JPH01312066A - Manufacturing equipment for thin continuous film medium - Google Patents
Manufacturing equipment for thin continuous film mediumInfo
- Publication number
- JPH01312066A JPH01312066A JP14278788A JP14278788A JPH01312066A JP H01312066 A JPH01312066 A JP H01312066A JP 14278788 A JP14278788 A JP 14278788A JP 14278788 A JP14278788 A JP 14278788A JP H01312066 A JPH01312066 A JP H01312066A
- Authority
- JP
- Japan
- Prior art keywords
- film
- roll
- magnetic film
- guide roll
- thin film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004519 manufacturing process Methods 0.000 title claims description 11
- 238000000034 method Methods 0.000 claims abstract description 7
- 229920006254 polymer film Polymers 0.000 claims abstract description 6
- 239000010409 thin film Substances 0.000 claims description 20
- 239000010408 film Substances 0.000 claims description 14
- 230000037303 wrinkles Effects 0.000 abstract description 14
- 238000004804 winding Methods 0.000 abstract description 7
- 230000015572 biosynthetic process Effects 0.000 abstract 1
- 238000010586 diagram Methods 0.000 description 4
- 238000001704 evaporation Methods 0.000 description 2
- 230000008020 evaporation Effects 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- 238000001771 vacuum deposition Methods 0.000 description 2
- 229910000684 Cobalt-chrome Inorganic materials 0.000 description 1
- 239000004642 Polyimide Substances 0.000 description 1
- 239000010952 cobalt-chrome Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000000696 magnetic material Substances 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 229920001721 polyimide Polymers 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Abstract
Description
【発明の詳細な説明】 −〔産業上の利用分野〕 本発明は、連続磁性媒体の製造装置に関する。[Detailed description of the invention] − [Industrial application field] The present invention relates to an apparatus for manufacturing continuous magnetic media.
近年、磁気記録の高密度化の要求に伴い磁性層が磁性材
料のみによって形成される所謂連続磁性媒体の研究が盛
んになってきた。In recent years, with the demand for higher density magnetic recording, research into so-called continuous magnetic media in which the magnetic layer is formed only of magnetic materials has become active.
真空蒸着法、ス・母ツタ法或いはメツキ法等によって作
成される連続磁性媒体は、磁性層が連続薄膜であるため
に長手記録は熱論の事、垂直記録方式において特に記録
密度の飛躍的向上が期待されておシ、各種磁気テープ或
いはディスク状磁気記録媒体等様々な製品形態への応用
開発が進められている。Continuous magnetic media created by vacuum evaporation method, suction method, plating method, etc. have a continuous thin magnetic layer, so longitudinal recording is a matter of course, and the perpendicular recording method has a dramatic improvement in recording density. Due to the high expectations, development of applications for various product forms such as various magnetic tapes and disk-shaped magnetic recording media is underway.
従来の連続薄膜媒体の製造装置を第1図に示す。 A conventional continuous thin film media manufacturing apparatus is shown in FIG.
送シ出しロール1から搬送されたベースフィルム2は、
ガイドロール3を経て、キャン4に送られる。そこで、
真空蒸着法、スパッタリング法、イオンブレーティング
法などにより、磁性薄膜を形成した後、再びガイドロー
ル3′を経て1巻き取シロール5に送られ1巻取られる
。6はマスク、7は蒸発源である。The base film 2 conveyed from the feed roll 1 is
It passes through guide roll 3 and is sent to can 4. Therefore,
After a magnetic thin film is formed by a vacuum evaporation method, a sputtering method, an ion blating method, etc., it is sent to the winding roll 5 again via the guide roll 3' and taken up once. 6 is a mask, and 7 is an evaporation source.
ここで、第2図に示すように、ガイドロール3′から巻
取ロール5にかけて、「シわ」8が発生するということ
がしばしば起こった。Here, as shown in FIG. 2, "wrinkles" 8 often occurred from the guide roll 3' to the take-up roll 5.
この「しわ」が発生した媒体は、大きなスペーシングロ
スを生み、耐久性を大幅に低下させるため、実用上使用
不可能となり、生産性向上のための大きな障害となって
いた。Media with such "wrinkles" generate large spacing losses and significantly reduce durability, making them practically unusable and posing a major obstacle to improving productivity.
それ故に本発明の課題は「しわ」の発生しにくく、生産
性の高い連続薄膜磁性媒体製造装置を提供することにあ
る。Therefore, an object of the present invention is to provide a continuous thin film magnetic medium manufacturing apparatus that is less likely to cause wrinkles and has high productivity.
