JPH01165027A - Production for magnetic recording medium - Google Patents
Production for magnetic recording mediumInfo
- Publication number
- JPH01165027A JPH01165027A JP32157587A JP32157587A JPH01165027A JP H01165027 A JPH01165027 A JP H01165027A JP 32157587 A JP32157587 A JP 32157587A JP 32157587 A JP32157587 A JP 32157587A JP H01165027 A JPH01165027 A JP H01165027A
- Authority
- JP
- Japan
- Prior art keywords
- film
- base film
- rolling
- magnetic
- magnetic recording
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000005291 magnetic effect Effects 0.000 title claims abstract description 59
- 238000004519 manufacturing process Methods 0.000 title claims description 12
- 238000000034 method Methods 0.000 claims abstract description 38
- 239000010408 film Substances 0.000 claims description 47
- 239000010409 thin film Substances 0.000 claims description 18
- 239000002184 metal Substances 0.000 claims description 8
- 229910052751 metal Inorganic materials 0.000 claims description 8
- 238000005098 hot rolling Methods 0.000 claims description 6
- 238000010030 laminating Methods 0.000 claims description 2
- 238000005096 rolling process Methods 0.000 abstract description 39
- 229920001721 polyimide Polymers 0.000 abstract description 9
- 238000010438 heat treatment Methods 0.000 abstract description 8
- 239000010410 layer Substances 0.000 description 28
- 230000003746 surface roughness Effects 0.000 description 15
- 230000005415 magnetization Effects 0.000 description 5
- 238000010586 diagram Methods 0.000 description 4
- 239000011241 protective layer Substances 0.000 description 4
- 230000000052 comparative effect Effects 0.000 description 3
- 230000006866 deterioration Effects 0.000 description 3
- 230000005294 ferromagnetic effect Effects 0.000 description 3
- 238000005498 polishing Methods 0.000 description 3
- -1 5i02 Inorganic materials 0.000 description 2
- 229910052799 carbon Inorganic materials 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 238000011156 evaluation Methods 0.000 description 2
- 230000002093 peripheral effect Effects 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 229910020641 Co Zr Inorganic materials 0.000 description 1
- 229910020520 Co—Zr Inorganic materials 0.000 description 1
- 229910001030 Iron–nickel alloy Inorganic materials 0.000 description 1
- 239000004952 Polyamide Substances 0.000 description 1
- 239000004962 Polyamide-imide Substances 0.000 description 1
- 239000004642 Polyimide Substances 0.000 description 1
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- 235000021355 Stearic acid Nutrition 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 239000011230 binding agent Substances 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000003486 chemical etching Methods 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 229910052593 corundum Inorganic materials 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 235000014113 dietary fatty acids Nutrition 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 229930195729 fatty acid Natural products 0.000 description 1
- 239000000194 fatty acid Substances 0.000 description 1
- 239000000945 filler Substances 0.000 description 1
- 230000004907 flux Effects 0.000 description 1
- 230000001050 lubricating effect Effects 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 150000004767 nitrides Chemical class 0.000 description 1
- QIQXTHQIDYTFRH-UHFFFAOYSA-N octadecanoic acid Chemical compound CCCCCCCCCCCCCCCCCC(O)=O QIQXTHQIDYTFRH-UHFFFAOYSA-N 0.000 description 1
- OQCDKBAXFALNLD-UHFFFAOYSA-N octadecanoic acid Natural products CCCCCCCC(C)CCCCCCCCC(O)=O OQCDKBAXFALNLD-UHFFFAOYSA-N 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 230000035699 permeability Effects 0.000 description 1
- 238000005240 physical vapour deposition Methods 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 229920002492 poly(sulfone) Polymers 0.000 description 1
- 229920002647 polyamide Polymers 0.000 description 1
- 229920002312 polyamide-imide Polymers 0.000 description 1
- 229920000728 polyester Polymers 0.000 description 1
- 229920000642 polymer Polymers 0.000 description 1
- 229920006254 polymer film Polymers 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 238000005546 reactive sputtering Methods 0.000 description 1
- 238000005488 sandblasting Methods 0.000 description 1
- 239000002356 single layer Substances 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 239000008117 stearic acid Substances 0.000 description 1
- 238000001771 vacuum deposition Methods 0.000 description 1
- 238000007738 vacuum evaporation Methods 0.000 description 1
- 229910001845 yogo sapphire Inorganic materials 0.000 description 1
Landscapes
- Manufacturing Of Magnetic Record Carriers (AREA)
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は磁気記録媒体の製造方法に関し、特に耐熱性ベ
ースフィルムを使用した金属薄膜型磁気記録媒体の製造
方法に関する。DETAILED DESCRIPTION OF THE INVENTION [Industrial Application Field] The present invention relates to a method for manufacturing a magnetic recording medium, and particularly to a method for manufacturing a metal thin film type magnetic recording medium using a heat-resistant base film.
