JPH03130923A - Apparatus for producing perpendicular magnetic recording medium - Google Patents

Abstract

PURPOSE:To produce the perpendicular disk having good durability by moving chucking jigs in such a manner that the tension in the transverse direction of a film is applied on the film at all times during the time from the stop of film formation before the transfer of the film and the next film formation. CONSTITUTION:The tension is applied outward on the base film 7 in the direction of an arrow 15 by the 1st and 2nd chucking jigs 3, 4 corresponding to 1st and 2nd targets 1, 2 and the film is formed by a sputtering method. The jigs 3 are thereafter moved from a position A to a position B and the jigs 4 are simultaneously moved to the position A without releasing the tension. The jigs 3 return to the home position A while applying the tension on the film 7 and the jigs 4 are simultaneously returned to the home position of a dotted line while the tension is held applied on the film. Namely, the chucking jigs are eventually located to the first start position and the film is formed while the tension is kept applied at all times on the base film. The good perpendicular film which is free from 'curling' and 'wrinkling' is thereby formed even from the thin base film.

Description

[Detailed description of the invention] B1 Purpose of the invention [Industrial application field] The present invention relates to an apparatus for manufacturing perpendicular magnetic recording media.

[Conventional technology]

In recent years, with the demand for higher density magnetic recording, magnetic layers are formed only from magnetic materials. Research on so-called continuous magnetic media has become active.

Continuous magnetic media fabricated by vacuum evaporation, sputtering, or plating have magnetic layers that are continuous thin films, so longitudinal recording is a matter of course, and perpendicular magnetic recording, in particular, can dramatically increase recording density. Improvements are expected, and development is underway to apply it to various product forms such as various magnetic tapes and disk-shaped magnetic recording media.

On the other hand, due to the recent demand for smaller floppy disks and floppy disks for still videos, 2-inch floppy disks have appeared.

This 2-inch floppy disk needs to have low rigidity in order to improve its durability and maintain good head touch. Therefore, due to the reduced rigidity of the disk, a thinner base film than before must be used.

In addition, the present inventors have previously discovered a method for manufacturing floppy disks for perpendicular magnetic recording (hereinafter referred to as perpendicular disks) in large quantities using a sputtering apparatus as shown in FIG. That is, the base film 7 conveyed from the feed roll 14 via the guide roll 8 stops conveyance at the position of the first target 1 and the position of the second target 2, and then moves to the first target corresponding to the position of the first target. The chucking jig 3 chucks the base film 7, applies tension to the outside of the base film, and forms a film by sputtering. After film formation is completed, the first target is placed at the position where the second target is to be formed. The base film 7 at the sputtered film forming position is transferred and remains stationary. Similarly, the second chucking jig located at the second target 2 has the same function, applying tension in the outward direction, and after the second target 2 forms a film on the first target 1, the film is formed. ,
The base film 7 is wound onto a take-up roll 12 via a guide roll 13. In addition, a method is commonly used in which a film is formed on the first target and the second target simultaneously by sputtering; After the formation is completed, the base film is moved to the same position as described above to form a film.

This method is shown in Figures 3(a), 3(b), and 3(c).
), in FIG. 3(a), 7 is a base film, 3 is a first chucking jig, 4 is a second chucking jig, and 9 is a substrate holder. 7, the first chucking jig and the second chucking jig move in the direction of the arrow 15, and as shown in FIG. 3(b), the base film 7 is sandwiched between the first chucking jig and the second chucking jig. A film is formed on the base film 7 by sputtering particles 10 by sputtering, and tension is applied in the width direction and length direction of the film. FIG. 3(c) shows the first chucking jig 3 after the film formation is completed. The second chucking jig 4 moves away from the top of the base film 7 in the direction of arrow 15, releases the tension applied to the base film, and transports the base film.

As a result, it is possible to fabricate vertical disks of 5 and 25 inches and 3.5 inches using polyimide films with a thickness of 40 to 50 μm without causing problems such as "curl" and "wrinkle". Can be done.

[Problem to be solved by the invention]

In this way, in conventional sputtering equipment, 40 μm to 50 μm
If a base film with a thickness of about ILm is used, the performance can be demonstrated, but if the base film is thinner than 40 μm, the vertical disk produced will have many "undulations", "wrinkles", and "scratches". This caused significant deterioration in both electromagnetic conversion characteristics and durability.