本発明によれば、長尺の高分子フィルムにキャン方式に
より磁性薄膜を付着することで連続薄膜磁性媒体を作與
する装置において、前記高分子フィルム上の膜形成部分
の内側に対向する凸部を有するガイドロール及び巻取ロ
ールを含むことを特徴とする連続薄膜媒体の製造装置が
得られる。According to the present invention, in an apparatus for producing a continuous thin film magnetic medium by attaching a magnetic thin film to a long polymer film by a can method, a convex portion facing the inside of a film forming portion on the polymer film is provided. There is obtained an apparatus for manufacturing a continuous thin film medium, characterized in that it includes a guide roll and a take-up roll.
第6図に加えて第1図を参照して1本発明の一実施例に
よる製造装置は、ガイドロール3′として。Referring to FIG. 1 in addition to FIG. 6, a manufacturing apparatus according to an embodiment of the present invention is illustrated as a guide roll 3'.
ベースフィルム2上に形成された連続磁性薄膜10の内
側に対向する凸部11を有したものを用いている。この
凸部11は段差9を形成するものである。なお同様な凸
部11を巻取ロール5にも設けることは好ましい。A continuous magnetic thin film 10 formed on a base film 2 and having a convex portion 11 facing inside is used. This convex portion 11 forms a step 9. Note that it is preferable to provide a similar convex portion 11 on the winding roll 5 as well.
以下、具体的な例を幾つか挙げて説明する。Hereinafter, some specific examples will be given and explained.
具体例 l
第2図において2幅500 [mm〕のポリイミドから
なるベースフィルム2上に、第6図で示す様なキャンを
用いてスパッタリング法によ、!l) 0.2μm厚の
CoCr膜を幅400 (+nm+)で形成した。Concrete Example 1 In Fig. 2, sputtering is performed on a base film 2 made of polyimide with a width of 500 [mm] using a can as shown in Fig. 6! l) A 0.2 μm thick CoCr film was formed with a width of 400 (+nm+).
このとき、ガイドロール3′及び巻取ロール5にそれぞ
れ凸部11を設けて段差を生じさせる。そしてその段差
の位置C)0をO〜100 [ml 捷で変化させ、そ
れぞれ1000〔m〕の長さの連続磁性薄膜媒体を作製
した時に「しわ」が発生する頻度を測定した。At this time, a protrusion 11 is provided on each of the guide roll 3' and the take-up roll 5 to create a step. The position C)0 of the step was varied by 0 to 100 [ml], and the frequency of occurrence of "wrinkles" was measured when continuous magnetic thin film media each having a length of 1000 [m] were produced.
この時の段差は1幅10 [mm:] 、高さ0.2
elm:]とした。その結果を第3図に示す。第3図に
よると。The step difference at this time is 1 width 10 [mm:], height 0.2
elm:]. The results are shown in FIG. According to Figure 3.
事実上段差がベースフィルムにかかっていない。In fact, the step does not cover the base film.
X = O[mm〕よシも1段差を使用した方が「しわ
」の発生頻度が減少し、さらに段差が連続磁性薄膜よシ
内側にある時「しわ」の発生頻度は激減している。When X = O [mm], the frequency of occurrence of "wrinkles" is reduced when a one step difference is used, and furthermore, when the step is on the inner side of the continuous magnetic thin film, the frequency of "wrinkles" is drastically reduced.
具体例 2 第4図に本発明の別な具体例を示す。Specific example 2 FIG. 4 shows another specific example of the present invention.
ベースフィルム2及び磁性薄膜の組成、膜厚。Composition and film thickness of base film 2 and magnetic thin film.
作製条件1段差の幅と高さは具体例1とおなしであるが
、fイドロール3′および巻取ロール5の段差の位置を
ベースフィルム2の端から50〔調〕の位置に固定し、
磁性薄膜の形成する幅(Y)を変化させ、ベースフィル
ムの端からO〜100 [ml トした。Manufacturing conditions The width and height of one level difference are the same as in Example 1, but the position of the level difference of the fid roll 3' and the winding roll 5 is fixed at a position 50 degrees from the edge of the base film 2,
The width (Y) of the magnetic thin film was varied, and the width was 0 to 100 ml from the edge of the base film.
この状態でそれぞれ1000 Cm]の長さの連続磁性
薄膜を作製した時に「しわ」が発生する頻度を測定した
。In this state, when continuous magnetic thin films each having a length of 1000 cm were produced, the frequency of occurrence of "wrinkles" was measured.
その結果を第5図に示す。第5図かられかるように、具
体例1と同様に1段差が磁性薄膜にかがまだよくわから
ないが、磁性薄膜が形成されたところはそれだけ剛性が
増し1段差によって形成された。媒体に対する幅方向の
張力が有効に伝達されたためと考えられる。The results are shown in FIG. As can be seen from FIG. 5, as in Example 1, it is not yet clear whether the one step difference is due to the magnetic thin film, but where the magnetic thin film was formed, the rigidity increased accordingly and the one step difference was formed. This is thought to be because the tension in the width direction to the medium was effectively transmitted.