最近、塗布型磁気記録媒体に代わって、高い保磁力と残
留磁束密度とを有する金属薄膜型磁気記録媒体が注目さ
れている。一般に、金属薄膜型磁気記録媒体は、高分子
ベースフィルム上に真空蒸着等により金属薄膜の磁性層
を形成している。そして、磁性層の厚さを塗布型の磁性
層と比較して約1710程度にすることができる。Recently, instead of coated magnetic recording media, metal thin film magnetic recording media having high coercive force and residual magnetic flux density have been attracting attention. In general, a metal thin film type magnetic recording medium has a magnetic layer of a metal thin film formed on a polymer base film by vacuum deposition or the like. The thickness of the magnetic layer can be made approximately 1710 mm thick compared to a coating type magnetic layer.
(発明が解決しようとする問題点)
上述のように金属薄膜型磁気記録媒体は、その厚さが薄
いので高周波特性に優れているが、その反面磁性層が薄
い為にベースフィルムの表面粗さの影響を受けやすい欠
点がある。つまり一般にベースフィルムの表面には粗大
突起が高さ0.1〜0.5 #IjI程度あり、ベース
フィルム上に形成された金属薄膜の磁性層も同様に表面
の粗大突起が高さ0.1〜0.5鱗程度になってしまう
。磁性層の表面粗さが大きいと、例えば磁気記録テープ
の場合スペーシングロスによる高域の周波数特性の劣化
、ドロップアウトあるいはレベル変動等の原因となる。(Problems to be Solved by the Invention) As mentioned above, metal thin film magnetic recording media have excellent high frequency characteristics because of their thin thickness, but on the other hand, because the magnetic layer is thin, the surface roughness of the base film It has the disadvantage of being susceptible to In other words, the surface of the base film generally has coarse protrusions with a height of about 0.1 to 0.5 #IjI, and similarly the magnetic layer of the metal thin film formed on the base film has coarse protrusions on the surface with a height of 0.1 to 0.5 #IjI. It becomes about 0.5 scales. If the surface roughness of the magnetic layer is large, for example, in the case of a magnetic recording tape, it causes deterioration of high frequency characteristics due to spacing loss, dropouts, level fluctuations, etc.
従来、上記のような磁性層の表面粗さを小さくする為、
ベースフィルム上に形成された磁性層を研摩するか、あ
るいはベースフィルムをあらかじめ研磨した後にその研
摩面に磁性層を形成している。しかし前者は、磁性層の
厚さが不均一になるとともにベースフィルムと比較して
高価な磁性層を削り落す為不経済であり、かつ製造効率
が悪くなる欠点がある。また後者は、研摩によりベース
フィルムの強度が低下するとともに、ベースフィルムの
種類によっては研摩できない欠点がある。Conventionally, in order to reduce the surface roughness of the magnetic layer as described above,
The magnetic layer formed on the base film is polished, or the base film is polished in advance and then the magnetic layer is formed on the polished surface. However, the former method has the disadvantage that the thickness of the magnetic layer becomes non-uniform, and the magnetic layer, which is more expensive than the base film, is scraped off, making it uneconomical and reducing manufacturing efficiency. Furthermore, the latter has the disadvantage that the strength of the base film decreases due to polishing, and that depending on the type of base film, polishing cannot be performed.
