JPH01165033A - Manufacture of magnetic recording medium - Google Patents

Manufacture of magnetic recording medium

Info

Publication number
JPH01165033A
JPH01165033A JP32265987A JP32265987A JPH01165033A JP H01165033 A JPH01165033 A JP H01165033A JP 32265987 A JP32265987 A JP 32265987A JP 32265987 A JP32265987 A JP 32265987A JP H01165033 A JPH01165033 A JP H01165033A
Authority
JP
Japan
Prior art keywords
main roller
roller
recording medium
magnetic recording
film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP32265987A
Other languages
Japanese (ja)
Inventor
Morimi Hashimoto
母理美 橋本
Takayuki Yagi
隆行 八木
Kenji Suzuki
謙二 鈴木
Hirotsugu Takagi
高木 博嗣
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP32265987A priority Critical patent/JPH01165033A/en
Publication of JPH01165033A publication Critical patent/JPH01165033A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE:To obtain a suitable contact between a main roller and a base film and to obtain a magnetic recording medium having no crater forming irregularity on the surface nor wrinkles by providing a regular concave and convex forms on the surface of the main roller. CONSTITUTION:A high polymer film substrate 1 is successively fed from a winding roller 2 to form the groove of a mesh structure on the surface via an auxiliary roller 3 and wound on the heated main roller 4. This roller 4 has the regular concave and convex forms on the surface. Further, it is taken up by a take up roller 7 via an auxiliary roller 6. When the substrate 1 travels on the main roller 4, a magnetic film material is supplied from an evaporation source 5 disposed oppositely to the roller 4 to successively form the magnetic film on the substrate 1. As the substrate 1, a high polymer film such as polyethylene telephthalate can be used to preferably have the thickness of 5-10mum.

Description

【発明の詳細な説明】 〔産業上の利用分野〕 本発明は高分子フィルム基体上に連続磁性薄膜を形成す
る磁気記録媒体の製造装置に関する。
DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to an apparatus for manufacturing a magnetic recording medium that forms a continuous magnetic thin film on a polymer film substrate.

〔従来の技術〕[Conventional technology]

磁気記録の分野においては、その高記録密度化に伴い、
従来の塗布型媒体からCo−Ni、  Go−Cr、γ
−Fe2O3、あるいはBaフェライト等に代表される
磁性材料を真空蒸着法、スパッタリング法等により高分
子フィルム基体表面に形成して作製される連続磁性薄膜
媒体へと移行しつつある。これら磁性薄膜を記録層とし
たフロッピーディスク、磁気テープ等を作製する場合に
は、長尺状の高分子フィルム基体を真空槽内て連続的に
巻き出し、加熱された主ローラーに巻付けられながら、
蒸発源からの磁性材料を高分子フィルム基体上に形成さ
せるのが一般的である。この場合、Go−Ni膜を除い
た(:o−11:r、γ二”’203 、Ba−フェラ
イト膜においては、磁気記録媒体として所望の磁気特性
を得る為に、ベースフィルム(高分子フィルム基体)を
100℃以上に加熱する必要がある。このベースフィル
ムの加熱は、ベースフィルムの支持体である主ローラー
を加熱することにより行なわれるが、主ローラー表面と
ベースフィルム裏面が密着しているため、ベースフィル
ムが加熱された主ロールと接触した時にベースフィルム
から発生するガスが、主ローラー表面とベースフィルム
裏面の間に局所的に残留する。このため、ベースフィル
ム表面にあばた状の凹凸やシワが発生することがある。
In the field of magnetic recording, with the increase in recording density,
From conventional coating media to Co-Ni, Go-Cr, γ
There is a trend toward continuous magnetic thin film media, which are manufactured by forming magnetic materials such as -Fe2O3 or Ba ferrite on the surface of polymer film substrates by vacuum evaporation, sputtering, or the like. When producing floppy disks, magnetic tapes, etc. that use these magnetic thin films as recording layers, a long polymer film substrate is continuously unwound in a vacuum chamber and is wound around a heated main roller. ,
It is common to form magnetic material from an evaporation source onto a polymeric film substrate. In this case, in order to obtain the desired magnetic properties as a magnetic recording medium, the base film (polymer film It is necessary to heat the base film to 100°C or higher.Heating of this base film is done by heating the main roller, which is the support of the base film, but the main roller surface and the back surface of the base film are in close contact with each other. Therefore, when the base film comes into contact with the heated main roll, the gas generated from the base film remains locally between the main roller surface and the back surface of the base film.For this reason, pock-like unevenness or unevenness may occur on the base film surface. Wrinkles may occur.