The present invention has been made in view of the current situation, and its purpose is to provide a base film with no "curl" or "wrinkle" and good electromagnetic conversion characteristics and durability even when the base film is thin (40 μm or less). An object of the present invention is to provide a sputtering apparatus capable of producing vertical disks.

Margin Port 1 Structure of the Invention [Means for Solving the Problems] According to the present invention, a long base film is intermittently run, and when the conveyance is stopped, the long base film is
A magnetic film is formed by sputtering while applying tension in each width direction, and by moving a chucking jig, the film can be moved without releasing the tension in the width direction, even during transportation, With this, 40
Even with thin long films of less than μm, scratches can occur due to friction between the part on which the magnetic film is formed and the internal jig of the sputtering device during film transport, and wrinkles can occur due to internal stress in the magnetic film. A sputtering apparatus for manufacturing a vertical disk is obtained, which can solve the problem and manufacture a vertical disk with good electromagnetic characteristics and durability.

That is, the present invention uses a vertical two-layer medium that has a mechanism that allows a long polymer film to be conveyed intermittently, and when a thin film is formed by sputtering, the conveyance is stopped and tension is applied in the width direction of the film. Perpendicular magnetic recording characterized by having a mechanism in which a chucking jig can be moved in a production apparatus so that tension is always applied in the width direction of the film from the stop of film formation to the transport of the film to the formation of the next film. This is a media manufacturing device.

[Effect]

Conventionally, when a magnetic film is formed on a base film using a sputtering method using a first target and a second target, "wrinkles" occur, so it is difficult to form a film on the first target and second target. A chucking was provided at the position to apply tension to the outside of the base film to prevent wrinkles, but since the chucking was in a fixed position, the tension was applied to the outside of the base film after the magnetic film was formed. Tension is released. For this reason, with thin base films of 40 μm or less, defects such as "wrinkles" and "folds" frequently occurred.

When the magnetic film is made into a two-layer thin film, it is strong, and if it is formed on the base film without wrinkles, it will not wrinkle or fold even after the tension is removed. After a film is formed on the first target by applying tension outward on the base film, when the tension applied to the external force is removed and the base film is transported, the film is formed in even one layer. ``Wrinkles'' occur frequently. Therefore, we stopped fixing the first and second chucks corresponding to the first and second targets at the positions of the first and second targets, and fixed them as shown in FIG. 1(a), FIG. 1(b), As shown in FIG. 1(c), in FIG. 1(a), the corresponding first target and second target
A film was formed by sputtering by applying tension to the chucking jig and the second chucking jig, and the tension was not released afterwards. The second chucking jig quickly moves to the A position, and the first chucking jig and the second chucking jig are lined up with tension applied to positions A and B, as shown in Fig. 1 (c). ), the second chucking jig returns to its original position while keeping tension on the base film,
At the same time, the first chucking jig returns to its original position with tension still applied. In other words, the chucking jig is located at the initial start position in Fig. 1(a), and the first chucking jig and second chucking jig corresponding to the first and second targets are returned to their original positions. located in position,
The film is formed with constant tension applied to the base film. "Wrinkles" occur when the base film is constantly under tension even during transport due to the operation of the chucking jig as shown in Figure 1 (a), Figure 1 (b), and Figure 1 (c). , “
This is a manufacturing device for perpendicular magnetic recording media that prevents bending.

〔Example〕

It is known that stress is generally generated in the formed film when a thin film is manufactured by a plasma paper deposition (PVD) method such as a sputtering method or a vapor deposition method.

Furthermore, in the conventional sputtering apparatus shown in FIG. 2, the thin film is not formed in the form of a continuous tape, but is formed in the form of disks, which are spaced apart at regular intervals.

For the above reasons, disc-shaped thin films with internal stress generate wrinkles during transportation when the tension in the width direction is removed, causing contact with internal jigs.

FIG. 1(a) shows the first target 1 and the second target in the present invention.
It represents the positions of the first tracking jig 3 and the second tracking jig 4 at the position of the target 2, and arrow 1
This shows that the film is formed by sputtering by applying tension outward to the base film 7 in the direction of 5. After the film is formed, the first chucking jig 3 moves to the position indicated by the dotted line as shown in FIG. 1(b). In this case as well, the chucking tension remains applied.

FIG. 1(b) shows the first chucking jig 3 after the film formation is completed.
At the same time, the second chucking jig 4 moves in the direction of the arrow 15. That is, the first chucking jig 3 moves from position A to position B indicated by a dotted line. At that time, the second tracking jig 4 is in position A, and the first tracking jig 3 is in position A.
Move to the original position, that is, the position A.