本発明は、このような問題点を解決するために成された
もの°であり、その目的は、研摩を行なわなくとも周波
数特性の劣化、ドロップアウトおよびレベル変動などが
発生しない磁気記録媒体を製造できる方法を提供するこ
とにある。The present invention was made to solve these problems, and its purpose is to manufacture a magnetic recording medium that does not suffer from deterioration of frequency characteristics, dropouts, or level fluctuations even without polishing. The goal is to provide a method that can be used.
本発明の上記目的は、ベースフィルム上に磁性層を積層
する工程を含む磁気記録媒体の製造方法において、前記
ベースフィルムを含む部材を加熱圧延する工程を含むこ
とを特徴とする磁気記録媒体の製造方法により達成でき
る。The above-mentioned object of the present invention is to manufacture a magnetic recording medium, characterized in that the method for manufacturing a magnetic recording medium includes the step of laminating a magnetic layer on a base film, the method comprising the step of hot rolling a member including the base film. This can be achieved by this method.
本発明の方法に含まれる圧延工程においては、ベースフ
ィルムを含む部材が適度に加熱され、適度な圧力に設定
した圧延ローラー等に通されるので、ベースフィルムが
塑性変形し、その部材表面に存在する粗大突起を先に述
べたような種々の問題(ドロップアウトの発生)の発生
原因とならない程度にまでつぶすことができる。具体的
には、粗大突起の高さが0.1mm以下になるようにつ
ぶせば、それら種々の問題を防止できる。なお、本発明
の方法における加熱圧延工程で処理されるベースフィル
ムを含む部材には、ベースフィルム単体、ベースフィル
ム上に磁性層が積層されたもの、あるいは必要に応じて
他の層が設けられているものも含まれる。また、加熱圧
延工程は、圧延ローラーにより行なうことだけでなくプ
レス機等により行なうことも含む。In the rolling step included in the method of the present invention, the member including the base film is heated to an appropriate level and passed through a rolling roller set at an appropriate pressure, so that the base film is plastically deformed and exists on the surface of the member. It is possible to crush the large protrusions to such an extent that they do not cause the various problems (occurrence of dropouts) mentioned above. Specifically, these various problems can be prevented by crushing the coarse protrusions to a height of 0.1 mm or less. Note that the member including the base film treated in the hot rolling step in the method of the present invention may include a base film alone, a base film with a magnetic layer laminated thereon, or other layers provided as necessary. This includes those who are present. Moreover, the hot rolling process includes not only carrying out with a rolling roller but also carrying out with a press machine or the like.
以下、圧延ローラーを用いる場合の本発明の方法を詳細
に説明する。Hereinafter, the method of the present invention using a rolling roller will be explained in detail.
本発明の方法に用いる圧延ローラーの温度および圧力は
、上述したように、粗大突起の高さが0.1μ以下にな
るようにつぶすことが可能である温度および圧力にする
ことが望ましい。したがって、ベースフィルムを含む部
材の構成や種類、それが有する粗大突起の大きさ等に応
じてそれらの値を適宜選定すればよい。なお、温度は高
温が好ましい。具体的には例えばベースフィルムとして
ポリイミドフィルムを用いた場合には、圧延ローラーの
温度は150℃以上、圧力を30kg/mm 2〜60
kg/ll1ff12程度つまりベースフィルムが塑性
変形する圧力にすれば、粗大突起に荷重が集中してつぶ
れる。ただし、本発明の方法における加熱手段は、圧延
ローラーによる加熱に限られるものではなく、圧延ロー
ラーとは別途に加熱手段を設け、その加熱手段により媒
体を加熱しつつ室温程度の温度の圧延ローラーにその媒
体を通すことも可能である。本発明に用いる圧延ローラ
ーの表面粗さは、磁気記録媒体として求められる適度な
表面粗さの制御を阻害しない程度の表面粗さであればよ
い。特に、媒体の記録再生面となる側、すなわち例えば
ベースフィルムの片面にのみ磁気層を積層する場合の磁
気層側もとくは磁性層を積層する予定の側の面に接触す
る圧延ローラーの表面粗度が0.5 S (最大高さ0
.5μ以下)以上、好ましくは0.23 (最大高さ0
.2−以下)以上である。As mentioned above, the temperature and pressure of the rolling roller used in the method of the present invention are preferably such that the coarse protrusions can be crushed to a height of 0.1 μm or less. Therefore, these values may be appropriately selected depending on the structure and type of the member including the base film, the size of the coarse protrusions it has, and the like. Note that the temperature is preferably high. Specifically, for example, when a polyimide film is used as the base film, the temperature of the rolling roller is 150°C or higher, and the pressure is 30 kg/mm 2 to 60