あるいは、ベースフィルムが加熱されたことによるベー
スフィルムの幅方向の熱膨張がシワの発生原因となるこ
ともある。このようなしわや凹凸を有する磁気記録媒体
は磁気ヘッドとの安定なコンタクトが得られず、このた
め、磁気記録媒体の再生出力のエンベロープの平坦性が
失われるなどの問題点がある。一方、ベースフィルムを
連続的に走行させるフィルム搬送系の機械的精度が向上
するにつれ、ベースフィルム裏面と主ローラー表面との
接触状態が改善される。しかしながら、ベースフィルム
表面の温度は主ローラーの温度と蒸発源からの輻射熱に
よる上昇温度との和に依存するため、ベースフィルム裏
面と主ローラー表面との接触状態が良好になると、ベー
スフィルムと主ローラー間の熱伝導が良くなる。このた
め、ベースフィルム表面の実効的な温度があまり上がら
ず、ベースフィルムの所望の磁気特性は得られにくくな
る問題点がある。
Alternatively, thermal expansion in the width direction of the base film due to heating of the base film may cause wrinkles. A magnetic recording medium having such wrinkles or irregularities cannot make stable contact with a magnetic head, and as a result, there are problems such as loss of flatness of the envelope of the reproduced output of the magnetic recording medium. On the other hand, as the mechanical precision of the film transport system that continuously runs the base film improves, the contact state between the back surface of the base film and the surface of the main roller improves. However, since the temperature of the base film surface depends on the sum of the main roller temperature and the temperature increase due to radiant heat from the evaporation source, when the contact between the back surface of the base film and the main roller surface becomes good, the base film and main roller Improves heat conduction between Therefore, there is a problem in that the effective temperature of the surface of the base film does not rise much, making it difficult to obtain desired magnetic properties of the base film.

(発明が解決しようとする問題点) 本発明は上記の重大な問題点を改善し、あばた状の凹凸
やしわのない磁気特性の優れた磁気記録媒体の製造装置
を提供することを目的とする。
(Problems to be Solved by the Invention) An object of the present invention is to improve the above-mentioned serious problems and provide an apparatus for manufacturing a magnetic recording medium with excellent magnetic properties without pock-like irregularities or wrinkles. .

〔問題点を解決するための手段〕[Means for solving problems]

本発明はの磁気記録媒体の製造装置は、高分子フィルム
基体を連続的に走行させ、所定位置に存在する該高分子
フィルム基体の支持体である主ローラーに巻き付けた状
態で、該高分子フィルム基体上に連続磁性薄膜を形成す
る磁気記録媒体の製造装置において、 前記主ローラーは表面に規則的な凹凸の形状を有するこ
とを特徴としている。
The apparatus for producing a magnetic recording medium of the present invention continuously runs a polymer film substrate, and in a state where the polymer film substrate is wound around a main roller that is a support for the polymer film substrate existing at a predetermined position, the polymer film substrate is In an apparatus for manufacturing a magnetic recording medium that forms a continuous magnetic thin film on a substrate, the main roller is characterized in that its surface has a regular uneven shape.

本発明は上記構成により、高分子フィルム基板が主ロー
ラーに極めて均一状態で良好に接触し、かつ適度に浮く
ことになる。
According to the present invention, with the above configuration, the polymer film substrate contacts the main roller very uniformly and well, and floats appropriately.

