JPS6222880Y2 - - Google Patents

Info

Publication number
JPS6222880Y2
JPS6222880Y2 JP1979007224U JP722479U JPS6222880Y2 JP S6222880 Y2 JPS6222880 Y2 JP S6222880Y2 JP 1979007224 U JP1979007224 U JP 1979007224U JP 722479 U JP722479 U JP 722479U JP S6222880 Y2 JPS6222880 Y2 JP S6222880Y2
Authority
JP
Japan
Prior art keywords
blades
carry
chamber
path
electron beam
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1979007224U
Other languages
English (en)
Japanese (ja)
Other versions
JPS55106900U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1979007224U priority Critical patent/JPS6222880Y2/ja
Publication of JPS55106900U publication Critical patent/JPS55106900U/ja
Application granted granted Critical
Publication of JPS6222880Y2 publication Critical patent/JPS6222880Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • X-Ray Techniques (AREA)
JP1979007224U 1979-01-23 1979-01-23 Expired JPS6222880Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1979007224U JPS6222880Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1979-01-23 1979-01-23

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1979007224U JPS6222880Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1979-01-23 1979-01-23

Publications (2)

Publication Number Publication Date
JPS55106900U JPS55106900U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1980-07-25
JPS6222880Y2 true JPS6222880Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1987-06-10

Family

ID=28814765

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1979007224U Expired JPS6222880Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1979-01-23 1979-01-23

Country Status (1)

Country Link
JP (1) JPS6222880Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5338345Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1973-06-01 1978-09-18
JPS5139901A (en) * 1974-09-30 1976-04-03 Kawasaki Heavy Ind Ltd Baketsutososareba no sejosochi

Also Published As

Publication number Publication date
JPS55106900U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1980-07-25

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