If the pressure is about 12 kg/11ff12, that is, the base film is plastically deformed, the load will be concentrated on the coarse protrusions and they will collapse. However, the heating means in the method of the present invention is not limited to heating with a rolling roller; a heating means is provided separately from the rolling roller, and the heating means heats the medium while heating the rolling roller at about room temperature. It is also possible to pass through the medium. The surface roughness of the rolling roller used in the present invention may be such that it does not impede the control of the appropriate surface roughness required for a magnetic recording medium. In particular, the surface roughness of the rolling roller that comes into contact with the recording/reproducing surface of the medium, i.e., when the magnetic layer is laminated only on one side of the base film, the magnetic layer side, or the side on which the magnetic layer is to be laminated. degree is 0.5 S (maximum height 0
.. 5 μ or less), preferably 0.23 (maximum height 0
.. 2- or less) or more.
なお、上記表面粗さは、テーラーボブソン社製タリステ
ップにて0.1μX2.5.gスタイラス使用、荷重2
00gの条件で測定したものである。本発明に用いる圧
延ローラーには、上述した表面粗さ、および加圧力を有
する圧延ローラーならばどのようなものを用いても良い
。そのローラーの表面は、例えばFc、Cr%Co、A
I、Sus等の金属であることが好ましい。The above surface roughness was determined by Talystep manufactured by Taylor Bobson Co., Ltd. to be 0.1μ×2.5. Using g stylus, load 2
It was measured under the condition of 00g. As the rolling roller used in the present invention, any rolling roller having the above-mentioned surface roughness and pressing force may be used. The surface of the roller is, for example, Fc, Cr%Co, A
A metal such as I, Sus, etc. is preferable.
第1図〜第3図は、本発明の種々の実施例態様を示す模
式図である。これらの実施態様は、少なくとも耐熱性ベ
ースフィルムを有する部材3の記録再生面となる側(表
面)4とその裏面5を各々圧する圧延ローラー1および
2により表面4に存在する粗大突起をつぶす方法である
。第1図に示す態様は、圧延面に対して水平に部材3を
送る方法である。第2図に示す態様は、圧延面に対して
垂直に、圧延ローラー1の外周面の半分に表面4が接触
するよう部材3を送る方法である。第3図に示す態様は
、圧延面に対して垂直に、圧延ロ−ラー2の外周面の半
分に裏面5が接触するよう部材3を送る方法である。圧
延ローラーを加熱源として部材3を加熱する場合には、
第2図および第3図に示す実施態様はローラーと媒体と
の接触面積が大きいので熱効率が良いという利点がある
。1 to 3 are schematic diagrams showing various embodiments of the present invention. In these embodiments, coarse protrusions existing on the surface 4 are crushed by rolling rollers 1 and 2 that press the recording/reproducing surface 4 and the back surface 5 of the member 3 having at least a heat-resistant base film, respectively. be. The embodiment shown in FIG. 1 is a method of feeding the member 3 horizontally to the rolling surface. The embodiment shown in FIG. 2 is a method in which the member 3 is fed perpendicularly to the rolling surface so that the surface 4 contacts half of the outer peripheral surface of the rolling roller 1. The embodiment shown in FIG. 3 is a method in which the member 3 is fed perpendicularly to the rolling surface so that the back surface 5 contacts half of the outer peripheral surface of the rolling roller 2. When heating the member 3 using a rolling roller as a heat source,
The embodiment shown in FIGS. 2 and 3 has the advantage of good thermal efficiency because the contact area between the roller and the medium is large.
