 5, with magnetic films 13, 13''.

15 and 15' are the same magnetic materials, and it can be easily understood that the thermal influence on the substrate is the same as that explained in FIGS. 6 and 4.

Another embodiment of the present invention is shown in FIG. 7, but this embodiment is different from the case of FIG.
The point is that the magnetic film of the required thickness is formed using one target 9 instead of forming the film on the surface using two targets. That is.

In the case of this embodiment, the only difference is the elapse of time for film formation on the second surface of the substrate 11, and the thermal influence on the substrate 11 can be considered to be almost the same as in the cases of FIGS. 3 and 5. This means that
The order of forming the magnetic film according to this embodiment shown in FIG. 8 will be easily understood. That is, the magnetic film 16 in FIG. 8 has approximately half the thickness of the magnetic films 13' and 15', and as can be seen by comparing FIG. 8 and FIG. 6, the time course of film formation is They are only different.

As described above, the present invention is capable of forming a magnetic film on both sides of a substrate by making the effects of heat on the substrate substantially equal during the formation on the first and second surfaces of the substrate; ? a This is an attempt to significantly reduce the warpage of a magnetic recording medium.

Comparing the warpage of the magnetic recording medium manufactured according to the present invention and the solid air recording medium manufactured by the manufacturing method shown in FIG. (approximately 133 mm) magnetic recording medium 2
When 0 is placed, and the highest height from the horizontal plane is 11, the one in Figure 1 is h-20 to 50W, 9 The one of the present invention is h-0 to 5B, and one It can be seen that in the invention, the warpage of the magnetic recording medium is significantly reduced.

As explained below, according to the present invention, there is provided a film manufacturing method and a thin film manufacturing apparatus for forming films on both sides of a substrate, which can minimize warping of the substrate on which the film is formed. A manufacturing method and a membrane manufacturing apparatus can be obtained.

Further, according to the present invention, it is possible to obtain a method and apparatus for manufacturing a magnetic recording medium that can minimize the warpage of a magnetic recording medium in which magnetic films are formed on both sides of a substrate. A high-quality magnetic recording medium capable of recording and reproducing quality information can be obtained, and the industrial value is extremely large.

Note that the present invention is not limited to the embodiments described above, and of course includes various modifications and changes to the embodiments. For example, it is clear that the shape of the substrate supporting electrode or the substrate feeding mechanism may be changed without departing from the spirit of the present invention.

[Brief explanation of drawings]

FIG. 1 is a diagram showing a schematic configuration of a conventional magnetic recording medium manufacturing apparatus, FIG. 2 is a diagram for explaining the order of forming a magnetic film by the apparatus of FIG. 1, FIGS. FIG. 7 is a diagram showing a schematic configuration of the magnetic recording medium manufacturing apparatus of the present invention, and FIGS. 4, 6, and 8 are diagrams showing 1aP4 using the apparatus shown in FIGS. 6, 5, and 7, respectively. : A diagram for explaining the order of film formation. FIG. 9 is a diagram showing warpage of a magnetic recording medium. 1... Vacuum container, 2... Delivery roll, 3...
Take-up roll, 4 and 41...Guide roll, 5°6.8 and 9...Target, 7.10.16.
17.18 and 19...substrate supporting electrode, 11...substrate, 12.13°13', 14.15 and 151...
- Magnetic film, 20... Magnetic recording medium, 21... Horizontal surface. Figure 1 Figure 4/'

Claims (1)

[Claims] 1. A film manufacturing method in which films are formed on both sides of a substrate, including a first step of forming a first film on one surface of the substrate, and after the first step, a second step of forming a first film on the other surface of the substrate; a third step of forming a second film on the other surface of the substrate after the second step; A method for producing a film, the method comprising the step of forming a second film on one surface of the substrate after step 6. 2. The first and second films formed on one surface of the substrate in the first and fourth steps are substantially different films, and the films are formed on the other surface of the substrate in the second and third steps. 2. The method of manufacturing a membrane according to claim 1, wherein the first and second membranes are substantially different membranes. 3. The first and second films formed on one surface of the substrate in the first and fourth steps are substantially the same film;
The method for producing a film according to claim 1, wherein the first and second films formed on the other surface of the substrate in the sixth step are substantially the same film. 4. The film manufacturing method according to claim 3, wherein the second and sixth steps are performed as one continuous step. 5. A film manufacturing apparatus for forming films on both sides of a substrate, including a vacuum container, a substrate feeding mechanism for moving the substrate in a predetermined direction of the vacuum container, and a substrate feeding mechanism provided near the starting end of movement of the substrate. . a first film for forming a first film on one surface of the substrate;
a second target provided closer to the movement end of the base body than the first target and for forming a first film on the other surface of the base body; a sixth target provided near the end of the movement of the substrate for forming a second film on the other surface of the substrate; and a sixth target provided closer to the end of the movement path of the substrate than the sixth target. , and a fourth target for forming a second film on one surface of a substrate. 6. The first and second films formed on one surface of the substrate by the first and fourth targets are substantially different films, and the films are formed on the other surface of the substrate by the second and third targets. 6. The film manufacturing apparatus according to claim 5, wherein the first and second films are substantially different films. Z The first and second films formed on one surface of the base by the first and fourth targets are substantially the same film,
6. The film manufacturing apparatus according to claim 5, wherein the first and second films formed by the second and third targets are substantially the same film. 8. The film manufacturing apparatus according to claim 7, wherein a single target serves as the second and sixth targets.