以下、本発明を図面を参照して説明する。Hereinafter, the present invention will be explained with reference to the drawings.

第1図は本発明の磁気記録媒体の製造装置の一例を示す
正面図であり、第2図は第1図の主ローラ−4の斜視図
である。
FIG. 1 is a front view showing an example of the magnetic recording medium manufacturing apparatus of the present invention, and FIG. 2 is a perspective view of the main roller 4 of FIG. 1.

高分子フィルム基体1は、巻出しローラー2から連続的
に送出され、補助ローラー3を経て、表面に網目構造の
溝が形成され、加熱された主ローラ−4に巻き付けられ
、さらに補助ローラー6を経て巻取りローラー7で巻取
られる。高分子フィルム基体1は主ローラ−4を走行す
る際に、主ローラ−4と対向して設けられている蒸発源
5から磁性薄膜材料が供給されて、高分子フィルム基体
1に磁性薄膜が連続的に形成されることになる。
The polymer film substrate 1 is continuously fed out from an unwinding roller 2, passes through an auxiliary roller 3, has a network groove formed on its surface, is wound around a heated main roller 4, and is further passed through an auxiliary roller 6. After that, it is wound up by a winding roller 7. When the polymer film substrate 1 runs on the main roller 4, a magnetic thin film material is supplied from the evaporation source 5 provided opposite the main roller 4, and a magnetic thin film is continuously formed on the polymer film substrate 1. It will be formed as follows.

高分子フィルム基体1としてはポリエチレンテレフタレ
フト、ポリイミド、ポリアミド、ポリスルホン等の高分
子フィルムを用いることができ、厚さ5〜100−が好
適であり、いっそう好ましい範囲は5〜50鱗である。
As the polymer film substrate 1, a polymer film such as polyethylene terephthalate, polyimide, polyamide, polysulfone, etc. can be used, and a thickness of 5 to 100 mm is suitable, and a more preferable range is 5 to 50 scales.

補助ローラー3.6の数は、特に限定されない。The number of auxiliary rollers 3.6 is not particularly limited.

主ローラ−4の溝のピッチは25〜500木/インチが
好適であり、いっそう好ましい範囲は300〜500本
/インチである。ピッチ25本/インチ以下では、磁気
記録媒体にしわが発生し、また500本/インチは加工
技術の限界である。めやすとしては、使用する高分子基
体1の厚さをδ鱗、主ローラ−4のメツシュの数をN個
/インチとすると、0.05<δ/N<1.0の範囲で
ある。
The pitch of the grooves on the main roller 4 is preferably from 25 to 500 grooves/inch, and more preferably from 300 to 500 grooves/inch. If the pitch is less than 25 lines/inch, wrinkles will occur in the magnetic recording medium, and 500 lines/inch is the limit of processing technology. As a rough guide, if the thickness of the polymer substrate 1 used is δ and the number of meshes on the main roller 4 is N pieces/inch, then the range is 0.05<δ/N<1.0.

主ローラ−4の表面には第3図に示すように平行構造の
溝9を設けてもよい。この場合、溝9のピッチは、上記
の綱目構造のものと同じである。
The surface of the main roller 4 may be provided with parallel grooves 9 as shown in FIG. In this case, the pitch of the grooves 9 is the same as that of the mesh structure described above.

さらに、主ローラ−4の表面には第4図に示すように穴
10を設けてもよい。穴のピッチは主ローラ−4の凸部
の表面積を考慮して、25〜10000個/rnm2の
範囲が好ましい。
Furthermore, holes 10 may be provided on the surface of the main roller 4 as shown in FIG. The pitch of the holes is preferably in the range of 25 to 10,000 holes/rnm2, taking into account the surface area of the convex portion of the main roller 4.