なお、本発明はこれらに限定されるものではなく、多数
の圧延ローラーを1本の媒体の製造ラインとして設置し
、連続的に圧延を行なう態様、あるいは第1図〜第3図
の方法を複数回繰り返す態様など、種々の方法を用いる
ことができる。It should be noted that the present invention is not limited to these methods, and may include a mode in which a large number of rolling rollers are installed as a production line for one medium and rolling is performed continuously, or a plurality of methods shown in FIGS. 1 to 3 are used. Various methods can be used, such as repeating the process several times.
本発明においては、圧延時の部材3のテンションまたは
送りスピードを適宜選定することによって、粗大突起の
つぶれ具合いを制御することもできる。In the present invention, the degree of collapse of the coarse protrusions can also be controlled by appropriately selecting the tension or feeding speed of the member 3 during rolling.
以上、本発明の方法における圧延ローラーにより粗大突
起を平坦化する工程を説明した。この工程を行なうこと
により、従来性なわれていたバニッシュ工程を省略する
ことができる。すなわち本発明ニより、先に述べたバニ
ッシュに併なう問題(保護層の欠落による磁性層の露出
など)を解決することができる。本発明の方法における
加熱圧延以外の工程は、従来より公知の磁気記録媒体の
製造方法において用いられる工程を適宜用いることがで
きる。以下、それらの工程を説明する。The process of flattening coarse protrusions using a rolling roller in the method of the present invention has been described above. By performing this step, the conventional burnishing step can be omitted. That is, the present invention can solve the above-mentioned problems associated with vanishing (such as exposure of the magnetic layer due to lack of the protective layer). As steps other than hot rolling in the method of the present invention, steps used in conventionally known methods for manufacturing magnetic recording media can be used as appropriate. Below, those steps will be explained.
第4図は、磁気記録媒体の一例を示す部分断面図である
。ベースフィルム6はポリイミド、ポリアミド、ポリア
ミドイミド、ポリスルホン等の耐熱性の高分子フィルム
であり、その表面は易滑性を向上させる目的で適度の表
面粗さを有する。その粗さの制御は、フィラーの充填、
化学エツチング法、サンドブラスト法等により行なわれ
ているが、先に述べた原因により粗大突起が存在するこ
とが多く、この支持体6を単独で本発明における圧延ロ
ーラーを用いる工程を施しても良い。このベースフィル
ム6に磁性薄膜7を成膜する。磁性層@7は、Fe、C
o、Ni等を主成分とする強磁性合金膜、強磁性酸化物
膜、強磁性窒化物等の単層または多層であり、その膜厚
は通常0.01〜1.0−程度である。その成膜方法に
は、真空蒸着、スパッタリング、イオンブレーティング
等の物理蒸着あるいはメツキ法等が用いられる。このよ
うにして磁性薄膜7が成膜された支持体6に本発明にお
ける圧延ローラーを用いる工程を施しても良い。また、
従来より公知の磁気記録媒体の製造においては、支持体
6と磁性薄膜7との付着力の向上、結晶配向性、磁気特
性の向上を目的としてAI、Ge%Cr、Ti、5i0
2等の薄膜を支持体6と磁性薄膜7との間に設けたり、
Fe−Ni膜、Co−Zr膜等の高透磁率層を垂直磁化
膜の裏打ち層として設けたりする場合もあるが、それら
薄膜や裏打ち層が形成された媒体に本発明における圧延
ローラーを用いる工程を施しても良い。FIG. 4 is a partial cross-sectional view showing an example of a magnetic recording medium. The base film 6 is a heat-resistant polymer film such as polyimide, polyamide, polyamideimide, polysulfone, etc., and its surface has an appropriate surface roughness for the purpose of improving slipperiness. Its roughness can be controlled by filling with filler,
This is carried out by a chemical etching method, a sandblasting method, etc., but coarse protrusions are often present due to the reasons mentioned above, and this support 6 may be subjected to the process using a rolling roller in the present invention alone. A magnetic thin film 7 is formed on this base film 6. The magnetic layer @7 is made of Fe, C
It is a single layer or multilayer of a ferromagnetic alloy film, a ferromagnetic oxide film, a ferromagnetic nitride, etc. whose main components are O, Ni, etc., and the film thickness is usually about 0.01 to 1.0 -. As the film forming method, vacuum evaporation, sputtering, physical vapor deposition such as ion blating, plating method, etc. are used. The support 6 on which the magnetic thin film 7 has been formed in this manner may be subjected to the step of using a rolling roller in the present invention. Also,
In the production of conventionally known magnetic recording media, AI, Ge%Cr, Ti, 5i0
A thin film such as No. 2 is provided between the support 6 and the magnetic thin film 7,
In some cases, a high magnetic permeability layer such as a Fe-Ni film or a Co-Zr film is provided as a backing layer for a perpendicular magnetization film, but the process of using a rolling roller in the present invention on a medium on which such a thin film or backing layer is formed may be applied.
