JPS62228364A - ライン式連続送り鏡面研磨装置 - Google Patents

ライン式連続送り鏡面研磨装置

Info

Publication number
JPS62228364A
JPS62228364A JP7041686A JP7041686A JPS62228364A JP S62228364 A JPS62228364 A JP S62228364A JP 7041686 A JP7041686 A JP 7041686A JP 7041686 A JP7041686 A JP 7041686A JP S62228364 A JPS62228364 A JP S62228364A
Authority
JP
Japan
Prior art keywords
polishing
liquid
workpiece
tool
viscoelastic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP7041686A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0416311B2 (enExample
Inventor
Koichi Kiyomiya
清宮　紘一
Kenji Nakagami
中上　健治
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
MIRAKURU KK
National Institute of Advanced Industrial Science and Technology
Original Assignee
MIRAKURU KK
Agency of Industrial Science and Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by MIRAKURU KK, Agency of Industrial Science and Technology filed Critical MIRAKURU KK
Priority to JP7041686A priority Critical patent/JPS62228364A/ja
Publication of JPS62228364A publication Critical patent/JPS62228364A/ja
Publication of JPH0416311B2 publication Critical patent/JPH0416311B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Electrical Discharge Machining, Electrochemical Machining, And Combined Machining (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
JP7041686A 1986-03-28 1986-03-28 ライン式連続送り鏡面研磨装置 Granted JPS62228364A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7041686A JPS62228364A (ja) 1986-03-28 1986-03-28 ライン式連続送り鏡面研磨装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7041686A JPS62228364A (ja) 1986-03-28 1986-03-28 ライン式連続送り鏡面研磨装置

Publications (2)

Publication Number Publication Date
JPS62228364A true JPS62228364A (ja) 1987-10-07
JPH0416311B2 JPH0416311B2 (enExample) 1992-03-23

Family

ID=13430845

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7041686A Granted JPS62228364A (ja) 1986-03-28 1986-03-28 ライン式連続送り鏡面研磨装置

Country Status (1)

Country Link
JP (1) JPS62228364A (enExample)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0215920A (ja) * 1988-07-04 1990-01-19 Tokyo Electric Power Co Inc:The 壁面除染装置
JPH0366563A (ja) * 1989-08-02 1991-03-22 Taika Kogyo Kk 金属板研摩装置
JPH0679533A (ja) * 1992-09-02 1994-03-22 Nishiyama Stainless Chem Kk 複合電解研磨方法
JPH08229743A (ja) * 1995-11-27 1996-09-10 C Uyemura & Co Ltd 板材の研摩装置
JP2009184093A (ja) * 2008-02-08 2009-08-20 Mitsubishi Rayon Co Ltd 走行基板の連続研磨装置及び研磨方法
JP2010516900A (ja) * 2007-01-29 2010-05-20 トーソー エスエムディー，インク． 超平滑面スパッターターゲットとそれを製造する方法

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS541108U (enExample) * 1977-06-06 1979-01-06
JPS54123493U (enExample) * 1978-02-17 1979-08-29

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS541108U (enExample) * 1977-06-06 1979-01-06
JPS54123493U (enExample) * 1978-02-17 1979-08-29

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0215920A (ja) * 1988-07-04 1990-01-19 Tokyo Electric Power Co Inc:The 壁面除染装置
JPH0366563A (ja) * 1989-08-02 1991-03-22 Taika Kogyo Kk 金属板研摩装置
JPH0679533A (ja) * 1992-09-02 1994-03-22 Nishiyama Stainless Chem Kk 複合電解研磨方法
JPH08229743A (ja) * 1995-11-27 1996-09-10 C Uyemura & Co Ltd 板材の研摩装置
JP2010516900A (ja) * 2007-01-29 2010-05-20 トーソー エスエムディー，インク． 超平滑面スパッターターゲットとそれを製造する方法
JP2009184093A (ja) * 2008-02-08 2009-08-20 Mitsubishi Rayon Co Ltd 走行基板の連続研磨装置及び研磨方法

Also Published As

Publication number Publication date
JPH0416311B2 (enExample) 1992-03-23

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term