JPS62230021A - Ｘ線投影露光方式用照明系 - Google Patents

Ｘ線投影露光方式用照明系

Info

Publication number
JPS62230021A
JPS62230021A JP61074694A JP7469486A JPS62230021A JP S62230021 A JPS62230021 A JP S62230021A JP 61074694 A JP61074694 A JP 61074694A JP 7469486 A JP7469486 A JP 7469486A JP S62230021 A JPS62230021 A JP S62230021A
Authority
JP
Japan
Prior art keywords
ray
fzp
mask
plane
crystal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP61074694A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0577286B2 (enExample
Inventor
Masaru Koeda
小枝　勝
Kenji Iwahashi
岩橋　賢治
Masayuki Watanabe
正幸 渡辺
Masaru Kawada
勝 川田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shimadzu Corp
Original Assignee
Shimadzu Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shimadzu Corp filed Critical Shimadzu Corp
Priority to JP61074694A priority Critical patent/JPS62230021A/ja
Publication of JPS62230021A publication Critical patent/JPS62230021A/ja
Publication of JPH0577286B2 publication Critical patent/JPH0577286B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
JP61074694A 1986-03-31 1986-03-31 Ｘ線投影露光方式用照明系 Granted JPS62230021A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP61074694A JPS62230021A (ja) 1986-03-31 1986-03-31 Ｘ線投影露光方式用照明系

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP61074694A JPS62230021A (ja) 1986-03-31 1986-03-31 Ｘ線投影露光方式用照明系

Publications (2)

Publication Number Publication Date
JPS62230021A true JPS62230021A (ja) 1987-10-08
JPH0577286B2 JPH0577286B2 (enExample) 1993-10-26

Family

ID=13554591

Family Applications (1)

Application Number Title Priority Date Filing Date
JP61074694A Granted JPS62230021A (ja) 1986-03-31 1986-03-31 Ｘ線投影露光方式用照明系

Country Status (1)

Country Link
JP (1) JPS62230021A (enExample)

Also Published As

Publication number Publication date
JPH0577286B2 (enExample) 1993-10-26

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