なお1本実施例において、凸部からなる段差の高さおよ
び幅はベースフィルムの種類、厚さ、磁性薄膜の種類、
厚さにより任意に選べばよく1本実施例に制限されない
。Note that in this example, the height and width of the step consisting of the convex portion are determined by the type and thickness of the base film, the type of magnetic thin film,
It may be arbitrarily selected depending on the thickness and is not limited to this embodiment.
以上述べたように1本発明によれば、「シわ」の発生頻
度の非常に少ない連続磁性薄膜媒体を信頼性よく得られ
ることができる。As described above, according to the present invention, it is possible to reliably obtain a continuous magnetic thin film medium with very low occurrence of "wrinkles".
第1図は本発明の一実施例による製造装置に用いられた
がイドロールをベースフィルムとの関係で示した説明図
、第2図は第1の具体例を示す説明図、第3図は第1の
具体例での「しわ」の発生頻度を示すグラフ、第4図は
第2の具体例を示す説明図、第5図は第2の具体例での
「しわ」の発生頻度を示すグラフ、第6図は製造装置全
体の概略構成を示す構成図、第7図は従来の製造装置で
の「しわ」の発生状態を示す要部のみの斜視図である。
1・・・送す出シロール、2・・・ベースフィルム、3
゜3′・・・−11イドロール、4・・・キャン、5・
・・巻き取りロール、6・・・マスク、7・・・蒸発源
、8・・・しわ、9・・・段差、10・・・連続磁性薄
膜、11・・凸部。FIG. 1 is an explanatory diagram showing the relationship between Idolol and the base film used in a manufacturing apparatus according to an embodiment of the present invention, FIG. 2 is an explanatory diagram showing the first specific example, and FIG. A graph showing the frequency of occurrence of "wrinkles" in the first specific example, FIG. 4 is an explanatory diagram showing the second specific example, and FIG. 5 is a graph showing the frequency of occurrence of "wrinkles" in the second specific example. , FIG. 6 is a block diagram showing a schematic configuration of the entire manufacturing apparatus, and FIG. 7 is a perspective view of only the main parts showing how wrinkles occur in the conventional manufacturing apparatus. 1... Output sheet roll, 2... Base film, 3
゜3'...-11 Idroll, 4...Can, 5.
... Winding roll, 6... Mask, 7... Evaporation source, 8... Wrinkle, 9... Step, 10... Continuous magnetic thin film, 11... Convex portion.
Claims (1)
を付着することで連続薄膜磁性媒体を作製する装置にお
いて、前記高分子フィルム上の膜形成部分の内側に対向
する凸部を有するガイドロール及び巻取ロールを含むこ
とを特徴とする連続薄膜媒体の製造装置。1. In an apparatus for producing a continuous thin film magnetic medium by attaching a magnetic thin film to a long polymer film by a can method, a guide roll having a convex portion facing inside a film forming portion on the polymer film; An apparatus for manufacturing a continuous thin film medium, comprising a take-up roll.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14278788A JPH01312066A (en) | 1988-06-11 | 1988-06-11 | Manufacturing equipment for thin continuous film medium |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14278788A JPH01312066A (en) | 1988-06-11 | 1988-06-11 | Manufacturing equipment for thin continuous film medium |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH01312066A true JPH01312066A (en) | 1989-12-15 |
Family
ID=15323596
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP14278788A Pending JPH01312066A (en) | 1988-06-11 | 1988-06-11 | Manufacturing equipment for thin continuous film medium |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH01312066A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2008139834A1 (en) * | 2007-05-14 | 2008-11-20 | Ulvac, Inc. | Film conveying device and winding-type vacuum film-forming method |
JP2019156549A (en) * | 2018-03-12 | 2019-09-19 | 住友金属鉱山株式会社 | Roll for preventing wrinkles from being produced on long substrate, method for preventing wrinkles from being produced, and continuous film-forming device including the same roll |
-
1988
- 1988-06-11 JP JP14278788A patent/JPH01312066A/en active Pending
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2008139834A1 (en) * | 2007-05-14 | 2008-11-20 | Ulvac, Inc. | Film conveying device and winding-type vacuum film-forming method |
JP5024972B2 (en) * | 2007-05-14 | 2012-09-12 | 株式会社アルバック | Film conveying apparatus and winding type vacuum film forming method |
JP2019156549A (en) * | 2018-03-12 | 2019-09-19 | 住友金属鉱山株式会社 | Roll for preventing wrinkles from being produced on long substrate, method for preventing wrinkles from being produced, and continuous film-forming device including the same roll |
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