In the construction drawing (C,), the first chucking jig 3, which was at position B, returns to position A, and at the same time, the second chucking jig 3, which was at position A, returns to position B.
The chucking jig 4 moves to the original position indicated by the dotted line, but since the base film is conveyed while applying tension outward in the direction of the arrow, the tension remains applied during conveyance. By using a manufacturing device for perpendicular magnetic recording media that has such a chucking jig, "wrinkles,""undulations," and "scratches" will not occur even in thin and long base films of 40 μm or less, and movement will be prevented. After completion, the first
Come to the position shown in figure (a). At that time, the magnetic film formed on the first target has come to the position of the second target, so the magnetic film is formed on the base film 7 at the position shown in FIG. It is formed. In any case, the base film is formed under tension in the outward direction.

That is, the thin film formed by the first target is conveyed to the position of the second target while being tensioned in the width direction of the film by the second chucking jig, and a thin film is further formed by the second target, and a disc-shaped second film is formed. A thin film is formed.

Therefore, according to the present invention, there is no possibility that the film itself comes into contact with the internal jig of the sputtering apparatus due to "wrinkles", "undulations", etc. during film transport.

A perpendicular magnetic recording medium was manufactured using a sputtering apparatus equipped with a chucking jig as shown in FIGS. 1(a), 1(b), and 1(c).

The sputtering conditions at that time are shown in Table 1.

Margin below Table 1 Of the vertical bilayer media made in this way.

When punched into 2-inch discs, 7 out of 100 had wrinkles or wrinkles.

As a comparative example, a vertical two-layer medium was produced using the conventional method shown in Figure 1 under the same conditions as shown in Table 1. 83 out of 100 pieces were discovered.

The details of the fabrication results of the vertical two-layer media according to the examples of the present invention and comparative examples are shown in Table 2.

Table 2 It can be seen that the yield rate of 2-inch vertical double-layer media, that is, the productivity of the vertical double-layer media produced once according to the present invention has clearly improved.

Effects of the Invention [Effects of the Invention] As described above, according to the present invention, a manufacturing apparatus capable of producing a vertical two-layer medium without wrinkles or sagging was obtained.

In the embodiments of the present invention, only two sets of targets and chucking jigs have been described, but for three or more sets, the same second target and second chucking jigs can be used as the second set. The number of targets and chucking jigs is not limited to the embodiments of the present invention.

[Brief explanation of the drawing]

FIG. 1(a) shows the position of the target and the operation of the chucking jig in an apparatus for producing a vertical two-layer medium according to an embodiment of the present invention. The chucking jig sputters while applying tension to the base film. FIG. 1(b) is an explanatory diagram showing the position of the target and the moving operation of the chucking jig in the vertical two-layer media manufacturing apparatus according to the embodiment of the present invention; FIG. ) indicates that the base film is moved while applying tension to the base film by the chucking jig of the vertical two-layer media manufacturing apparatus according to the embodiment of the present invention, and as shown in FIG. 1(a), it is moved to the initial position. FIG. 3 is an explanatory diagram showing an operation in which the chucking jig returns. FIG. 2 is a perspective view of the configuration of a comparative example (conventional) manufacturing apparatus for a vertical two-layer medium. FIG. 3 is a schematic cross-sectional view showing the conventional film forming procedure, and FIG. 3(a) is a cross-sectional view in which the chucking jig is moved in the direction of the arrow to hold the base film.
Figure 3(b) is a cross-sectional view of the chucking jig holding the base film and applying tension to sputtering, and Figure 3(C) is a cross-sectional view of the chucking jig being removed after sputtering is complete. FIG. 3 is a cross-sectional view showing a state where no tension is applied. 1...First target, 2...Second target, 3
...first chucking jig, 4...second chucking jig, 5...movement of first chucking jig, 6...
- Movement of second chucking jig, 7... Base film, 8... Guide roll, 9... Substrate holder, 10... Sputtered particles, 11... Sputtered film, 1
2... Winding roll, 13... Guide roll, 14
...Feeding roll, 15...arrow.

Claims (1)

[Claims] 1. In a vertical two-layer media production device that has a mechanism that can intermittently transport a long polymer film, stop the transport when forming a thin film by sputtering, and apply tension in the width direction of the film. , manufacture of a perpendicular magnetic recording medium characterized by having a mechanism that allows a chucking jig to move so that tension is always applied in the width direction of the film from the stop of film formation to the transport of the film to the formation of the next film. Device.