なお、溝、穴の深さは高分子フィルム基体1からのガス
が残留しすぎないことと、加工技術を考慮して、0.0
5〜1mmが好適であり、いっそう好ましい範囲は0.
05〜0.2mmである。
Note that the depth of the grooves and holes is set to 0.0 in consideration of processing technology and ensuring that the gas from the polymer film base 1 does not remain too much.
5 to 1 mm is suitable, and a more preferable range is 0.
05 to 0.2 mm.

主ローラ−4の材質は、Fe%Cr、 Go、AI、ス
テンレス等の金属、あるいはそれらの金属でメツキされ
たものである。
The material of the main roller 4 is metal such as Fe%Cr, Go, AI, stainless steel, or plated with these metals.

(実施例) 以下、本発明を具体的に実施例をあげて説明する。(Example) Hereinafter, the present invention will be specifically explained with reference to Examples.

実施例1 主ローラーの表面に第3図に示したようなピッチ40本
/インチ、深さ0.15fflfflの平行構造の溝が
設けられている。この主ローラーを有した第1図の装置
で、幅50cm、厚さ25u+のポリイミドの長尺フィ
ルムをベースフィルムとしてGo−21重量%Cr組成
のマグネトロンスパッタ用ターゲットを用いて、Go−
(:rのスパッタリングを行ない、Go−Cr膜テープ
(磁気記録媒体)を作製した。成膜条件は、主ローラー
の表面温度150℃、Go−Cr成膜速度0.3uI/
minとし、Go−Cr膜を0.5μ形成した。
Example 1 On the surface of the main roller, parallel grooves with a pitch of 40 grooves/inch and a depth of 0.15 fflffl as shown in FIG. 3 were provided. In the apparatus shown in FIG. 1 having this main roller, a Go-21 magnetron sputtering target with a Cr composition of 1 wt.
(:r sputtering was performed to produce a Go-Cr film tape (magnetic recording medium). Film-forming conditions were: main roller surface temperature 150°C, Go-Cr film-forming rate 0.3 uI/
min, and a Go-Cr film of 0.5 μm was formed.

このGo−Cr @テープの磁気特性をVSMで測定し
たところ、表に示すように、飽和磁束密度4πMsは4
800 GauSS、テープ走行面に対して垂直方向の
保磁力Hcは12000e 、テープ走行面に対して平
行な成分の保磁力H″Cは7000eであった。また、
テープの表面にはあばた状の凹凸やしわがなく、磁気特
性および表面性にすぐれたGo−Cr膜テープ(磁気記
録媒体)を得た。(次述の他の実施例、比較例の結果も
同じ表に掲載。) 実施例2 主ローラーの表面に第2図に示すようなピッチ500本
/インチの綱目構造の溝が設けられている以外は、実施
例1と同一方法でGo−(:r膜テープを作製した。こ
のGo−Or膜テープのH’cは7000eであり実施
例1のそれと同一であるが、Heは実施例1のそれより
も大きくなっている。これは、溝の本数が増加した分だ
け、ベースフィルムと主ローラーの接触面積が減少する
ので、ベースフィルムから主ローラーへの熱の伝導が少
なくなり、ベースフィルム表面の実効的な温度が上昇し
た、と考えられる。
When the magnetic properties of this Go-Cr@tape were measured using a VSM, as shown in the table, the saturation magnetic flux density 4πMs was 4
800 GauSS, the coercive force Hc in the direction perpendicular to the tape running surface was 12000e, and the coercive force H''C in the component parallel to the tape running surface was 7000e.
A Go--Cr film tape (magnetic recording medium) with no pock-like unevenness or wrinkles on the surface of the tape and excellent magnetic properties and surface properties was obtained. (Results of other examples and comparative examples described below are also listed in the same table.) Example 2 Grooves with a mesh structure with a pitch of 500 grooves/inch as shown in Fig. 2 are provided on the surface of the main roller. Except for this, a Go-(:r film tape was produced in the same manner as in Example 1. H'c of this Go-Or film tape was 7000e, which was the same as that in Example 1, but He was the same as in Example 1. This is because as the number of grooves increases, the contact area between the base film and the main roller decreases, which reduces the conduction of heat from the base film to the main roller. It is thought that the effective temperature of the surface increased.