また、媒体に発生するカールを緩和する目的で支持体の
表裏両面に磁性薄膜を成膜した部材に本発明における加
熱圧延工程を施しても良い。Further, the hot rolling process of the present invention may be applied to a member in which a magnetic thin film is formed on both the front and back surfaces of a support for the purpose of alleviating curls occurring in the medium.
また、磁性薄膜上に耐蝕性、対摩耗性、潤滑性などの向
上を目的として、Al2O3、5i02、Si3N4
、M o、Ni等の無機保護層、あるいはフッ素樹脂、
脂肪酸エステル、ステアリン酸等の有機物潤滑層を設け
る場合もあり、また適当なバックコート層を設ける場合
もある。In addition, Al2O3, 5i02, Si3N4, etc. are added to the magnetic thin film for the purpose of improving corrosion resistance, wear resistance, lubricity, etc.
, Mo, an inorganic protective layer such as Ni, or a fluororesin,
An organic lubricating layer such as fatty acid ester or stearic acid may be provided, and a suitable back coat layer may also be provided.
以上説明したように、本発明によれば圧延ローラーを用
いて粗大突起を十分につぶすことができるので、バニッ
シュを行なう必要が無く、バニッシュに起因する問題、
すなわちベースフィルムの強度が低下する、磁性層の厚
さが不均一になる、高価な磁性層を削り落さねばならな
い等の問題の発生が無い。As explained above, according to the present invention, coarse protrusions can be sufficiently crushed using rolling rollers, so there is no need to perform burnishing, and problems caused by burnishing can be solved.
That is, there are no problems such as a decrease in the strength of the base film, nonuniform thickness of the magnetic layer, or the need to scrape off an expensive magnetic layer.
更には、粗大突起を十分につぶすことができるので、粗
大突起に起因する問題、すなわち高域の周波数特性の劣
化、ドロップアウト、レベル変動等の間層を解決でき、
良好な磁気記録媒体を製造できる。Furthermore, since the coarse protrusions can be sufficiently crushed, problems caused by the coarse protrusions, such as deterioration of high frequency characteristics, dropouts, and level fluctuations, can be solved.
Good magnetic recording media can be manufactured.
(実施例〕 以下、本発明を実施例により更に詳細に説明する。(Example〕 Hereinafter, the present invention will be explained in more detail with reference to Examples.
実施例1
まず、第5図に示す表面粗さを有する12.厚のポリイ
ミドフィルムを用意した。なお、表面粗さは、テーラー
ボブソン社製タリステップにて、0.1 gX2.5
pスタイラス使用、荷重200gの条件で測定したもの
である。Example 1 First, 12.0 mm has the surface roughness shown in FIG. A thick polyimide film was prepared. The surface roughness is 0.1 g x 2.5 using Talystep manufactured by Taylor Bobson.
Measurements were made using a P stylus and a load of 200 g.
次いで、そのフィルムを表面粗さが0.28のFe製の
1組の圧延ローラーに通した。その際のローラーの温度
は200℃ローラーの圧力は50kg/ml12とした
。The film was then passed through a set of rolling rollers made of Fe with a surface roughness of 0.28. The temperature of the roller at that time was 200° C. and the pressure of the roller was 50 kg/ml12.
