JPS6223087Y2 - - Google Patents

Info

Publication number
JPS6223087Y2
JPS6223087Y2 JP1982042971U JP4297182U JPS6223087Y2 JP S6223087 Y2 JPS6223087 Y2 JP S6223087Y2 JP 1982042971 U JP1982042971 U JP 1982042971U JP 4297182 U JP4297182 U JP 4297182U JP S6223087 Y2 JPS6223087 Y2 JP S6223087Y2
Authority
JP
Japan
Prior art keywords
tray
wafer
air
semiconductor wafer
wafers
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1982042971U
Other languages
English (en)
Japanese (ja)
Other versions
JPS58144841U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP4297182U priority Critical patent/JPS58144841U/ja
Publication of JPS58144841U publication Critical patent/JPS58144841U/ja
Application granted granted Critical
Publication of JPS6223087Y2 publication Critical patent/JPS6223087Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Delivering By Means Of Belts And Rollers (AREA)
JP4297182U 1982-03-25 1982-03-25 半導体製造装置 Granted JPS58144841U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4297182U JPS58144841U (ja) 1982-03-25 1982-03-25 半導体製造装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4297182U JPS58144841U (ja) 1982-03-25 1982-03-25 半導体製造装置

Publications (2)

Publication Number Publication Date
JPS58144841U JPS58144841U (ja) 1983-09-29
JPS6223087Y2 true JPS6223087Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1987-06-12

Family

ID=30054069

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4297182U Granted JPS58144841U (ja) 1982-03-25 1982-03-25 半導体製造装置

Country Status (1)

Country Link
JP (1) JPS58144841U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20090179160A1 (en) * 2008-01-16 2009-07-16 Semiconductor Energy Laboratory Co., Ltd. Semiconductor substrate manufacturing apparatus

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5121474A (ja) * 1974-08-15 1976-02-20 Mitsubishi Electric Corp Handotaiuehatoriatsukaisochi

Also Published As

Publication number Publication date
JPS58144841U (ja) 1983-09-29

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