JPS62228364A - ライン式連続送り鏡面研磨装置 - Google Patents
ライン式連続送り鏡面研磨装置Info
- Publication number
- JPS62228364A JPS62228364A JP7041686A JP7041686A JPS62228364A JP S62228364 A JPS62228364 A JP S62228364A JP 7041686 A JP7041686 A JP 7041686A JP 7041686 A JP7041686 A JP 7041686A JP S62228364 A JPS62228364 A JP S62228364A
- Authority
- JP
- Japan
- Prior art keywords
- polishing
- liquid
- workpiece
- tool
- viscoelastic
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000005498 polishing Methods 0.000 title claims abstract description 120
- 239000007788 liquid Substances 0.000 claims abstract description 59
- 239000006061 abrasive grain Substances 0.000 claims abstract description 18
- 230000007246 mechanism Effects 0.000 claims description 8
- 239000003190 viscoelastic substance Substances 0.000 claims description 4
- 230000002093 peripheral effect Effects 0.000 abstract description 5
- JOYRKODLDBILNP-UHFFFAOYSA-N urethane group Chemical group NC(=O)OCC JOYRKODLDBILNP-UHFFFAOYSA-N 0.000 abstract 1
- 239000000463 material Substances 0.000 description 7
- 229910001220 stainless steel Inorganic materials 0.000 description 7
- 239000010935 stainless steel Substances 0.000 description 7
- 230000035699 permeability Effects 0.000 description 4
- 239000002131 composite material Substances 0.000 description 3
- 239000003792 electrolyte Substances 0.000 description 3
- 239000008151 electrolyte solution Substances 0.000 description 3
- 239000004745 nonwoven fabric Substances 0.000 description 3
- 239000004677 Nylon Substances 0.000 description 2
- 238000003491 array Methods 0.000 description 2
- 238000005868 electrolysis reaction Methods 0.000 description 2
- 230000005484 gravity Effects 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 229920001778 nylon Polymers 0.000 description 2
- 239000000843 powder Substances 0.000 description 2
- 229920003002 synthetic resin Polymers 0.000 description 2
- 239000000057 synthetic resin Substances 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 239000003082 abrasive agent Substances 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000010419 fine particle Substances 0.000 description 1
- 239000006260 foam Substances 0.000 description 1
- 230000014759 maintenance of location Effects 0.000 description 1
- 229920002635 polyurethane Polymers 0.000 description 1
- 239000004814 polyurethane Substances 0.000 description 1
- 238000005086 pumping Methods 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 238000004804 winding Methods 0.000 description 1
Landscapes
- Electrical Discharge Machining, Electrochemical Machining, And Combined Machining (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7041686A JPS62228364A (ja) | 1986-03-28 | 1986-03-28 | ライン式連続送り鏡面研磨装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7041686A JPS62228364A (ja) | 1986-03-28 | 1986-03-28 | ライン式連続送り鏡面研磨装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62228364A true JPS62228364A (ja) | 1987-10-07 |
| JPH0416311B2 JPH0416311B2 (enrdf_load_stackoverflow) | 1992-03-23 |
Family
ID=13430845
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7041686A Granted JPS62228364A (ja) | 1986-03-28 | 1986-03-28 | ライン式連続送り鏡面研磨装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62228364A (enrdf_load_stackoverflow) |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0215920A (ja) * | 1988-07-04 | 1990-01-19 | Tokyo Electric Power Co Inc:The | 壁面除染装置 |
| JPH0366563A (ja) * | 1989-08-02 | 1991-03-22 | Taika Kogyo Kk | 金属板研摩装置 |
| JPH0679533A (ja) * | 1992-09-02 | 1994-03-22 | Nishiyama Stainless Chem Kk | 複合電解研磨方法 |
| JPH08229743A (ja) * | 1995-11-27 | 1996-09-10 | C Uyemura & Co Ltd | 板材の研摩装置 |
| JP2009184093A (ja) * | 2008-02-08 | 2009-08-20 | Mitsubishi Rayon Co Ltd | 走行基板の連続研磨装置及び研磨方法 |
| JP2010516900A (ja) * | 2007-01-29 | 2010-05-20 | トーソー エスエムディー，インク． | 超平滑面スパッターターゲットとそれを製造する方法 |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS541108U (enrdf_load_stackoverflow) * | 1977-06-06 | 1979-01-06 | ||
| JPS54123493U (enrdf_load_stackoverflow) * | 1978-02-17 | 1979-08-29 |
-
1986
- 1986-03-28 JP JP7041686A patent/JPS62228364A/ja active Granted
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS541108U (enrdf_load_stackoverflow) * | 1977-06-06 | 1979-01-06 | ||
| JPS54123493U (enrdf_load_stackoverflow) * | 1978-02-17 | 1979-08-29 |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0215920A (ja) * | 1988-07-04 | 1990-01-19 | Tokyo Electric Power Co Inc:The | 壁面除染装置 |
| JPH0366563A (ja) * | 1989-08-02 | 1991-03-22 | Taika Kogyo Kk | 金属板研摩装置 |
| JPH0679533A (ja) * | 1992-09-02 | 1994-03-22 | Nishiyama Stainless Chem Kk | 複合電解研磨方法 |
| JPH08229743A (ja) * | 1995-11-27 | 1996-09-10 | C Uyemura & Co Ltd | 板材の研摩装置 |
| JP2010516900A (ja) * | 2007-01-29 | 2010-05-20 | トーソー エスエムディー，インク． | 超平滑面スパッターターゲットとそれを製造する方法 |
| JP2009184093A (ja) * | 2008-02-08 | 2009-08-20 | Mitsubishi Rayon Co Ltd | 走行基板の連続研磨装置及び研磨方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0416311B2 (enrdf_load_stackoverflow) | 1992-03-23 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EXPY | Cancellation because of completion of term |