以上のようにして粗大突起をつぶした後のフィルムの表
面粗さを前記条件で同様にして測定した結果を第6図に
示す。第5図と第6図を比較することにより明らかなよ
うに、本発明における圧延ローラーを用いる工程により
、粗大突起をつぶせることが確認できた。The surface roughness of the film after the coarse protrusions were crushed as described above was measured under the same conditions as described above, and the results are shown in FIG. As is clear from comparing FIG. 5 and FIG. 6, it was confirmed that the process using a rolling roller in the present invention can crush coarse protrusions.
次いで、その粗大突起がつぶされたフィルムの片面に、
電子ビーム加熱連続蒸着装置を用いて、厚さが0.4
pであり、Co79重量%、Cr21重量%のCo−C
r垂直磁化膜を成膜した。その際のキャン温度は150
℃とし、成膜速度は20鱗/分とした。Next, on one side of the film with the coarse protrusions crushed,
The thickness was 0.4 using an electron beam heating continuous evaporation device.
p, Co-C with 79% by weight Co and 21% by weight Cr
An r perpendicular magnetization film was formed. The can temperature at that time was 150
℃, and the film formation rate was 20 scales/min.
以上のようにして成膜したCo−Cr垂直磁化膜の表面
粗さを、前記条件で同様にして測定したところ、表面の
凹凸の最高高さは0.067LIIであった。また、そ
の磁気特性は4πM s = 4800ガウス、Hc”
= 12000 e 、 Hc’= 7000 eであ
った。When the surface roughness of the Co--Cr perpendicular magnetization film formed as described above was measured in the same manner under the above conditions, the maximum height of surface irregularities was 0.067 LII. In addition, its magnetic properties are 4πM s = 4800 Gauss, Hc”
= 12000 e, Hc' = 7000 e.
次いで、その垂直磁化膜の上に、反応性スパッタリング
法により、厚さが120人のCo酸化膜(保護層)を成
膜した。Next, a Co oxide film (protective layer) having a thickness of 120 mm was formed on the perpendicularly magnetized film by a reactive sputtering method.
次いで、その裏面に厚さが0.5 u+のポリエステル
系バインダーにカーボン粒子を含有したバックコート層
を形成した。Next, a back coat layer containing carbon particles in a polyester binder having a thickness of 0.5 μ+ was formed on the back surface.
次いで、そのバックコート層が形成されたフィルムを8
IIIII1幅に裁断して本発明による磁気テープを完
成した。Next, the film on which the back coat layer was formed was heated to 8
The magnetic tape according to the present invention was completed by cutting it into a width of III1.
実施例2
圧延ローラーに通す工程を、ポリイミドフィルム単体に
は行なわない以外は、実施例1と同様にしてポリイミド
フィルムにCo−Cr垂直磁化膜を成膜した。次いで、
その磁化膜を成膜したポリイミドフィルムを実施例1と
同様に条件で圧延ローラーに通した。Example 2 A Co--Cr perpendicular magnetization film was formed on a polyimide film in the same manner as in Example 1, except that the process of passing the polyimide film through a rolling roller was not performed on the polyimide film alone. Then,
The polyimide film on which the magnetized film was formed was passed through a rolling roller under the same conditions as in Example 1.
以上のようにして得た媒体のCo−Cr垂直磁化膜の表
面粗さを実施例1と同様にして測定したところ、表面の
凹凸の最高高さは0.06−であった。この値が実施例
1における値と同じであることから、本発明における圧
延ローラーに通す工程を、支持体単独に対して行なって
も、磁性薄膜が成膜された支持体に行なっても、同様に
粗大突起を良好につぶすことができることを確認できた
。When the surface roughness of the Co--Cr perpendicular magnetization film of the medium obtained as described above was measured in the same manner as in Example 1, the maximum height of surface irregularities was 0.06-. Since this value is the same as the value in Example 1, the process of passing through the rolling roller in the present invention is the same regardless of whether it is performed on the support alone or on the support on which the magnetic thin film has been formed. It was confirmed that coarse protrusions could be crushed well.