実施例3 主ローラーの表面に第4図に示すようなピッチ500個
/mll12の穴lOが設けられている以外は、実施例
1と同一方法でGo−Cr @テープを作製した。
Example 3 A Go-Cr@tape was produced in the same manner as in Example 1, except that holes IO with a pitch of 500 holes/ml12 as shown in FIG. 4 were provided on the surface of the main roller.

比較例1 主ローラーの表面に第3図に示すようなピッチ20木/
インチの網目構造の溝が設けられている以外は、実施例
1と同一方法でGo−Or膜テープを作製した。このG
o−Cr膜テープの表面にはしわが3本以上あるか、ま
たはしわのない部分にはあばた状の凹凸が発生していた
Comparative Example 1 The surface of the main roller was coated with a pitch of 20 pieces of wood as shown in Figure 3.
A Go-Or film tape was produced in the same manner as in Example 1, except that grooves with an inch-long mesh structure were provided. This G
There were three or more wrinkles on the surface of the o-Cr film tape, or pock-like unevenness had occurred in areas without wrinkles.

比較例2 主ローラーの表面に溝や穴が設けられていない以外は、
実施例1と同一方法でGo−Cr膜テープを作製した。
Comparative Example 2 Except that no grooves or holes were provided on the surface of the main roller,
A Go-Cr film tape was produced in the same manner as in Example 1.

このGo−Cr @テープの表面にはしわが12本本土
上生していた。
There were 12 wrinkles on the surface of this Go-Cr@tape.

比較例3 主ローラーの表面に第4図に示すようなピッチ20個/
1Ifl12の穴が設けられている以外は、実施例1と
同一方法でGo−Cr膜テープを作製した。このGo−
(:r膜テープの表面にはしわが4零以上発生していた
Comparative Example 3 20/20 pitches as shown in Figure 4 were placed on the surface of the main roller.
A Go-Cr film tape was produced in the same manner as in Example 1, except that 1Ifl12 holes were provided. This Go-
(:4 or more wrinkles were generated on the surface of the r-film tape.

表により本発明の実施例と、比較例との差は明らかであ
る。なお、本実施例、比較例においては、(:o−Cr
膜のスパッタリング連続成膜装置を例にあげたが、本発
明は真空蒸着法、イオンブレーティング法等、他の物理
蒸着法についても有効であることはいうまでもない。ま
た、γ−Fe2O3やBaフェライトのような磁性酸化
物の磁性薄膜材料でも有効である。
The table clearly shows the differences between the examples of the present invention and the comparative examples. In addition, in the present example and comparative example, (:o-Cr
Although a continuous film sputtering film forming apparatus has been cited as an example, it goes without saying that the present invention is also effective for other physical vapor deposition methods such as vacuum evaporation and ion blasting. Further, magnetic thin film materials of magnetic oxides such as γ-Fe2O3 and Ba ferrite are also effective.