次いで、その媒体に実施例1と同様にして保護層および
バックコート層を形成し、8mm幅に裁断して、本発明
による磁気テープを完成した。Next, a protective layer and a back coat layer were formed on the medium in the same manner as in Example 1, and the medium was cut into a width of 8 mm to complete a magnetic tape according to the present invention.
実施例3
圧延ローラーの圧力をローラーの自重にした以外は実施
例1と全く同様にして、本発明による磁気テープを完成
した。なお、本実施例における磁性薄膜成膜直後のその
表面の凹凸の最高高さは0.08鱗であった。Example 3 A magnetic tape according to the present invention was completed in the same manner as in Example 1 except that the pressure of the rolling roller was set to the roller's own weight. In this example, the maximum height of the unevenness on the surface of the magnetic thin film immediately after it was formed was 0.08 scale.
比較例1
圧延ローラーに通す工程を行なわない以外は実施例1と
全く同様にして磁気テープを完成した。Comparative Example 1 A magnetic tape was completed in the same manner as in Example 1 except that the step of passing it through a rolling roller was not performed.
なお、本比較例における磁性薄膜成膜直後のその表面の
凹凸の最高高さは0.30μであった。In addition, in this comparative example, the maximum height of the unevenness on the surface of the magnetic thin film immediately after deposition was 0.30 μm.
評価
実施例1〜3s3よび比較例1〜2において作製した磁
気テープの輝度信号出力およびドロップアウトについて
、市販の8++onフオーマツトビデオデツキを用いて
評価した。その結果および評価条件を表−1に示す。The brightness signal output and dropout of the magnetic tapes produced in Evaluation Examples 1 to 3s3 and Comparative Examples 1 to 2 were evaluated using a commercially available 8++ format video deck. The results and evaluation conditions are shown in Table-1.
表−1に示した結果から明らかなように、本発明の方法
により作製した磁気記録媒体は輝度信号出力に優れ、ド
ロップアウトの少ないものであることが確認できた。As is clear from the results shown in Table 1, it was confirmed that the magnetic recording medium produced by the method of the present invention has excellent brightness signal output and less dropout.
第1図〜第3図は、本発明の種々の実施態様を示す模式
図、第4図は磁気記録媒体の一例を示す図、第5図およ
び第6図は実施例1におけるポリイミドフィルムの表面
粗さを示す図である。
1.2−−−一圧延ローラー、
3−−−−−−−−−一媒体、
4−−−−−−媒体の表側、
5−−−−−−−一媒体の裏側、
6−−−−−−ψ−ベースフィルム、
? −−−−−−−−−一磁性薄膜。1 to 3 are schematic diagrams showing various embodiments of the present invention, FIG. 4 is a diagram showing an example of a magnetic recording medium, and FIGS. 5 and 6 are diagrams showing the surface of the polyimide film in Example 1. It is a figure showing roughness. 1.2---One rolling roller, 3---------One medium, 4---Front side of the medium, 5---The back side of the medium, 6--- −−−−ψ−Base film, ? −−−−−−−−− Monomagnetic thin film.
Claims (2)
磁気記録媒体の製造方法において、前記ベースフィルム
を含む部材を加熱圧延する工程を含むことを特徴とする
磁気記録媒体の製造方法。(1) A method for manufacturing a magnetic recording medium that includes the step of laminating a magnetic layer on a base film, the method comprising the step of hot rolling a member including the base film.
項に記載の磁気記録媒体の製造方法。(2) Claim 1, wherein the magnetic layer is a metal thin film.
A method for manufacturing a magnetic recording medium according to paragraph 1.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP32157587A JPH01165027A (en) | 1987-12-21 | 1987-12-21 | Production for magnetic recording medium |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP32157587A JPH01165027A (en) | 1987-12-21 | 1987-12-21 | Production for magnetic recording medium |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH01165027A true JPH01165027A (en) | 1989-06-29 |
Family
ID=18134091
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP32157587A Pending JPH01165027A (en) | 1987-12-21 | 1987-12-21 | Production for magnetic recording medium |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH01165027A (en) |
-
1987
- 1987-12-21 JP JP32157587A patent/JPH01165027A/en active Pending
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