〔発明の効果〕〔Effect of the invention〕

以上説明したように、高分子フィルム基体を連続的に走
行させ、所定位置で、高分子フィルム基体上に連続磁性
薄膜を形成する磁気記録媒体の製造装置において、所定
位置に存在する高分子フィルム基体の支持体となる主ロ
ーラーは表面に規則的な凹凸の形状を有することにより
、主ローラーとベースフィルムとの適度な密着性が得ら
れ、表面にあばた状の凹凸がなくしわのない磁気特性、
表面特性に優れた磁気記録媒体の提供が可能となる。
As explained above, in a magnetic recording medium manufacturing apparatus in which a polymer film substrate is continuously run and a continuous magnetic thin film is formed on the polymer film substrate at a predetermined position, a polymer film substrate existing at a predetermined position is used. The main roller, which serves as a support, has a regular uneven shape on its surface, which provides appropriate adhesion between the main roller and the base film, and the surface has no pock-like unevenness and wrinkle-free magnetic properties.
It becomes possible to provide a magnetic recording medium with excellent surface characteristics.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は本発明の磁気記録媒体の製造装置の一例を示す
正面図、第2図、第3図、第4図はそれぞれ第1図にお
ける主ローラーの第1、第2、第3の実施例の斜視図で
ある。 1・−高分子フィルム基体、2・−巻出しローラー、3
.6−・・補助ローラー、  4・・・主ローラ−,5
・・・蒸発源、       7・・・巻取りローラー
、8.9−・・溝、      10−・・穴。 特許出願人  キャノン株式会社
FIG. 1 is a front view showing an example of an apparatus for manufacturing a magnetic recording medium of the present invention, and FIGS. 2, 3, and 4 show first, second, and third implementations of the main roller in FIG. 1, respectively. FIG. 3 is a perspective view of an example. 1.-Polymer film base, 2.-Unwinding roller, 3
.. 6--Auxiliary roller, 4--Main roller, 5
...Evaporation source, 7--Take-up roller, 8.9--groove, 10--hole. Patent applicant Canon Co., Ltd.

Claims (1)

【特許請求の範囲】 1)高分子フィルム基体を連続的に走行させ、所定位置
に存在する該高分子フィルム基体の支持体である主ロー
ラーに巻き付けた状態で該高分子フィルム基体上に連続
磁性薄膜を形成する磁気記録媒体の製造装置において、 前記主ローラーは表面に規則的な凹凸の形状を有するこ
とを特徴とする磁気記録媒体の製造装置。 2)前記主ローラーは表面にピッチ25〜500本/イ
ンチの平行構造の溝を有する特許請求の範囲第1項記載
の磁気記録媒体の製造装置。 3)前記主ローラーは表面にピッチ25〜500本/イ
ンチの網目構造の溝を有する特許請求の範囲第1項記載
の磁気記録媒体の製造装置。 4)前記主ローラーは表面にピッチ25〜10000個
/mm^2の穴を有する特許請求の範囲第1項記載の磁
気記録媒体の製造装置。
[Claims] 1) A polymer film substrate is continuously run, and a continuous magnetic field is applied onto the polymer film substrate while being wound around a main roller that is a support for the polymer film substrate present at a predetermined position. An apparatus for manufacturing a magnetic recording medium that forms a thin film, wherein the main roller has a regular uneven shape on its surface. 2) The apparatus for manufacturing a magnetic recording medium according to claim 1, wherein the main roller has parallel grooves on its surface with a pitch of 25 to 500 grooves/inch. 3) The apparatus for manufacturing a magnetic recording medium according to claim 1, wherein the main roller has a groove having a network structure with a pitch of 25 to 500 grooves/inch on its surface. 4) The apparatus for manufacturing a magnetic recording medium according to claim 1, wherein the main roller has holes on its surface with a pitch of 25 to 10,000 holes/mm^2.
JP32265987A 1987-12-22 1987-12-22 Manufacture of magnetic recording medium Pending JPH01165033A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP32265987A JPH01165033A (en) 1987-12-22 1987-12-22 Manufacture of magnetic recording medium

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP32265987A JPH01165033A (en) 1987-12-22 1987-12-22 Manufacture of magnetic recording medium

Publications (1)

Publication Number Publication Date
JPH01165033A true JPH01165033A (en) 1989-06-29

Family

ID=18146164

Family Applications (1)

Application Number Title Priority Date Filing Date
JP32265987A Pending JPH01165033A (en) 1987-12-22 1987-12-22 Manufacture of magnetic recording medium

Country Status (1)

Country Link
JP (1) JPH01165033A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8023009B2 (en) 2007-03-27 2011-09-20 Fujifilm Corporation Imaging apparatus for correcting optical distortion and wide-angle distortion

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8023009B2 (en) 2007-03-27 2011-09-20 Fujifilm Corporation Imaging apparatus for correcting optical distortion and wide-angle distortion

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